Galvanometer Optical Scanner & Driver Special Features Low inertia and high torque Exact linearity and precise position control Superior temperature c
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1 Galvanometer Optical Scanner GVM-9 S GVM-9 L GVM-445 S GVM-445 L GVM-226 GVM-22 GVM-25 Built-in Optical Sensor Galvanometer Optical Coreless Scanner DC Motors RoHS RoHS Directive Compliance
2 Galvanometer Optical Scanner & Driver Special Features Low inertia and high torque Exact linearity and precise position control Superior temperature characteristics and minimal humidity effect Stable production quality Examples of application Laser Marking Laser Microscopy Image capturing Laser drilling, trimming and cutting Non-contact sensoring and measurement High-speed Printing Contents Special FeaturesExamples of application... P. Scanner: SelectionNumbering Scheme... P.2 GVM-9S... P. GVM-9L... P.4 GVM-445S... P.5 GVM-445L... P.6 GVM P.7 GVM P. GVM P.9 GVM-226/ GVM-22/ GVM-25 Connector Pin Sequence... P. GVM-9/ GVM-445 Dedicated Connection Cable... P. Mirror: Mirror Selection, Serial Numbering Scheme... P. / / Assy Mirror/ Material/Coating, Mirror Assembly-Reflectance Data... P.2 Assy Mirror Assembly drawing... P. Mirror forming angle... P.4 Driver: SpecificationOutside Configuration... P.5 Serial Numbering Scheme... P.6 Terms and Definitions... P.7 Memo... P.
3 Scanner Selection Galvanometer Optical Scanner Scanner Model (mm) Laser Beam Diameter (mm) Mirror arrangement to shaft GVM-9S GVM-9L GVM-445S Adhesive to shaft directly GVM-445L GVM-226 GVM-22 GVM-25 Assy Fixed with mirror holder screw Recommendation Available Scanner Serial Numbering Scheme GVM-445S-M- Type of Scanner 9S9L 445S445L Customized registered number Only used for customized products ( ) Mechanical Angle bumpers set for scanning 5 bumpers set for 5scanning 22 bumpers set for 2scanning C bumpers set for customized angle Cable Length (GVM-9GVM-445) GVM-9, GVM-445 on board connector 5mm 5mm/ signal power cables 2mm mm/ signal power cables C customized connectivity Spindle type (GVM-226GVM-22GVM-25 normal spindle (GVM-226, GVM-22 and GVM-25 (GVM-9GVM-445 Integrated holder for GVM-9, GVM-445 mirror C customized spindle With or without mirror without mirror Mwith mirror Mirror angle against cable ( ) without mirror or aligned with connector 45 45to connector to connector 9 9to connector 49 9to connector 5 to connector C customized spindle ( P.4 please refer page 4 ) 2
4 GVM-9S Galvanometer Optical Scanner Scanner GM Assy Scanner drawing with GM mirror assembly. Unitmm X 6 5mRAD P. Dedicated connection cable is required. ( please refer page ) Connector Pin Sequence Y SMB-ZPDSS-TF (JST) Pin No. Function 6 5mRAD A B PD COM AGC RETURN AGC IN NC MOTOR MOTOR 5.2 P. Dedicated connection cable is required. ( please refer page ) Scanner Specifications Max. Scan Angle Rotor Inertia Coil Resistance Coil Inductance Torque Constant Back EMF Voltage Peak Current Max. Coil Temperature Weight Unit deg mech. gcm 2 mh mnm/ A mv/ deg/ sec A (Max.) C g GVM-9S %.54 %.2 %.224 % 9 5 Dynamic Specifications typ./ max. typ./ max. Repeatability Non-Linearity Offset Drift Gain Drift Step Response Time Output Signal (Common Mode) Output Signal (Differential Mode) Input Signal Unit rad % rad/ C ppm/ C sec A A/ deg ma GVM-9S. (Max.) (Max.) 5 (Max.) 5 42 % 4. % % All results using appropriate Citizen servo driver and mirror. All angles are in mechanical degrees.
5 GVM-9L Galvanometer Optical Scanner Scanner GM Assy Scanner drawing with GM mirror assembly. Unitmm X 6 5mRAD P. Dedicated connection cable is required. ( please refer page ) Connector Pin Sequence SMB-ZPDSS-TF (JST) Pin No Function A B PD COM AGC RETURN AGC IN NC MOTOR MOTOR Y P. Dedicated connection cable is required. ( please refer page ) 5mRAD Scanner Specifications Max. Scan Angle Rotor Inertia Coil Resistance Coil Inductance Torque Constant Back EMF Voltage Peak Current Max. Coil Temperature Weight Unit deg mech. gcm 2 mh mnm/ A mv/ deg/ sec A (Max.) C g GVM-9L 2..9 %.46 %.7 %.297 % Dynamic Specifications typ./ max. typ.b/ max. Repeatability Non-Linearity Offset Drift Gain Drift Step Response Time Output Signal (Common Mode) Output Signal (Differential Mode) Input Signal Unit rad % rad/ C ppm/ C sec A A/ deg ma GVM-9L. (Max.) (Max.) 5 (Max.) 5 42 % 4. % % All results using appropriate Citizen servo driver and mirror. All angles are in mechanical degrees. 4
6 GVM-445S Galvanometer Optical Scanner Scanner GM Assy Scanner drawing with GM mirror assembly. Unitmm X 6 5mRAD P. Dedicated connection cable is required. ( please refer page ) Connector Pin Sequence Y SMB-ZPDSS-TF (JST) Pin No. Function A 2 B PD COM 4 AGC RETURN 5 AGC IN 6 NC 7 9 MOTOR MOTOR 6 5mRAD.2 P. Dedicated connection cable is required. ( please refer page ) Scanner Specifications Max. Scan Angle Rotor Inertia Coil Resistance Coil Inductance Torque Constant Back EMF Voltage Peak Current Max. Coil Temperature Weight Unit deg mech. gcm 2 mh mnm/ A mv/ deg/ sec A (Max.) C g GVM-445S 2.7. %.57 % 2. %.49 % 2 2 Dynamic Specifications typ./ max. typ./ max. Repeatability Non-Linearity Offset Drift Gain Drift Step Response Time Output Signal (Common Mode) Output Signal (Differential Mode) Input Signal Unit rad % rad/ C ppm/ C sec A A/ deg ma GVM-445S. (Max.) (Max.) 5 (Max.) 6 42 % 4. % % All results using appropriate Citizen servo driver and mirror. All angles are in mechanical degrees. 5
7 GVM-445L Galvanometer Optical Scanner Scanner GM Assy Scanner drawing with GM mirror assembly. Unitmm X 6 5mRAD P. Dedicated connection cable is required. ( please refer page ) Connector Pin Sequence Y SMB-ZPDSS-TF (JST) 6 5mRAD Pin No. 2 Function A B PD COM AGC RETURN AGC IN NC MOTOR MOTOR P. Dedicated connection cable is required. ( please refer page ) Scanner Specifications Unit GVM-445L Max. Scan Angle deg mech. 2 Rotor Inertia gcm 2. Coil Resistance.6 % Coil Inductance mh. % Torque Constant mnm/ A 5.4 % Back EMF Voltage mv/ deg/ sec. % Peak Current A (Max.) 2 Max. Coil Temperature C Weight g 4 Dynamic Specifications Unit GVM-445L Repeatability rad Non-Linearity %. (Max.) typ./ max. Offset Drift rad/ C (Max.) typ.b/ max. Gain Drift ppm/ C 5 (Max.) Step Response Time sec 2 Output Signal (Common Mode) Output Signal (Differential Mode) A A/ deg 42 % 4. % Input Signal ma % All results using appropriate Citizen servo driver and mirror. All angles are in mechanical degrees. 6
8 GVM-226 Galvanometer Optical Scanner Scanner Unitmm 5mm Cable Length Sensor Connector X Y Motor Connector DFB-DS-2.5RC ( ) Made by HIROSE ELECTRIC CO., LTD. VHR-N (JST) Made by JST Mfg. Co., Ltd. + Mirror + Scanner GM2 Assy Scanner drawing with GM2 mirror assembly Scanner Specifications Max. Scan Angle Rotor Inertia Coil Resistance Coil Inductance Torque Constant Back EMF Voltage Peak Current Max. Coil Temperature Weight Unit deg mech. gcm 2 mh mnm/ A mv/ deg/ sec A (Max.) C g GVM %. % %.4 % Dynamic Specifications typ./ max. typ./ max. Repeatability Non-Linearity Offset Drift Gain Drift Step Response Time Output Signal (Common Mode) Output Signal (Differential Mode) Input Signal Unit rad % rad/ C ppm/ C sec A A/ deg ma GVM-226. (Max.) (Max.) 5 (Max.) 2 42 % 4. % % All results using appropriate Citizen servo driver and mirror. All angles are in mechanical degrees. 7
9 GVM-22 Galvanometer Optical Scanner Scanner Unitmm 5mm Cable Length Sensor Connector X Y Motor Connector DFB-DS-2.5RC ( ) Made by HIROSE ELECTRIC CO., LTD. VHR-N (JST) Made by JST Mfg. Co., Ltd. + Mirror + Scanner GM4 Assy Scanner drawing with GM4 mirror assembly Scanner Specifications Max. Scan Angle Rotor Inertia Coil Resistance Coil Inductance Torque Constant Back EMF Voltage Peak Current Max. Coil Temperature Weight Unit deg mech. gcm 2 mh mnm/ A mv/ deg/ sec A (Max.) C g GVM %.9 % 5 %.25 % 2 7 Dynamic Specifications typ./ max. typ./ max. Repeatability Non-Linearity Offset Drift Gain Drift Step Response Time Output Signal (Common Mode) Output Signal (Differential Mode) Input Signal Unit rad % rad/ C ppm/ C sec A A/ deg ma GVM-22. (Max.) (Max.) 5 (Max.) % 4. % % All results using appropriate Citizen servo driver and mirror. All angles are in mechanical degrees.
10 GVM-25 Galvanometer Optical Scanner Scanner Unitmm 5mm Cable Length Sensor Connector X Y Motor Connector DFB-DS-2.5RC ( ) Made by HIROSE ELECTRIC CO., LTD. VHR-N (JST) Made by JST Mfg. Co., Ltd. + Mirror + Scanner GM5 Assy Scanner drawing with GM5 mirror assembly Scanner Specifications Max. Scan Angle Rotor Inertia Coil Resistance Coil Inductance Torque Constant Back EMF Voltage Peak Current Max. Coil Temperature Weight Unit deg mech. gcm 2 mh mnm/ A mv/ deg/ sec A (Max.) C g GVM %. % 2 %.56 %.4 22 Dynamic Specifications typ./ max. typ./ max. Repeatability Non-Linearity Offset Drift Gain Drift Step Response Time Output Signal (Common Mode) Output Signal (Differential Mode) Input Signal Unit rad % rad/ C ppm/ C sec A A/ deg ma GVM-25. (MAX.) (MAX.) 5 (MAX.) 42 % 4. % % All results using appropriate Citizen servo driver and mirror. All angles are in mechanical degrees. 9
11 Galvanometer Optical Scanner GVM-226/ GVM-22/ GVM-25 Connector Pin Sequence Sensor Connector DFB-DS-2.5RC ( ) Pin No. Function Motor Connector Pin No. VHR-N ( JST ) Function 2 A B Frame ground 4 PD COM AGC RETURN 2 Galvanometer Scanner pole 5 6 AGC IN NC Galvanometer Scanner pole 7 9 NC NC GVM-9/ GVM-445 Dedicated connection cable Cable Serial Numbering Scheme GC- Cable length 25mm mm 25mm mm 4mm 52mm C customized length Customized number Only used for customized products Connector standard Ccustomized connector Cable Figure Unitmm ZPDR-V-S ( JST ) DFB-DS-2.5RC ( ) ( HIROSE ELECTRIC CO., LTD.) To Scanner To Driver L Model Length L (mm) GC 25 GC GC2 5 GC GC4 GC5 2 Connector Pin Sequence DFB-DS-2.5RC ( ) Pin No. Function A 2 B PD COM 4 AGC RETURN 5 AGC IN 6 NC 7 9 MOTOR MOTOR
12 Galvanometer Optical Scanner Mirror Mirror Selection Mirror model (mm) Laser beam diameter (mm) Mirror MaterialSi GM- GM- GM-2 GM-4 GM-5 GM-6 GM GVM-9S GVM-9L GVM-445S Scanner GVM-445L GVM-226 GVM-22 GVM-25 Holder type Mirror Assembly Weight (g) Adhesive to shaft directly Fixed with mirror holder screw X Y Recommendation Available GVM-445L In case of the combination of GVM-445L and mirror, it will be adhesive fixed. Mirror Serial Numbering Schemes GMX- Laser beam diameter 5mm 7.5mm 2mm 45mm 52mm 6mm 7mm C customized size Mirror Shape XX or first mirror YY or second mirror Ccustomized mirror Customized number Only used for customized products Coating Au ( ) Au protected gold (.6m ) (.6m) Ag ( ) Ag protected silver (64nm & 52nm ) (64nm or 52nm) 2 Dielectric coating (64nm ) (64nm) C customized coating Mirror Material Si Si Silicon - 2SiO2 SiO2 Quartz ( ) C customized substrate
13 Galvanometer Optical Scanner Mirror Mirror Material/ Recommendation Coating Mirror model Laser beam diameter Mirror material Recommendation coating GM- 5 Si (Silicon) Ag protected silver GM- 7.5 Si (Silicon) Au protected gold/ Ag protected silver GM-2 Si (Silicon) SiO 2 ( Quartz) Au protected gold/ Ag protected silver YAG64mm Dielectric coating (For YMG64mm) GM-4 5 Si (Silicon) SiO 2 ( Quartz) Au protected gold/ Ag protected silver YAG64mm Dielectric coating (For YMG64mm) GM-5 2 Si (Silicon) SiO 2 ( Quartz) Au protected gold YAG64mm Dielectric coating (For YMG64mm) GM-6 Si (Silicon) SiO 2 ( Quartz) Au protected gold YAG64mm Dielectric coating (For YMG64mm) GM-7 SiO 2 ( Quartz) Ag protected silver CO2.6 m 52nm64nm YAG 64nm ( ) We change the coating by laser specification. Au protected gold Mainly CO2 laser (wavelength.6 m) Ag protected silver Mainly visible ray laser (wavelength 52nm,64nm etc...) Dielectric coating Mainly YAG laser maximum reflectance (wavelength 64nm etc...) (Dielectric coating has a different coating depending on the wavelength) Assy- ( 45)Mirror Assembly-Reflectance Data (Incident Angle 45). Au ( ) Au protected gold Reflectance (%) Au() Gold-Coating Ag() Silver-Coating Dielectric-Coating Wavelength (nm) Ag ( ) Ag protected silver Dielectric coating Reflectance (%) Reflectance (%) Wavelength (nm) Wavelength (nm) 2
14 Galvanometer Optical Scanner Mirror Assy Mirror Assembly Drawing GM2 X Laser beam diameter Y Entered into Screw mrad Entered into Screw mrad 2 24 Reflective Surface Depth Entered into Screw mrad Reflective Surface Entered into Screw mrad 47 4 Reflective Surface Depth GM4 5 Laser beam diameter Entered into Screw mrad X Entered into Screw mrad Y 6 2 Reflective Surface Depth Depth GM5 2 Laser beam diameter X Y Depth Depth GM6 Laser beam diameter Entered into Screw mrad X Reflective Surface Entered into Screw mrad Y 6 64 Reflective Surface Depth Depth
15 Galvanometer Optical Scanner Mirror Mirror forming angle GVM-9 GVM-445 GVM-226 GVM-22 GVM-25 Connector Cable /-+/- All mirrors are designed as a mechanical angle +/-of laser beam diameter respectively. If you wish to use a mechanical angle more than +/-, please contact us. 4
16 Galvanometer Optical Scanner Driver Outside Dimensions Unitmm Driver Specifications GVD - - Model GVD - - 5V 24V Power voltage 5V or 24V 2.5A RMS Power Max. continuous current 2.5A RMS A Max. instant current A ( ) V 5V V 2k ( ) Command signal input Voltage(Differential) Input impedance V 5V V 2k (At differential input).5v 2.5V 5V Monitor output Position output.5v 2.5V 5V Input signal Servo enable Output signal Ready Function Protection Over heat of driver Over position Over current Malfunction of sensor 5 Temperature in use from to 5 9 x 57.5 x mm Dimension 9 x 57.5 x mm 6g ( ) Weight 6g (with heat sink) P PI GVD P PI P PI ( ) P PI Our galvanometer optical scanner (GVD) series have either P or PI control systems. Please refer to the following information when you select one from the two control systems before your order. P Control This control outputs the signal in proportion to the error by comparing the control and position feedback signals. The closed-loop band is high because of the absence of time integration. The scanner responds quickly and sets position promptly. The distortion and friction may produce position error against control. PI Control This control outputs the time-integrated position error by comparing the control and position feedback signals. Keeps the steady state (the state of extremely small position error) without the influence of distortion and friction. This time-integration can attain extremely high position repeatability. Please select P control when you emphasize speed of setting time, and PI control when you value position repeatability. 5
17 Driver Serial Numbering Scheme Galvanometer Optical Scanner Driver GVD-- Power Voltage 5V 24V Customized number Only used for customized products Control System P P Control PI PI Control Command Voltage V V 25V Ccustomized voltage ( ) Mechanical Angle bumpers set for scanning 5bumpers set for 5scanning 27.5bumpers set for 7.5scanning 2.5 bumpers set for 2.5scanning 45 bumpers set for 5scanning 52 bumpers set for 2scanning C bumpers set for customized angle Beam Diameter (Mirror size) mm 5mm 2 7.5mm mm 4 2.5mm 5 5mm 6 2mm 7 mm Ccustomized size Type of Scanner 9S 9L 2445S 445L
18 Galvanometer Optical Scanner Terms and Definitions (Figure ) Scan angle Non-Linearity (Figure ) Positional repeatability in corresponding to positional command signal. Calculation of non-linearity is that a sum of two absolute values of positive and negative maximum deviation of measured values from a least square line is divided by a full-scale angle on a least square line. Positional command Non-Linearity Offset drift (Figure 2) Variation of offset caused by change of temperature. Amount of positional change is measured to a change of ambient temperature from to 5 C, with a scan angle fixed at. Gain drift (Figure ) Variation of gain caused by change of temperature. Amount of positional change is measured to the change of ambient temperature from to 5 C, with a maximum scan angle ±n. Thermal drift (Figure 4) Maximum amount of positional change due to the combined effect of offset and thermal drift. Step response time (Figure 5) The step response time is measured from initial scanner motion to the time at which the scanner enters and stays within the settling tolerance centered around the final position. * A specification in the catalogue is a step time to achieve an settling tolerance of scan angle ±. and settlement width ±.. (Figure 2) Scan angle (Figure ) Scan angle Positional command Positional command Offset drift Gain drift (Figure 4) Scan angle Scan angle (Figure 5). Positional command signal (scan angle.). Settling width. Positional command Positional signal Step time Thermal drift Offset driftgain drift Time 7
19 Memo
20 Semiconductor Equipment: Stepper aligner, spincoater, dicing saw, turbo molecular pump, cleaning equipment, die bonder, equipment for test, inspection and high accuracy motion control including use in vacuum condition. Optical and Magnetic Disk Storage Equipment: Optical disk initializer, optical disk testing system, optical disk storage media certifi ers. Digital Imaging Equipment: Laser scanner with mirror / polygons, high-end laser printer, image setter and other high performance spinning scanning products. Medical Equipment: High-speed dental micro grinder, ultrasonic diagnosis, artifi cial heart, X-ray instruments and centrifugal separater. Laser and Optical Equipment: Laser marker, laser scanner, optical measuring equipment, image processor, optical fi ber splicing machine, laser microscope, optical connector equipment and electron microscope. Machine Tools, FA and Inspection Equipment: Robots, actuator, cardreader, high speed drilling machine, grinding machine, mirror polishing equipment, welding machine, contact lens lathers, -D measuring equipment and high speed winding machine. Technical data and products are subject to change without notice. For further information, please contact us or our authorized agent at any time. info@ccj.citizen.co.jp / -, Yoshihashi, Yachiyo, Chiba , Japan Telephone : / Facsimile : info@ccj.citizen.co.jp / 25.
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