LCR NMIJ 003 Agilent 8A 500 ppm
JIS Z803:000 50 (substitution method) 3 LCR LCR GPIB
Taylor 5 LCR LCR meter (Agilent 8A: Basic accuracy 500 ppm) V D z o I V DUT Z 3 V 3 I A Z V = I V = 0 3 6
V, A LCR meter z o I V D A V V 3 3 I Z DUT 7 [Ω] 0 mh at 59 Hz 0 m 00.880 00.875 00.870 00.865 00.860 00.855 00.850 00.85 00.80 00.835 5 ppm 3 (Lp) (Lc) (Hc) (Hp) 0 6 8 0 [m] (LCR meter: Agilent 8A) 8
at 59 Hz 90 mv [ppm] 0 30 0 0 0-0 -0 80 Ω 00 Ω 0 Ω 80 Ω 50 00 50 00 50 [mv] (LCR meter: Agilent 8A) 9 00.9 Ω 0. Ω 0.5 ma 0.5 ma 00.9 Ω 0. Ω 00 mv 0.977 ma 0.975 ma 0 mv 0.507 ma 0.50 ma LCR 00 Ω 0 ppm 0
LCR r x x = LCR y = fr ( rx, ) LCR y = f( x) = f ( rx, ) x = x+ ( y y) x x x 0 Taylor frr ( x0) frx ( x0) y = f( x ) ( ) ( ) ( ) ( ) 0 + x x0 + δ xx, 0 f x f x Xr 0 Xx 0 R X f R fr fx fx frr =, frx =, fxr =, fxx = r x r x X LCR f ( x ) f ( x ) Rr 0 Rx 0 y y F( x0 ) = fxr ( x0) fxx ( x0) y = f( x0) + F( x0) ( x x0) + δ( x, x ) ε 0 y = f( x0) + F( x0) ( x x0) + δ( x, x ) θ 0 δ x x+ ( y y) = x+ F( x0) ( x x) + δ( x, x0) δ( x, x0) = x + ( x ) ( x x ) + δ( x, x ) δ( x, x ) 0 0 0 ( x0) f ( x0) ( x ) f ( x ) x frr Rx ε r θ x ( x0) = F( x0) E= = fxr 0 Xx 0 θr ε x E x 0
K. Suzuki et al., A Calibration Method for Four- Terminal-Pair High-Frequency Resistance Standards, IEEE Trans. Instrum. Meas., vol., no.3, pp.379-38,993. e X x X θ x O e x x Ζ O O Impedance plane r y θ r R e r e R ε r, ε x θ r, θ x Z O δ = (δ r, δ x ) y Ax + ZO ( + εr) cosθr ( + εx) sinθx A ( + εr) sinθr ( + εx) cosθx ( ) δ = y Ax + Z O 3 x 0 ε r, ε x θ r, θ x δ x 0
ε x < 500 0-6 0.005 C: µf ppm of µf C C Meas C - C [nf] [nf] Span Error of LCR meter (Agilent 8A, C = µf) Date: 00/May/30 Span 500 ppm -0.00 C: 0 nf ( ~ C/ C = %) -0.003 0.00 0.003 0.00 0.00 0.000-0.00 595.7 Hz 000.00 Hz Span -500 ppm -0.00-0.005 0 6 8 0 Increment Increment of Capacitance of capacitance C C [nf] [nf] 5 30 ppm H. Fujimoto et. al, Development of Four-Terminal Pair High Capacitance Standards and Calibration Method Using Resister Standards, 00 NCSL Japan Forum, in Japanese. tanδ Q or 6
( ) δ = y Ax+ Z O r = X ( ) t t x= r x, y= ( R X) X = a x + a 0 σ (δ X ) X i X i δ X,i O x x i 7 I Z δ X / Z.5 0-6 (0 mh, 00 mh) Improved Voltage Method () V V 3 V Z = I V 3 V3 = 0 Z = KZ V' ' KV Relative Error δ X/ Z [ppm] 3.0.0.0 0.0 -.0 -.0-3.0 -.0 σ (δ X / Z ) =. ppm 0.9985 0.9990 0.9995.0000.0005.000.005 Ratio Z '/Z () K.Suzuki et al.: Non-Linearity Evaluation Method of Four-Terminal-Pair LCR Meter, NCSL International Conference Proceedings 00 8 3 5 6
δ X / Z <.5 0-6 (0 mh, 00 mh) Improved Current Method () KV V σ(δ B / Y ) =.3 ppm Y V 3 Y p KVY p I = Y V V3 = 0 I V 3 I' ' KY Y = + p Y Y Relative Error δb / Y [ppm].0 3.0.0.0 0.0 -.0 -.0-3.0 -.0 0.9985 0.9990 0.9995.0000.0005.000.005 Ratio (+ Y p K/Y ) () K.Suzuki et al.: Non-Linearity Evaluation Method of Four-Terminal-Pair LCR Meter, NCSL International Conference Proceedings 00 9 3 5 6 X O x x x 0 ε, θ, δ No LCR Yes Taylor No Yes R 0
0 0-6 Improved Current Method (0 mh at 595.7 Hz) Relative Error δb / Y [ppm] 0.0 8.0 6.0.0.0 0.0 -.0 -.0-6.0-8.0 LCR meter: Agilent 8A S/N MY007, Voltage: 6 mv, 3 5 6 0.9985 0.9990 0.9995.0000.0005.000.005 Ratio LCR Agilent 8A 000 Hz