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June 18, 2019 Name of the Company: Tokyo Electron Limited Name of the Representative: Toshiki Kawai President and CEO (Representative Director) (Code No.8035; The First Section of the Tokyo Stock Exchange) Person to contact: Tatsuya Aso Vice President of General Affairs Dept. (Tel: 03-5561-7000) Announcement on Organization Changes and Personnel Changes Tokyo Electron Limited (TEL) announces the following changes in the organization and personnel changes. 1. Personnel Changes for Executive Officers of Effective on June 18th, 2019 Tetsuo Tsuneishi Toshiki Kawai Sadao Sasaki Yoshikazu Nunokawa Tatsuya Nagakubo Kiyoshi Sunohara Seisu Ikeda Yoshinobu Mitano Barry Mayer David Brough Tetsuro Hori Kenji Washino Tsuguhiko Matsuura Hideyuki Tsutsumi Takeshi Okubo Masaki Yoshizawa Tadashi Shimizu Hiroshi Kawamoto Takeo Sasaki Yutaka Nanasawa Keiichi Akiyama Isamu Wakui Chairman of the Board President and CEO, Division Executive Vice President and Development & Production 1st Development & Production 4th EHS, Quality, Procurement, Production Technology President and Representative Tokyo Electron Technology Solutions Ltd. Executive Vice President and Finance Export & Logistics Control IT Internal Control Senior Vice President and Human Resources, General Affairs, CSR Legal, Compliance Chairman of Ethics Committee Senior Vice President and Field Solutions Business Business Innovation Project Senior Vice President and Account Sales Division Senior Vice President and SPE Business Division Senior Vice President and Global Strategy Chairman, Tokyo Electron U.S. Holdings, Inc. Senior Vice President and Global Strategy President and Managing Senior Vice President and Business Innovation Project Senior Vice President and Backend Process Business Division Senior Vice President and FPD Business Division Chairman, Tokyo Electron (Kunshan) Ltd. Senior Vice President and Corporate Marketing Senior Vice President and Global Sales Division Chairman, Tokyo Electron America, Inc. Chairman, Vice President and Strategy Vice President and Business Innovation Project Vice President and Finance Division Vice President and Export & Logistics Control Division Vice President and IT Business Innovation Project Chairman and President, TEL Solar Services AG Vice President and CTSPS BU Vice President and ES BU 1

Hiroshi Ishida Toshihiko Nishigaki Masayuki Kojima Shinichi Hayashi Shingo Tada Masahiro Morita Vice President and TFF BU Vice President and Corporate Marketing, Information Technology Chairman and President, TEL FSI, Inc. Vice President and Development & Production 2nd Division President and Representative Tokyo Electron Miyagi Ltd. Vice President and Development & Production 3rd Deputy Division President and Representative Tokyo Electron Kyushu Ltd. Vice President and Deputy Account Sales Division Vice President and Account Sales, Global Sales 2.Personnel Change for General Manager of Effective on June 18th, 2019 Shoko - Kimijima Deputy Legal, Compliance Chief Compliance Officer, Compliance 3.Changes in Organization Effective on July 1st, 2019 (1) Hideyuki Tsutsumi, Senior Vice President and will be assigned as Vice Division General Manager, Division. (2) Toshihiko Nishigaki, Deputy Division will be assigned as a person in charge of Digital Transformation. (3) Akihisa Sekiguchi, Deputy Division will be assigned as a person of an external alliance strategy and Office of Alliance Strategy (Akihisa Sekiguchi) will be newly established. (4) The functions of the Center will be divided to the SDC Equipment Development Dept. (Shigeru Ishizawa), SDC Dept. (Katsuhiko Matsuda), and the SDC AI Development Dept. (Takahito Matsuzawa). 4.Personnel Changes relative to above the 2. for Executive Officers of Effective on July 1st, 2019 Hideyuki Tsutsumi Toshihiko Nishigaki Senior Vice President and Vice President and Deputy Division General Manager, Corporate Chairman & President, TEL FSI, Inc. Vice Division General Manager, Corporate Innovation Digital Transformation, 2 Corporate Marketing, Corporate Marketing, Information Technology,

5.Personnel Changes for Corporate Director of Subsidiary Effective on July 1st, 2019* * The effective date for overseas subsidiaries depends on registration procedure of each country. Yoshiaki Horii Yasuyuki Kuriki - Tokyo Electron Korea Ltd. - Senior Adviser, Tokyo Electron Korea Ltd. Adviser, Tokyo Electron Korea Ltd. 6.Personnel Changes for Representative of Subsidiary Effective on October 1st, 2019* * The effective date for overseas subsidiaries depends on registration procedure of each country. David Brough James Traynor Senior Vice President and Global Strategy, Tokyo Electron Israel Ltd. TEL Magnetic Solutions Ltd. TEL Solar Services AG TEL FSI Holdings B.V. TEL FSI Netherland B.V. Managing TEL FSI Germany Gmbh. TEL FSI Israel Ltd. - President and Managing Tokyo Electron Israel Ltd. TEL Magnetic Solutions Ltd. President and Managing Tokyo Electron Israel Ltd. TEL Magnetic Solutions Ltd. SVP, 3

7. Changes in Organization of Dept. Effective on July 1st, 2019 (1) BPR Promotion Dept.(Masashi Moriyama) under the SPE Business Division (General Manager: Yoshinobu Mitano) will be transferred under the Business Innovation Project (General Manager: Kiyoshi Sunohara), and renamed as BPR Promotion 1st Dept. In addition, BPR Promotion 2nd Dept. (Yutaka Nanasawa) will be newly established under the Business Innovation Project. (2) Branding Promotion Dept. (Tsunekazu Ohta) will be newly established under the Human Resources, General Affairs, CSR Division (General Manager: Tatsuya Nagakubo). (3) Under FPD BU (General Manager: Hiroshi Ishida), with the commercialization of inkjet printing system, New Product Project Dept. will be replaced by Fine Coating Process Dept. (Takeo Kaeriyama). In addition, FPD System Sales Dept. and FPD System Marketing Dept. will be renamed as Dry Process Dept. (Masashi Kawano) and FPD Marketing Dept. (Tetsushi Nagoya) respectively. 8. Personnel Changes of Effective on July 1st, 2019 Name Continuing Position* New Position Current Position Akihisa Sekiguchi Naoki Inagaki Kazuya Okubo - Deputy Division Office of Alliance Strategy, Deputy Division Corporate - Deputy Corporate Marketing, Device Technology, - Corporate Technical Global R&D, Corporate Strategy Planning 4

Takashi Hayakawa Shigeru Ishizawa Katsuhiko Matsuda Takahito Matsuzawa Masashi Moriyama - Corporate Technical -, Corporate SDC Equipment Development - SDC System Development - SDC AI Development Operation Planning BPR Promotion 1st Emerging Technology Corporate Technical Module Development Equipment Development Project., AI Development BPR Promotion 5

Yutaka Nanasawa Tsunekazu Ohta Masashi Kawano Tetsushi Nagoya Takeo Kaeriyama Vice President and IT Business Innovation Sub Leader, IT, Business Innovation Chairman & President, TEL Solar Services AG TEL Solar Holding AG BPR Promotion 2nd - Branding Promotion - Dry Process - FPD - Fine Coating Process Takeshi Hirai - FPD BU, * Some Continuing Positions of Subsidiary are described only about President and Chairman. - Thin Film Formation Sales 2nd FPD System Sales FPD System FPD System Sales FPD System Sales 6