CATALOGUE No.EC06 For Semiconductor
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1 CATALOGUE No.EC06 For Semiconductor
2 Contents Products Products Categories No. Name Page Wafer Manufacturing Wet Wafer Device Manufacturing Dry Wafer Assembly Plant Building and Utility Categories No. Name Page Wafer Manufacturing Wet Wafer Device Manufacturing Dry Wafer Assembly Plant Building and Utility Molded and Machined Products Gaskets Molded and Machined Products, Tapes, and Tubes VALFLON PTFE Machined Products and Welded Products VALFLON PTFE Tanks Molded and Machined Products Materials and Tapes Materials and Tapes Tubes Seal Related Products VALFLON Cord Seal <Soft> VALFLON Soft Sheet VALFLON Envelope Gasket Metal Hollow O-ring TRYPACK High Purity Oxygen-Free Copper Gasket Bellows and other products PTFE Tubes DYNAMICBELLOWS TM M Series PTFE EX Tubes 6 Others 7-2 DYNAMICBELLOWS TM V Series VALFLON Corrugated Tubes Clean Bolt 14 VALFLON Lined Products 4-1 VALFLON Lined Products Pipes and Fittings Elastomers 7 Data 7-4 Sliding Shaft Fluorocarbon Plastics Comparison Table Engineering Plastics Comparison Table Seal Related Products ARMOR Series FLUORITZ Series VALQUA Bonded Gate Seal 5-4 VICTRA-ER 10 Silicone Rubbers Fluoro-Rubbers HUVc Rubber Safety precautions regarding VALFLON VALQUA PTFE product Products in this catalog are not designed for usage on medical equipment that may come in contact with body fluids or any organic tissues. Please consult us for any application that may result in the situation described above. Please take necessary precautions when applying heat above 200. Ventilate appropriately and ensure that decomposed gas is not inhaled. Please dispose the items in compliance to local regulations. DO NOT INCINERATE. Please refer to the Material Safety Data Sheets (SDS) for environmental health and safety information. List of registered trademarks. ARMORARMOR CRYSTALFLID ARMORFLUORITZSPOQ ARMORULTIC ARMORVALFLONVICTRA-ER
3 1 Molded and Machined Products 1-1 VALFLON PTFE Machined Products and Welded Products 1-3 Molded and Machined Products Our PTFE shapes are processed using advanced machining techniques. VALFLON PFA and PTFE parts can be welded into various shapes upon request. Examples include customized designs, prototyping,chemical seals, and other applications. VALFLON PFA and other molded products can be made in various forms through extrusion and machining. Other fluorocarbon resins and engineering plastics such as PEEK and PEI are also available upon request. Size Table PFA bolts and nuts for size M4, M5, M6 : cylinder head and flat head bolt with 30mm nominal length for size M8 : hexagonal head bolt with 40mm nominal length H:height of head for bolts or thickness of nut. C:width across corners of bolts head or nut. PTFE Machined Products PTFE-PFA Welded Products 1-2 VALFLON PTFE Tanks VALFLON tanks are molded and machined. Thicker tank thicknesses make it suitable for use at higher temperatures. Joints and fittings may be welded upon request. Cylindrical tanks are also available. PTFE Machined Products Spray Ball Machined Engineering PlasticsPTFE, PEEK Rectangular Tank Rectangular Tank with Flange Overflow Tank Polyimide Film Heaters Polyimide Machined Products New VALFLON Bottles
4 2 Materials and Tapes 3 Tubes 2-1 Materials and Tapes Our VALFLON Materials and tapes are available in various designs via machining or cutting. Tape products are also available in surface treated cementable and adhesive coated forms. We support other materials including, PFA, and PCTFE. Please contact us for details. VALFLON Sleeves VALFLON Sheets VALFLON Rods 3-1 PTFE Tubes 3-2 PTFE EX Tubes Size Table PTFE tubes have excellent purity, chemical stability, transparency, and non-combustibility, making it suitable for transfer of high purity chemicals. Size Table EX tubes are special PTFE tubes with similar flex life, transparency, thermal fusibility, and machining properties as PFA tubes. Remarks Standard stocks / color : natural, length : 10m, 50m 2 Non-standard items are available by custom orders. Remark Please contact us for custom sizes. 3-3 VALFLON Corrugated Tubes VALFLON Tapes VALFLON Cementable Tapes Corrugated tubes are EX tubes with bellows-like shapes. The bellows portion reduces the tube's bending radius and load, allowing for smaller, more compact piping designs. Minimum Bending Radius Unit Size Table Note When cutting the tube for joint connections, leave at least 50mm of the straight segment marked portion. Remark Please contact us for custom sizes.
5 4 VALFLON Lined Products 5 Elastomers 4-1 Pipes and Fittings 5-1 ARMOR Series VALFLON PTFE or PFA Lined pipes and fittings offer a high level of chemical resistance for clean handling. Various assemblies and parts are available. ARMOR series provides high purity, low adhesion, and high plasma resistance through our original rubber modification method. ARMOR CRYSTAL ULTIC ARMOR F VALFLON Lined Pipe VALFLON Flexible Hosewith Wire Braid VALFLON PFA Lined Ball Valve VALFLON Expansion Joint Standard Grade for Vacuum Gate Less Adhesion to Quartz Particle and Heat Resistance O2 Plasma Resistance for Ashing Equipment
6 5 Elastomers 5-2 FLUORITZ Series 5-4 VICTRA-ER Our FLUORITZ PerfluoroelastomerFFKMseries has excellent chemical stability. It is resistant to a wide range of chemicals and can seal at elevated temperatures. VICTRA-ER combines an elastomer such as FKM with PTFE to achieve both high sealing performance and excellent radical resistance. FLUORITZ-SB FLUORITZ-TR Concept 5-3 VALQUA Bonded Gate Seal-High Performance Transfer Gate Valve VALQUA Bonded Gate Seals provide excellent performance through its original design. The design prevents metal to metal contact, dropout from adhesion, and rolling, improving durability and ease of maintenance. High purity is also maintained due to minimal use of filler materials. Property Data for FKM Portion Feature and Application
7 5 Elastomers 6 Gaskets 5-5 Silicone Rubbers The following Silicone materials are examples of VALQUA's compounding techniques for characteristics useful for semiconductor manufacturing. 5-6 Fluoro-Rubbers The following Fluoro-Rubber materials are examples of VALQUA's compounding techniques for characteristics useful for semiconductor manufacturing. 5-7 HUVc Rubber A fluoro-rubber O-Ring is treated in a vacuum chamber for degassing. This greatly reduces hydrocarbon outgassing, suitable for ultra high vacuum applications. Round and square shaped cross sections are available. 6-1 VALFLON Cord Seal <Soft> Cross Section 6-2 VALFLON Soft Sheet Characteristics, Size Cross Section Cross Section The VALFLON Cord Seal is a uniquely soft and tough PTFE sealing material. It conforms nicely to the sealing face and can be used under low tightening forces. VALFLON Soft Sheet layers unsintered PTFE films into a laminated sheet material for a flexible sealing material. 6-3 VALFLON Envelope Gasket-Outer Edge Welded Type 1 : High chemical resistance and purity. 2 : Soft and flexible for sealing at low tightening force. 3 : On-site cutting is easy with scissors or knives. Inner core sheet is completely enveloped with PTFE envelope and its outer edge is sealed with welding. Characteristics, 1 : Core is not exposed to the environment or media, reducing risk of contamination. 2 : PTFE envelope protects the core from liquids, for easier cleaning without damaging the gasket. In case order, please put "-ODS" at the end of part number. Example VALQUA No.(N)7030FLSS-ODS
8 6 Gaskets 7 Bellows and Other Products 6-4 Metal Hollow O-ring before tightening after tightening Materials Performance and Manufacturing Limitations Metal tubes are bent into the required shape, then both ends are welded together and polished. Various surface coatings are available. other materials are available. 7-1 DYNAMICBELLOWS TM M Series The metal welded bellows are developed using our structural analysis technology for long-term use. To lower cost, the number of crests can be reduced by 40% compared to the conventional bellows. 7-2 DYNAMICBELLOWS TM V Series Please refer to the catalogue for details. 6-5 TRYPACK Thin, metal plates are formed into rings with S-type or Y-type cross sections, then welded at the inner and outer diameter to form a bellows. Materials and Structure Performance and Manufacturing Limitations Please refer to the catalogue for details. TRYPACK metal gaskets use a coil spring for elasticity, covered in one or two metal layers. It can be used in ultra high vacuum across a wide range of temperatures where rubber and metal hollow O-rings might not be suitable. 6-6 High Purity Oxygen-Free Copper Gasket ( for Bakeable Flange ) Structure The gasket is a flat, simple shape. The flange structure is characteristic and is shown with the gasket below. Gasket Set Between Bakeable Flanges VALQUA s Oxygen Free Copper material satisfies ASTM F68 Class 1 requirements. The figure below compares outgassing characteristics of conventional Oxygen Free Copper to that of a Class 1 material. 7-3 Clean Bolt Stainless steel bolts with a special chemical polishing treatment for a clean surface finish. Characteristics -No oil, particles on surface -Low out-gassing -Smooth surface -Less particle generation from abrasion -Discourages thread biting 7-4 Sliding Shaft ( magnetically connected sliding and rotational movement transfer unit ) Sliding and rotational movement is transferred to a sample in the vacuum chamber from outside. Characteristics -Smooth motion linear bearings for shaft -Maintenance free strong magnetic drive -Welded assembly -Long stroke 200, 400, 600, 800
9 8 Characteristics Data of Fluorocarbon Plastics 9 Engineering Plastics Property Comparison
10 MEMO MEMO
11 Valqua reserves the right to change technical specifications in this catalogue without notice. The data contained with in this catalogue can only be taken as a guide. All Rights Reserved CATALOGUE No.EC06 SEN
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