003村江.indd

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*1 Study on Room ressure Control at Cleanroom art 1 Experiments on Room ressure Fluctuation with Door Operation and Local Ventilation Operation Yukitada MURAE *1 Tamio IWAMURA *2 Hiroyuki NAGAI *3

1 *1 Study on Room ressure Control at Cleanroom art 1 Experiments on Room ressure Fluctuation with Door Operation and Local Ventilation Operation Yukitada MURAE *1 Tamio IWAMURA *2 Hiroyuki NAGAI *3 Shigeru KURIKI *1 Takeo KOIDE *2 Masamichi KAKINUMA *4 Koji NAGANO *5 Shozo HIRAHARA *3 Mitsunobu SASAKI *6 The Room ressure Control is one of the Important Demand erformances for Contamination Control in a Cleanroom. This aper is Outline of Basic Experiments on Room ressure Fluctuation with Door Operation and Local Ventilation Operation, to Construct the Room ressure Control System Corresponding to the Demand erformance, and are summarized as follows. About Door Operating, 1) When the Door Operation Speed Quickens, the ressure Fluctuation Becomes Violent, 2) At Control with CD, the Overshoot is Caused, 3) At Control with ID, it Takes Time to Return, 4) The Control Can be Stabilized by Using BD and 6) The Relation Between the Door Opening Condition and Airflow of the Door was Obtained. About Local Ventilation Operating, 6) When the Leakage Area is Small, the ressure Fluctuation Becomes Violent, 7) the ressure Fluctuation Becomes gently small the ratio to Local Ventilation Air Volume of Room Ventilation Air Volume and 8) If the roportion Range is reduced, the ressure Fluctuation Becomes gently. *1 Technical Research Institute, Toda Corp. *2 Building Equipment Department, Toda Corp. *3 Equipment Design Department, Toda Corp. *4 Kanto branch, Toda Corp. *5 Engineering Department, Toda Corp. *6 Saving Energy Department, Toda Corp. 3

2 *1 INV HEA CAV Airtight Room-3 3a BD Airtight Room-2 2a Semi airtight Room-1 1a Data Logger INV () CAV VD CD VAV BD CASE-1VD CASE-2CD CASE-3VAV* CASE-4VAV*+BD C Sleeve Sleeve Sleeve VD VAV CD Room-1 Room-2 Room-3 3.6m2.7m2.2m 21.38m 3 CAV VDVAV*CD 1a High 3m 3 /h Low 21m 3 /h SAT AT AT GC62 1a1.5 5ms VAV ID 3 2

3 ʼ [a] [a] [a] [a] Room-1 Room-2 Room [s] CASE-VD Room-1 Room-2 Room [s] CASE-2CD Room-1 Room-2 Room [s] CASE-VAV* Room-1 Room-2 Room [s] CASE-4VAV*+BD W74xH235xD45[mm] (DC) W5xH6 A [mm] 5,1,15,2,3,5[a] 32[/h] [m 3 /h] A=11mm D'=5mm A=5mm C=6.5mm A D=45mm (t4.5) 5a 3a 2a 15a 1a 5a

4 [m 3 /h] 1 1 5a 3a 2a 15a 1a 5a [m 3 /h] [m 2 ] [a] RB [a] DB Room-1 Room-2 Room-3 y = x.547 R 2 =.998 y = x.467 R 2 =.954 y = x.512 R 2 =.992 y = 61.22x.528 R 2 =.993 y = x.557 R 2 =.993 y = x.55 R 2 =.998 y = x.474 R 2 =.97 CD EC sec1 1.[sec] 116FS 116[a] 3FS 1.125[a] ON ON OFF OFF [s] 22 /h,low,rb:2%,db:3% 22 /h3 /h 1a High 3m 3 /hlow 21m 3 /h cm 2 CD 65.5mm 55.5mm 5.5mm 45.5mm 3.5mm 2.5mm 1.5mm 4.mm RB123 DB

5 [a] [a] [a] [a] Low High ON OFF [s] 図 - 1 VD cm2 48.4cm2 82.1cm2 15.6cm2 63.6cm2 97.3cm [s] 3 /h,low,rb:2%,db:3% 22/h,Low 22/h,High 3/h,Low 3/h,High [cm 2 ] RB:2%,DB:3% ON OFF RB:1% DB:3% RB:2% DB:3% RB:3% DB:3% RB:2% DB:3% RB:2% DB:2% RB:2% DB:1% RB:2% DB:% [cm 2 ] CD 22 /h,low 3 5

クリーンルームにおける室圧変動に関する実験的研究クリーンルームにおける室圧変動に関する実験的研究その 5 風量変更時の室圧変動とその抑制手法に関する実験村江行忠 * 1 岩村多美勇 * 2 永井裕之 * 3 長野耕司 * 4 栗木茂 * 1 新宮守 * 4 渡邊義明 * 5 野沢勇樹 * 3

クリーンルームにおける室圧変動に関する実験的研究クリーンルームにおける室圧変動に関する実験的研究その 5 風量変更時の室圧変動とその抑制手法に関する実験村江行忠 * 1 岩村多美勇 * 2 永井裕之 * 3 長野耕司 * 4 栗木茂 * 1 新宮守 * 4 渡邊義明 * 5 野沢勇樹 * 3 戸田建設技術研究報告第 37 号クリーンルームにおける室圧変動に関する実験的研究その 5 入退室時の室圧変動と交叉汚染に関する実験岩村多美勇 * 2 永井裕之 * 3 長野耕司 * 4 栗木茂 * 1 新宮守 * 4 渡邊義明 * 5 野沢勇樹 * 3 久保夏希 * 4 齊藤充 * 6 村江行忠 * 1 概要本報告は室圧制御されたクリーンルームにおける扉仕様エアロック室の有無気密性などの建築的な仕様に着目した