1 45nm
2 2004 2007 2010 90* 65 45 4 10 25 * 100 10001 H16 45 2001-2003 2004-2007 65 45
MIRAI 3 Cu n+ n+ p+ p+ p n nmos pmos
ITRS 2004 2007 2010 2013 2016 3.5 k 3.0 2.5 2.0 ITRS2001 ITRS2003 Low-k 1.5 1.0 3 90 65 45 32 22 (nm) 4
5 Low-k k=2.0cu low-kcu 22 Low-k k Low-k2 MIRAI low-k Selete Cu MIRAI MIRAI 1 2001-2003 k=1.5 2001 k=2 k=2.0 8GPa MIRAI 2 2004-2007 k=2.0-1.5 10-3 GPa
6 100 nm 50 nm TMCTS (tetramethyl-cyclotetra-siloxane) Cu Ta/ TaN) SiOC) Cu 100nm SiN CuTEM ~ 5 MV/ Oku, IEDM 2003
GPa) 8 6 4 2 TMCTS (tetramethyl-cyclo-tetra-siloxane) TMCTS HMDS 1.2 1 TMCTS 0.8 0.6 0.4 0.2 HMDS 1) TMCTS CH 3 H CH3 Si CH 3 O Si O Si O H Si H 3 C O O O O Si O O O CH 3 O Si H O 3 C Si Si Si CH 3 H3C O H H O O CH 3 O O Si O Si O Si O Si O Si O O O O O O (%) 99.99 99.9 99 95 90 80 70 50 30 20 10 5 1.1 0 1.8 2 2.2 2.4 2.6 k TMCTS.01 1 10 100 1000 10 4 10 5 10 6 (mj/m 2 ) 0 1.8 2 2.2 2.4 2.6 k TMCTS 2) 3) Low-k Oku, IEDM 2003 7
Low-k DVS-BCB (di-vinyl-siloxane bis benzo-cyclo-butene) DVB (di-iso-propenyl-benzene) CH 3 Si CH O 3 CH 3 CH 3 H 3 C Si Si O Si H 3 C CH 3 CH 3 CH 3 CH 3 Si O Si CH 3 CH 3 CH 3 CH 3 Si O Si CH 3 CH 3 (DVS-BCB) (DVB) 300 mm 2 MV/cm (k=2.8) (Modulus) 10 %5.7 GPa Kawahara, IEDM 2003 8
Low-k VS k 9 E (GPa) 14.0 12.0 10.0 8.0 6.0 4.0 MIRAI Disorder (MMW) MIRAI MIRAI Disorder Disorder DVS-BCB/DVB+TMB 4.0 Ew=30 E-k 2.0 0.0 Disorder(LMW) 1.6 1.8 2 2.2 2.4 2.6 2.8 3 k Low-kk
in-situ CMP 10
11 p / p 0 r 30 0 in-situ (nm) Low-k TMCTS Negoro et al, SSDM 2003 60 k=2.1 0 3 6
12 Low-k k=2.0 1.5 2001-2004 Low-k 2002-2004 Low-k/ 2004-2006 k 2001-2005 CMP 300 mm 2005CMP 2003-2005 SELETE 2001-2005Low-k 2004-2006
13 DDS
14
DDS) DNA 10 100 1998 NNI)(2000 2001 15
DDS 16 DDS DDS Passive targeting Liposomes Polymer Micelles Polymer conjugates Active targeting Monoclonal Antibody/Antigen Ligand/Receptor Y. Matsumura; DDS, 16, 401 (2001) E. Forssen etal. ; ADDR, 29, 249 (1998)
17
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21 S. Lee, J.B. Macauley: Genzyme Corporation (1993)
22 Ref. Bevilacqua MP, Seed, B, et. al. (1989) Science 243, 1160-1165 in vitro DDSin vivo : DDS Neu5Aca2 3Galβ1 4GlcNAc- 3 Fucα1
23
24 (A) (B) (C)
25
26 HO HO HO HO OH AcNH HO HO 2 C O HO O OH O OH O O O OH AcNH NH O OH O S H
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DDS 35
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DDS 38 DDS
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43 1980 1990 2000 2010
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45 1990 2000
46 KO GG KO
What is Glycoproteome 47
48 H13 14 15 16 17 18 19 GlycoGene / GG Project? (Structural Glycomics / SG project) H13 14 15 16 17 18 19
13% ( ) 1% (GG) 33% 18% GG 35% 27 18 54 49
50 1 2 3 4 5 6 7 IgA 8 9 10 11
51
52 Gal β1 GlcNAc β1 3 3 J.B.C. 277:12802 J.B.C. 277:47724 Core 1 structure GalNAc Core 3 structure Ser/Thr
53 Gn-TV N- G4, G5, G26 G34 K12 ST2, ST3 SP5 F3, F6 etc. G8, G10 K2, K3, K5, K8, K11 O10 L4 SP3 etc.
54 in situ hybridization GalNAcβ1-3GlcNAc-R β3galnac-t2germ line cells
55 GG SG Functional Glycoproteomics) IgA Sweet Medicine (Glyco-Based Medicine)
Our plan GTase Library MS n ESI MALDI 56
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PV News Vol22 No3 March 2003, May 2003 2010482W 62
63 W 500 PVTEC 400 Cost (x10000 JPY) 300 200 100 0 1995 1996 1997 1998 1999 2000 2001 2002 year 56% 66%
2002 2007 2010 2020 2030 50 /kwh 30 /kwh <<>> ( ) 23 /kwh 14 /kwh << >> () 7 /kwh [] PV PV SHS() VLSPV NEDO 2030 64
65 2010482 kw ( ~ 0.5 %) 64W 1000 kw ( 0.8
66 / NEDO HP Device processing Passivation, Electrode Printing
67 p- i- n- 1 m p- i- n- 12 a-si:h 7~ 8 % a-si:h/µc-si:h ~10% 12%
68 V V + p i n p i (µc-si) n 0.3 µm ( ) ZnO ~ 2 µm typ. 15%) 10 (typ. 0.1nm/s) 2.5nm/s 9.5 glass/ type-u/ a-si p-i-n (0.35 µm)/ µc-si p-i-n (4 µm)/ ZnO/ Ag Current density (ma/cm 2 ) 14 12 10 8 6 4 2 J sc : 12.5 ma/cm 2 V oc : 1.35 V FF η : 0.74 : 12.4% 0 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 Voltage (V) Area: 1 cm 2 13
69 ) 15 15 ma/cm2 J[mA/cm2] 16 Initial 14 Stabilized 12 10 8 6 4 2 9.24 % 0 0 0.2 0.4 0.6 0.8 1 V[V] 10% p/i 8.5% 9.2 % (V)
70 + p i n p/i VHF Cathode SiH 4 SiH3 d Substrate Anode Mesh V exhaust SiH2 SiH2 VHF SiH3
71 10 Current density (ma/cm 2 ) 25 20 15 10 5 Area : 0.25 cm 2 d i : 2.3 µm R d : 2.3 nm/s J sc : 23.7 ma/cm 2 V oc FF η : 0.528 V : 0.73 : 9.13% 0 0.0 0.1 0.2 0.3 0.4 0.5 0.6 Voltage (V)
72 VHF < 1 Torr 10Torr) + + + + SiH3 SiH4 + H2 H SiH3 MHI
73 1MWp 6500 m2 5600 panels 10 6 kwh /year 0.8 % of total(aist) PV @2010 4.82GWp 0.5% of total(jp)
74 2% 4kW10kW
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