c 高真空アングルバルブシリーズ
OVERVIEW IRIE KOKEN's high vacuum angle valves are long-life vacuum valves with built-in formed or welded bellows. The valves off your choice of three flanges for connection: the user-friendly NW-KF flange that conforms to ISO standards, con flat flange that can be used for handling ultra-high vacuums or toxic gases, or common vacuum flange that conforms to JIS. The series also offers both manual and automatic (pneumatic) models. The LX Series (guaranteed life of 1 million repetitions) has also been added as a standard product to extend time until next maintenance is required. FEATURES 1. The vacuum side of the valve is of all stainless steel (SUS) construction. 2. Compact design enables small size and lightweight construction. 3. Will not leak at pressure differential of 0.15 MPa regardless of whether pressure is positive or negative. 4. Mounting posture is unrestricted. (Unless otherwise specified, we recommend mounting posture with the valve seat facing the side with greater pressure variation.) 5. Functional design offers maximum conductance. 6. One-way rotating flange facilitates mounting. (con flat flange) 2
HIGH VACUUM ANGLE VALVE SERIES No entry Repetition life 100,000 repetitions (*1) 1 million repetitions (*2) *1: 50,000 repetitions for manual type. *2: LX Series does not include a manual type. Angle valve symbol D C O M Type Automatic, double-acting Automatic, single-acting (normally closed) Automatic, single-acting (normally open) Manual Flange types NW-KF flange Con flat flange* JIS (VG/VF) flange * One-side stationary, one-side rotating Flange types NW-KF flange JIS (VG/VF) flange Accessories None With solenoid valve, proximity switch With solenoid valve With proximity switch Con flat flange Note 1Be sure to specify power supply specifications if you need an optional solenoid valve. 3
Specifications Working pressure Leak volume Repetition life Operating pressure Bake-out temperature (heat endurance limit) Main materials Atmospheric temperature to 1 x 10 (-6) Pa Below 1 x 10 (-10) Pam 3 /s FLV (automatic) 100,000 repetitions FLV (manual) 50,000 repetitions LX- FLV (automatic) 1 million repetitions 0.5 to 0.6 MPa (automatic) Valve body 120MAX Pneumatic actuator 65MAX In the case of those with solenoid valve50max Valve body:sus304 Bellows:SUS316L(FLV) : Hastelloy C-22(LX-FLV) Cylinder: Aluminum Valve seat seal: Viton Bonnet seal: Viton Cylinder Bonnet seal Bellows (formed) Valve body Valve seat seal Technical data Bore Conductance 4
HIGH VACUUM ANGLE VALVE SERIES Automatic (single-acting/double-acting [normally open/closed]) WITH NW-KF FLANGES 1FLV SERIESLX-1FLV SERIES WITH CF FLANGES 2FLV SERIESLX-2FLV SERIES WITH JIS FLANGES 3FLV SERIESLX-3FLV SERIES Schematic diagram Used for D,O Used for D,C Used for D,O Used for D,C Rotating flange Used for D,O Used for D,C Flange holes classified according to diameter. Flange holes classified according to diameter. Table of dimenesions Automatic: Double acting [D], single-acting [C] (normally closed), single-acting [O] (normally open) 5
6 Flange holes classified according to diameter. Schematic diagram Table of dimensions Manual: M Flange holes classified according to diameter. Rotating flange
HIGH VACUUM ANGLE VALVE SERIES Angle valve symbol D M Type Automatic, double-acting Manual *Sensor for detecting open/closed D: Automatic type is equipped with lead switch as sta Flange types NW-KF flange Con flat flange* JIS (VG/VF) flange* * Indicates production by special order. Bore (nominal diameter) NW-KF flange JIS flange Con flat flange* One-side stationary/rotating Note 1Be sure to specify power supply specifications if you need an optional solenoid valve. 7
Specifications Working pressure Leak volume Repetition life Operating pressure Bake-out temperature (heat endurance limit) Main materials Accessories Proximity switch (automatic) Type PD11L1 Working voltage 110 ACV, 24 DCV Working current 5 to 20 ACmA, 5 to 40 DCmA Atmospheric temperature to 1 x 10-6 Pa Automatic: 200,000 repetitions Manual: 50,000 repetitions (Note): Guaranteed life of 1 million repetitions is available by special order. Valve body 120MAX Pneumatic actuator 65MAX Valve body: SUS304 Bellows: SUS316L Cylinder: Aluminum Valve seat seal: Viton Bonnet seal: Viton LED (red) Brown Diode Blue Cylinder Bonnet seal Bellows (welded) Valve body Valve seat seal Technical data Bore Conductance 8
HIGH VACUUM ANGLE VALVE SERIES Automatic/double-acting Manual Schematic diagram Table of dimenesions Automatic / double-acting: D Manual: M 9
Schematic diagram Rotating flange Rotating flange Flange holes classified according to diameter. Flange holes classified according to diameter. Table of dimenesions Automatic: Double acting D Manual : M Automatic: Double acting D Manual : M 10
HIGH VACUUM ANGLE VALVE SERIES No entry Repetition life 100,000 repetitions (*1) 1 million repetitions (*2) *1: 50,000 repetitions for manual type. *2: LX Series does not include a manual type. Straight valve symbol D C O M Type Automatic, double-acting Automatic, single-acting (normally closed) Automatic, single-acting (normally open) Manual Flange types Flange types NW-KF flange NW-KF flange Accessories None With solenoid valve, proximity switch With solenoid valve With proximity switch Note 1Be sure to specify power supply specifications if you need an optional solenoid valve. 11
Specifications Working pressure Leak volume Repetition life Operating pressure Bake-out temperature (heat endurance limit) 110-6 Pa 110-10 Pam 3 /s 1FSV()10 1FSV() 5 LX-1FSV()100 0.50.6MPa() 120MAX 65MAX Atmospheric temperature to 1 x 10-6 Pa Below 1 x 10-10 Pam 3 /s FLV (automatic) 100,000 repetitions FLV (manual) 50,000 repetitions LX- FLV (automatic) 1 million repetitions 0.5 to 0.6 MPa (automatic) Valve body 120MAX Pneumatic actuator 65MAX 50 In the case of those with solenoid valve50 Main materials SUS304 SUS316L(1FSV) Valve body:sus304 Bellows:SUS316L(FLV) C-22(LX-1FSV) : Hastelloy C-22(LX-FLV) Cylinder: Aluminum Valve seat seal: Viton Bonnet seal: Viton Cylinder Bonnet seal Bellows (formed) Valve body Valve seat seal Technical data Bore Conductance 12
HIGH VACUUM ANGLE VALVE SERIES Automatic/Double acting, single-acting [normally opennormally closed] Manual Schematic diagram Table of dimensions Automatic: Double acting [D], single-acting [C] (normally closed), single-acting [O] (normally open) 13
Solenoid valve and proximity switch specifications (applied for 16A to 63A) Option Solenoid valve specifications Specification Proximity switch specifications Specification External dimension diagram External dimension diagram Model Internal voltage drop Model Working voltage range Start Current Excitation Insulating resistance Connection type Lead wire color LED indicator color Countermeasures against surge current Working pressure range Brown (+) Black (-) Red Red (+) Black (-) Fly wheel die-board Plug connector Yellow Yellow Variable resistor White Green insulating resistance Impact resistance Electrical circuit Blue Brown Electric circuit DC connection scheme 14
HIGH VACUUM ANGLE VALVE SERIES Schematic diagram With proximity switch/solenoid valve Manifold Proximity switch Solenoid valve Table of dimensions 15
HIGH VACUUM ANGLE VALVE SERIES Main Products Cautions (1) Be sure to note mounting posture when mounting, connecting or using. Be sure to check the specifications if you plan to use the product for use other than it is designed for. (2) These products are guaranteed for a period of 18 months after the day they are shipped from the factory. (3) If a defect occurred to the product during warranty period, it will be repaired or replaced free of charge. (4) The following are not covered by the guarantee: 1. Mechanical failure caused by use in manner other than specified. 2. Mechanical failure caused by unauthorized repair or modification. 3. Mechanical failure caused by fire or natural disaster. (5) IRIE KOKEN assumes that the responsibility for mechanical failure covers this product only. Office address Distributor