., SUS34 Inconel6, Cr,.,, Cr,. Cr Cr,., Cr,,,.,,,,.,.,,,.,,.,,., SUS34, Inconel6,. (). CoZrNb, -2 m.,., 9. Cu, 2 m. SUS34, Inconel6 SUS34, Inconel6, 5mm mmmm.,,,. (2) (HP8752A).,. - MHz, -2 dbm.,. (3) SUS34, Inconel6 SUS34, Inconel6 (VSM). 2 koe.., EMPA EBSD. () (a) (2 m, 2mm, 2 m). MHz. 42. 6,. (b),... 2 Inpedance Z ( ) 5 95 9 85 8 75 2 4 6 75 9 7-2 -.5 - -.5.5.5 2 Magnetic field H (ka/m) Field strength at peak (ka/m).7.6.5.4.3.2. show stteped impedance 2 4 6 8 Angle (deg.) (a) (b) (a)(b) (a) (c) 2 - m x h y x (b) (d) Nomalized magnetization m x H m (A/m).5 -.5 4 55 6 65 7 - - -.5.5 Normalized applied field h (H/H k ) 24 8 2.4.35.3 H m 6 meas..25 calc..2 2 3 4 5 6 7 8 9 Angle (deg.) 2 (a) (b). (c). (d).
Impedance Z ( ) 3 28 26 24 22 2 8 6 edge middle 2 4 6 8 End of element Oe Oe Impedance Z ( ) 22 2 2 9 8 End of element.5 Oe 7 -.5.5.5 2 edge middle Oe 7 Oe 7 Oe 5.5 Oe.5 Oe 3 Oe Oe 4 Oe 3 Oe Oe Oe 3 (). (a). 8,, 2. (b),,. (c).. (d).,.,. (2),,. 3, 4 3mm (2 m, 2 m),., 6,.. 5 Oe -.5 Oe 4 (6) Demagnetizing factor N.6.5.4.3.2. 2 m 8 m middle edge -.5 - -.5.5.5 Position x (mm) 5 ( 3mm, 2 m, 2, 8 m).., 3, 4,,.,,.,. (3),,,. 6.. 7,
Demagnetizing factor N x.4.3.2. 2 m rec. 5 m rec. 8 m rec. ellip. ellip. ellip. -.5 -.25.25.5 Position x (mm) 6 Magnetization M (mt) 5 5-5 - h h 9h 24h 5h 45h 3h 4h -5 -.6 -.8.8.6 Magnetic field H (MA/m) 9 (Inconel6, 6) Impedance Z ( ) 2 8 6 4 2 rectangle ellipsoid Magnetization (mt) 6 5 4 3 2 H S L 8-2 -5 - -5 5 5 2 7 (8 m, mm, 2 m) Impedance change Z ( ) 2.5 2.5.5.mm, rec..mm, ellip..3mm, tri..mm, rec., w=5.3mm, rec., w=2 5 5 2 25 3 35 8 (, FIB ). 8 m, mm, 2 m.. 8, FIB 3 m., m, 3 m.. (4) SUS34, Inconel6 9, Inconel6, 6.,.,. SUS34., SUS34, Saturation magnetization M s (mt). Heat treatment time (h) 5 4 3 2 (a) SUS34 (7) A B C Heat treatment time (hrs.) (b) Inconel6 (6) Inconel6 7, 6,. SUS34,. H, S, L. Inconel6. A, B, C. SUS34 H. S, L., Inconel6, 2,.,,. 2. SUS34, Cr,,,., Inconel6 Cr, Cr
(Inconel6, 6, a:, b: Ah, c: Bh, d: Ch),,.,., Cr,,. (5), MI,,.,,,,, 3 m., SUS34,,. Inconel6,. 2. SUS34 Inconel6. 8 H. Yanagiwara, T. Murakami, H. Kikuchi, Relationship between sensitization and magnetic characteristics in SUS34 stainless steel, International Journal of Applied Electromagnetics and Mechanics, 26 (),. H. Kikuchi, S. Oe, H. Uetake, S. Yabukami, T. Nakai, S. Hashi, K. Ishiyama, Enhancement of Sensitivity on Miniaturized Thin-film Magnetoimpedance with Ellipsoidal Element, Physics Procedia, Vol. 75, pp. 27-278, December 25,. DOI:.6/j.phpro.25.2.4 H. Kikuchi, S. Kamata, Y. Takahashi, T. Nakai, S. Hashi, K. Ishiyama, Improvement of stepped magnetoimpedance properties by controlling the demagnetizing effect, IEEE Transactions on Magnetics, Vol. 5, No., pp. 4434, November 25,. DOI:.9/TMAG.25.244748 H. Kikuchi, S. Kamata, T. Nakai, S. Hashi, K. Ishiyama, Influence of demagnetizing effect on the GMI magnetic sensor elements fabricated using thin-film with uniaxial anisotropy, Sensors and Actuators A: Physical, Vol. 23, pp. 42-49, July 25,. DOI:.6/j.sna.25.4.27 H. Kikuchi, H. Takahashi, H. Yanagiwara, T. Murakami, Relationship between ferromagnetic properties and grain size of Inconel alloy 6, Journal of Magnetism and Magnetic Materials, Vol. 38, pp. 56-64, May 25,. DOI:.6/j.jmmm.24.2.4 H. Kikuchi, S. Kamata, Y. Takahashi, T. Nakai, S. Hashi, K. Ishiyama, Investigation of driving power dependence on magnetoimpedance profiles of thin-film elements with uniaxial anisotropy, IEEE Transactions on Magnetics, Vol. 5, No., pp. 424, January 25,. DOI:.9/TMAG.24.235822 H. Kikuchi, Y. Takahashi, K. Takahashi, T. Nakai, S. Hashi, K. Ishiyama, Effects of direction of easy axis on the magnetoimpedance properties of thin film with uniaxial anisotropy, Journal of Applied Physics, Vol. 5, Issue 7, pp. 7A33, May 24,. DOI:.63/.485995 H. Kikuchi, J. Kumano, T. Nakai, Y. Onodera, S. Hashi, K. Ishiyama, Effects of the shape of the elements on the properties of stepped giant magnetoimpedance, IEEE Transactions on Magnetics, Vol. 49, No. 7, pp. 444-447, July 23,. DOI:.9/TMAG.23.22433 27,,,,,,, 28,, 26. 3. 6-8, 2-28.,,,,
,,,,,,, MAG-5-2, 25. 9. 24, 25. H. Yanagiwara, T. Murakami, H. Kikuchi, Relationship between sensitization and magnetic characteristics in SUS34 stainless steel, ISEM25, Awajishima, Hyogo, Sep. 6-8, 25, PS2-5.,,,,,,,, 39,, 25. 9.8-9., 9aD-. H. Kikuchi, S. Oe, H. Uetake, S. Yabukami, T. Nakai, S. Hashi, K. Ishiyama, Controlling of demagnetizing field distribution for miniaturization and improvement of sensitivity on thin-film magnetoimpedance element, 2th Internatioanl Conference on Magnetism (ICM25), Barcelona, Spain, July 5-, 25, Th.O-P22. H. Kikuchi, S. Kamata, S. Oe, T. Nakai, S. Hashi, K. Ishiyama, Improvement of stepped magnetoimpedance properties by controlling demagnetizing effect, Intermag25, Beijing, China, May -5, 25, FR-4.,,,, 27,, 25. 3. 24-26, 2-33.,,,,,,,, MAG-4-85, 24. 2. 3. S. Kamata, H. Kikuchi, T. Nakai, S. Hashi, K. Ishiyama, Enhancement of impedance change in low frequency on thin-film magnetoimpedance element, The 59th Annual Magnetism and Magnetic Materials (MMM) Conference, Honolulu, Hawaii, USA, Nov. 3-7, 24, BR-3.,,,, 6SUS34,,, 24.7.23-25, -2-C-2. H. Kikuchi, S. Kamata, Y. Takahashi, T. Nakai, S. Hashi, K. Ishiyama, Investigation of driving power dependence on MI profiles of thin-film elements with uniaxial anisotropy, th European Conference on Magnetic Sensors and Actuators(EMSA24), Vienna, Austria, July 6-9, 24, TP7. H. Kikuchi, H. Takahashi, H. Yanagiwara, T. Murakami, Relation between behavior of ferromagnetic properties and grain size in Inconel 6 alloy, Intermag24, Dresden, Germany, May 4-8, 24, ET-. H. Kikuchi, S. Kamata, T. Nakai, S. Hashi, K. Ishiyama, Dependence of sensing position on the MI properties of elements fabricated using thin-film with uniaxial anisotropy, Intermag24, Dresden, Germany, May 4-8, 24, GW-5.,,,, Ni,,, MAG-4-32, 24. 3.27, 28.,,,,, MI, 26,, 24. 3.8-2, 2-26. H. Kikuchi, Y. Takahashi, K. Takahashi, T. Nakai, S. Hashi, K. Ishiyama, Effects of direction of easy axis on magnetoimpedance properties of thin film with uniaxial anisotropy, The 58th Annual Magnetism and Magnetic Materials (MMM) Conference, Denver, Colorado, USA, Nov. 4-8, 23, AR-6.,,,,,,, MI, 37,, 23. 9.3-9.6, 6aF-3.,,, 6, 37,, 23. 9.3-9.6, 5pD-6.,,,,,,, MI,,, MAG-3-34, LD-3-38, 23. 6.2,2. (8 ) (KIKUCHI HIROAKI) 334467 (ISHIYAMA KAZUSHI) : 22336 (HASHI SHUICHIRO) : 9324285 (MATSUO TETSUJI) : 2238976 (TAKEZAWA MASAAKI) : 23267