CABIN CABIN CABIN CABIN CABIN CABIN

CABIN VR 1p 47p 15 2 7 10165 1

1 6 1.1... 7 1.1.1... 7 1.1.2... 7 1.2... 8 1.3... 8 2 CABIN 9 2.1 CABIN... 10 2.2 CABIN... 10 2.3 CABIN... 12 2.4 CABIN... 12 3 CABIN 13 3.1... 14 3.2... 15 3.2.1... 15 3.2.2... 17 3.3... 18 4 20 4.1... 21 4.2... 23 4.2.1 CABIN... 23 4.2.2... 26 5 28 5.1... 29 5.2... 29 2

6 31 6.1... 32 33 35 A SEM 37 B CABIN 44 3

2.1 CABIN... 10 2.2 CABIN... 11 3.1... 14 3.2... 15 3.3... 16 3.4... 18 3.5... 19 3.6... 19 4.1 SEM... 21 4.2 7mm SEM... 22 4.3 7mm... 22 4.4 10mm SEM... 22 4.5 10mm... 22 4.6 15mm SEM... 22 4.7 15mm... 22 4.8 SEM... 23 4.9... 23 4.10 SEM... 23 4.11... 23 4.12 SEM... 24 4.13... 24 4.14 SEM... 24 4.15... 24 4.16 SEM... 25 4.17... 25 4.18 SEM... 25 4.19... 25 5.1... 30 4

A.1 Appearance of ERA-4000 SEM device... 38 5

1 6

1.1 1.1.1 (Scanning Electron Microscope SEM ) SEM [1] SEM SEM SEM [2] ( ) 1.1.2 (Virtual Reality VR) VR [3] IML(Intelligent Modeling Laboratory) CABIN(Computer Augment Booth for Image Navigation) VR 7

1.2 CABIN VR 1. 2. 1.3 1 2 CABIN CABIN 3 CABIN 4 5 6 8

2 CABIN 9

2.1 CABIN CABIN(Computer Augment Booth for Image Navigation) IML(Intelligent Modeling Laboratory) CABIN [6][7] 15mm 2.1: CABIN 2.2 CABIN CABIN 2.2 CG Rendering 5 (Front,Bottom,Top,Right,Left) 5 RGB 10

2.2: CABIN 5 SCRAMNet SCRAMNet Crystal Eye(TM) Crystal Eye Nintendo64 Polhemas Ultratrak Ultratrak 11

front 2.3 CABIN CABIN OpenGL CABIN Library [7] OpenGL CABIN Library OpenGL[4] CABIN C OpenGL CABIN OpenGL CABIN Library 2.4 CABIN CABIN HMD(Head Mount Display) VR [5] 12

3 CABIN 13

3.1 CABIN VR 3.1 «««ˆ «««««ˆ w } ˆ s u f 3.1: X,Y Z SEM SEM CABIN CABIN 5 VR 14

CABIN Nintendo64 3.2 3.2.1 X,Y Z X i Y j (x(i),y(j),z(i)(j)) 3.2 (x(i),y(j),z(i)(j)) (x(i+1),y(j),z(i+1)(j)) (x(i),y(j+1),z(i)(j+1)) 3 ( ) (x(i+1),y(j),z(i+1)(j)) (x(i),y(j +1),z(i)(j +1)) (x(i +1),y(j +1),z(i + 1)(j + 1)) 3 ( ) y(i+2) y(i+1) y(i) ««y(i-1) x(i-1) x(i) x(i+1) x(i+2) x(i+3) 3.2: 15

OpenGL [4] SEM SEM SEM OpenGL 3.3 Z d d ˆ ˆ 3.3: SEM SEM 16

( ) [4] 3.2.2 OpenGL Nintendo64 Fractgraphy FRASTA CABIN [5] 17

3.4 magnify reduce 3.4: CABIN CABIN 3.5 LOWER PARALLEL 3.3 3.6 18

3.5: u f y s u ªªª ª ªªªªª 1 2 3 4 ªª ªª ªªª ªªªªª v ˆ ª«««w } ˆ ªªªªªªªªªª u f e s v ˆ ª s ˆ ª s 1 4 3 2 u f y s u ªªª ª ªªªªª 1 2 3 4 ªª ªª ªªª ªªªªª u f y s u ªªª ª ªªªªª 1 2 3 4 ªª ªª ªªª ªªªªª v ˆ ª«««w } ˆ ªªªªªªªªªª u f e s v ˆ ª s ˆ ª s 1 4 3 2 v ˆ ª«««w } ˆ ªªªªªªªªªª u f e s v ˆ ª s ˆ ª s 1 4 3 2 3.6: 19

4 20

4.1 (A2017-T4) SEM 200 4.2 4.4 4.6 SEM 2001 1501 MicroAVS 4.3 4.5 4.7 SEM ( 100 ) 4.1 4.1: SEM 21

4.2: 7mm SEM 4.3: 7mm 4.4: 10mm SEM 4.5: 10mm 4.6: 15mm SEM 4.7: 15mm 22

4.2 4.2.1 CABIN CABIN CABIN 7mm 4.8: SEM 4.9: 4.10: SEM 4.11: 23

10mm 4.12: SEM 4.13: 4.14: SEM 4.15: 24

15mm 4.16: SEM 4.17: 4.18: SEM 4.19: 25

4.2.2 7mm ( 4.8 4.9) SEM ( 4.8) ( 4.10 4.11) ( 4.11) 4.1 10mm ( 4.12 4.13) SEM ( 4.4) ( 4.10 4.11) 10mm 4.1 15mm ( 4.16 4.17) SEM ( 4.18) ( 4.19) SEM CABIN 26

SEM 27

5 28

5.1 CABIN CABIN 5.2 CABIN 5.1 M S A A L,A R CABIN A L A R A ( ) CABIN 29

A R A L A A M S 5.1: 30

6 31

6.1 1. CABIN VR 2. SEM 3. 4. 32

33

[1] :, (2000). [2] :,. [3] :, (2002). [4] OpenGL ARB: OpenGL Programing Guide( ) The Official Reference Document for OpenGL,Release 1, (1993). [5] : CABIN VR, (2001) [6] IML URL=http://www.iml.t.u-tokyo.ac.jp/ [7] CABIN Club URL=http://www.iml.u-tokyo.ac.jp/cabicla/index.html 34

35

SEM 36

A SEM 37

SEM(ERA-4000) A.1: Appearance of ERA-4000 SEM device 38

SEM(ERA-4000) 1) Z ( ) 1nm 2) XY (SEM ) 4.5nm 1) 2 (1) 2 (2) 2 (3) 2 2) 3 (1)X Z, Y Z (2)3D (3)X Z, Y Z (4)3D A. 1. 2. 0.5 30kV (0.1kV ) 3. 4.5nm 4. 3 5. 8 40mm 6. 10 300, 000 7. ±30µm 8. 39

B. 1. FRAME,REDUCED FRAME,SPOT,LINE X,LINE Y, CB-MONITOR 2. TV,0.2,5,20,40,80,160 / 3. 360 4. A,B,A+B,A-B,EXT 5. SEM 576 440 2 6. 165 125mm 120 90mm 7. ( ) 100 75mm 118 89mm 60 70mm 8. a., ( ), ( ) b. c. d. e.+ 9. ( ) 1 255 Rapid(0.2 ) C. 1. φ125 H10mm φ50 H30mm φ10 H10mm 2.X Y 30 68mm 3.Z 8 40mm 4. 360 5. 0 60 ( Z- ) 6. 7. 5µm 8. X, Y 4 1 9. 40

D. 1. 2. 4 3. 2.6mmP a 4. ( ) E. 1. 2. F. 1) (1) (2) X Y (3) CRT + (4) X 2.4µm 60µm Y 1.8µm 45µm ( ) (5) 4096 /1 (1 ) 4096 /1 ( ) 250,000 (6) 2 4096 ( ) (7)Z/X,Z/Y 0.1 1000 (8) 1 (9) 1. CRT 2. 1 CRT 3. CRT 4. 1 2 2 5. 6.CRT ( ) 41

2) (1) X Y (2) 4096 / 4096 / / ( = 250,000 ) (3) (100MB ) (4) 1.6MB + 8MB (5) CRT 1. 2. 3. ( ) ( ) ( ) 4. ( ) 5. ( ) 6. R a,r z,r max R a R z 10 R max R a,r z 42

7. ( ) ( ) 8. 1 8 9. Z ( ) 10. BATCH 1 FILE FILE ( FILE ) 1. W 540 D750 H1350mm 265kg 2. W 1000 D750 H1200mm 90kg 3. W 500 D260 H410mm 30kg 43

B CABIN 44

CG Rendaring CPU FPU CLOCK Main Memory Texture Memory Rendering Engine MIPS R4400 MIPS R4000 250MHz 256MB 16MB Infinite Reality(10M Polygon/s) SCRAMNet TM 1Mbyte 1280pixelx1024pixel 60Hz ( 1000x1000) 1024pixelx768pixel 96Hz ( 750x750) 45

Ultratrak 16 ( Station ) ( ) 2 UDP bottom RGB Genlock Front Nintendo64 RS232C Front tty RS232C Front tty 46

1 47 15 2 7 10165 47