HITACHI HF-2000 v. 4. 1 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. TV 15. 16. 17. 15 5-1 -
1. 1.1 COLUMN ON 1.2 OBJ. TEMP. MONITOR 20 1.3 POWER HV IP-1 ON ON LOCK (<2mV) IP-2 ON ON LOCK <1 10-6 Pa IP-3 ON ON LOCK 2 10-6 1 10-4 Pa Column ON - <1 10-5 Pa 1.4 CRT IMAGE ADJ (1) CRT ERROR (2) ACC. VOLTAGE OFF (3) LENS CURRENT C1, C2, OBJ 0 (4) 1000K (5) UNEXPOSED FILM 50 FULL FILM NUMBER 1 0 1.5 (1) PANEL LAMP OFF H (2) VACUUM STATE GUN 1.6 (1) GV CLOSE (2) LENS CONDITION [200] (3) [ZOOM] [ANA-1] 1.7-2 -
1.8 CAMERA EVAC EVAC 1.9 (1) (2) cm (3) STEM OUT (4) (X,Y) (TILT) 0 (5) A EVAC (6) 1.10 TV TV OFF 1.11 2. 2.1 (1) AIR (2) VACUUM STATE SPEC AIR 2.2 2.3 (1) (2) EVAC (3) 120 (4) 15 45 15-3 -
AIR (5) 2 ON 3. 3.1 IP-1, IP-2, IP-3 LED 3.2 3.3 3.2 3.3 30 3 4 3.4 COLUMN 1 10-5 Pa 3.5 [FUNCTION] SET UP PARAMETER V0 VOLTAGE 200kV R RATIO 5.5 I1 CURRENT 20µA 3.6 GV OPEN IP1 GV 3.7 [FE] [FLASH] IF CURRENT V0, V1, V2 IF CURRENT 0.3mA [FLASH] 0.3mA [FLASH] [FLASH] V0, V1, V2 [FE] OFF [FE] [FE] [FLASH] [FLASH] - 4 -
3.8 0.3mA V0 V1 [FE] [I1C] V1 3.9 [I1C] [FE] [V2/V1] GV CLOSE 3.10 V0, V1, IF CURRENT, EMISSION CURRENT 4. 4.1 X 4.2 [ANA-1] [ANA-1] [ZOOM] CRT TEM 4.3 CRT 4.4 BRIGHTNESS CENTERING 5. 50K~100K 5.1 BRIGHTNESS BRIGHTNESS CENTERING 5.2 COND STIGM-TEM(3rd) 5.3 COND SRIGM(2nd) COND STIGM 100K COND STIGM-TEM(3rd) 5.4 C1 5.5 BRIGHTNESS - 5 -
C1 5.6 2. B C 6. Z 6.1 CRT LENS CURRENT OBJ 5.72 CRT RESET LENS CURRENT OBJ 5.72 6.2 20K 6.3 Z WOBBLER ON Z 6.4 100K 7. 100K 7.1 7.2 FOCUS 7.3 [HVM] 7.4 BEAM TILT 7.5 [HVM] BEAM TILT (C1) 5. 7. 8. 8.1 OBJ STIGM-XY - 6 -
8.2 [DIFF] 8.3 0.8m 8.4 DIFFRACTION SPOT 8.5 8.6 [ZOOM] 8.7 8.8 OBJ STIGM-XY FOCUS OBJ STIGM-XY OBJ STIGM-XY FOCUS 10µA [I1C] 9. 9.1 [ZOOM] 9.2 9.3 9.4 DIFFRACTION SPOT CRT 9.5 FOCUS 9.6 9.7 [DIFF] 9.8 9.9 INT ALIGN 9.10 9.11 BRIGHTNESS - 7 -
9.12 DIFFRACTION SPOT 10. 10.1 [DIFF] 10.2 INT ALIGN 10.3 10.4 [ZOOM] 10.5 FOCUS 11. 11.1 [DARK] 11.2 DARK 5. 7. 8. DARK BRIGHT 11.3 11.4 INT ALIGN 11.5 DARK BEAM TILT ( BEAM ) 11.6 11.7 [ZOOM] 11.8 FOCUS 12. 12.1 BRIGHT [DIFF] 12.2 12.3 5. 7. 8. 12.4 [DIFF] INT ALIGN 12.5-8 -
12.6 [ZOOM] 500K~1000K 12.7 FOCUS 13. 13.1 13.2 [1] [3] [INDX] [ENTER] [INDEX] 13.2 CRT EXPOSRE TIME AUTO CRT FILM FEED [STOP] [FEED] [PHOTO] -->>> [FEED] 13.3 CRT EXPOSURE TIME CRT FILM FEED [STOP] [FEED] [PHOTO] -->>> [FEED] 14. TV 14.1 TV ON 14.2 CRT FILM FEED [STOP] 14.3 10-10 A/cm 2 BRIGHTNESS Direct Beam TV 14.4 14.5 CRT [PHOTO] TV - 9 -
14.6 CRT [PHOTO] TV 15. 15.1 GV CLOSE 15.2 [FE] OFF 15.3 X,Y 0 15.4 X 15.5 OFF 15.6 15 B 15.7 45 A 15.8 AIR 15.9 VACUUM STATE SPEC AIR 15.10 2.2 15.11 EVAC 15.12 [ANA-1] 1000K 15.13 TV TV OFF 15.14 15.15 16. 17. 16. 16.1 EVAC/AIR AIR - 10 -
50 16.2 TEM CRT 16.3 VACCUM STATE SPEC 16.4 CAMERA EVAC AIR 16.5 VACCUM STATE CAMERA AIR 16.6 16.7 16.8 16.9 50 16.10 16.11 16.12 CAMERA EVAC EVAC VACUUM STATE CAMERA EVAC 16.13 16.14 16.15 EVAC/AIR EVAC 16.16 [1] [3] [INDEX] [ENTER] [INDEX] - 11 -
16.17 UNEXPOSED FILM [5] [0] [ENTER] FILM NUMBER 1 [0] [ENTER] 17. 17.1 Log Note 17.2 PANEL LAMP OFF 17.3 CRT IMAGE ADJ 17.4 17.5 TEM - 12 -