Temperature Rise in a Birefringent Substrate by RF Discharge Plasma Koichi Takaki, Member, Kunioh Sayama, Student Member, Atsushi Takahashi, Student M

Similar documents
Table 1. Assumed performance of a water electrol ysis plant. Fig. 1. Structure of a proposed power generation system utilizing waste heat from factori

藤村氏(論文1).indd

Estimation of Photovoltaic Module Temperature Rise Motonobu Yukawa, Member, Masahisa Asaoka, Non-member (Mitsubishi Electric Corp.) Keigi Takahara, Me

Fig. 3 Flow diagram of image processing. Black rectangle in the photo indicates the processing area (128 x 32 pixels).

Quantitative Relationship between SAR and Temperature Rise inside Eyeball in a Realistic Human Head Model for 1.5 GHz-Microwave Exposure Kiyofumi Taka

75 unit: mm Fig. Structure of model three-phase stacked transformer cores (a) Alternate-lap joint (b) Step-lap joint 3 4)

０１３８５８，繊維学会誌ファイバー１月／報文－０２－古金谷

42 1 Fig. 2. Li 2 B 4 O 7 crystals with 3inches and 4inches in diameter. Fig. 4. Transmission curve of Li 2 B 4 O 7 crystal. Fig. 5. Refractive index


Fig. 4. Configuration of fatigue test specimen. Table I. Mechanical property of test materials. Table II. Full scale fatigue test conditions and test

第６２巻　第１号　平成２４年４月／石こうを用いた木材ペレット

Note; a: Pressure sensor, b: Semi-permeable membrane, c: O-ring, d: Support screen, e: Solution, f: Solvent. Fig. 2. Osmometer cell. Fig. 1. Schematic


J. Jpn. Inst. Light Met. 65(6): (2015)

Research Reports on Information Science and Electrical Engineering of Kyushu University Vol.11, No.1, March 2006 Numerical Analysis of Scattering Atom

16 (16) poly-si mJ/cm 2 ELA poly-si super cooled liquid, SCL [3] a-si poly-si [4] solid phase crystalization, SPC [5] mJ/cm 2 SPC SCL (di

Table 1. Reluctance equalization design. Fig. 2. Voltage vector of LSynRM. Fig. 4. Analytical model. Table 2. Specifications of analytical models. Fig

Time Variation of Earthquake Volume and Energy-Density with Special Reference to Tohnankai and Mikawa Earthquake Akira IKAMi and Kumizi IIDA Departmen

Computer Simulation in Thermoplastic Injection Molding Takaaki Matsuoka Toyota Central Research and Development Laboratories, Inc. 41-1, Yokomichi, Na

J. Jpn. Soc. Soil Phys. No. 126, p (2014) ECH 2 O 1 2 Calibration of the capacitance type of ECH 2 O soil moisture sensors Shoichi MITSUISHI 1 a


Fig. 1. Schematic drawing of testing system. 71 ( 1 )

20 12,, 59 q r Fig.2 [3] Fig.3 1cm Fig.2 Schematic of experimental apparatus for measuring interfacial thermal resistance. Fig.3 Surface morphol

Mikio Yamamoto: Dynamical Measurement of the E-effect in Iron-Cobalt Alloys. The AE-effect (change in Young's modulus of elasticity with magnetization

プラズマ核融合学会誌１１月【８１‐１１】／小特集５

暑熱順化の形成過程に関する研究 : サーモグラフィ装置によるヒト発汗部皮膚温測定

<8B5A8F70985F95B632936EE7B22E696E6464>

Fig.2 Optical-microscope image of the Y face-cross sec- tion of the bulk domain structure of a 0.4-mm-thick MgO-LiNbO3 crystal after chemical etching.

Fundamental Study on the SOX Gas Sensor Utilizing Beta-Alumina with Sputtered Praseodymium Oxide Thin Films by Shinya YAO1*, Kenji MIYAGAWA1, Shigeru

電子部品はんだ接合部の熱疲労寿命解析

DPA,, ShareLog 3) 4) 2.2 Strino Strino STRain-based user Interface with tacticle of elastic Natural ObjectsStrino 1 Strino ) PC Log-Log (2007 6)

Fig. 2 Signal plane divided into cell of DWT Fig. 1 Schematic diagram for the monitoring system

日立金属技報　Vol.34

[ 30 p. 1-8 (2012)] / ** *** Numerical Analysis of Metal Transfer Phenomena - critical condition between globular and spray transfer mode - by KADOTA

Fig. 1 Flow diagram of experimental apparatus employed Fig. 2 Porosity change during sulfurization of reduced sample pellets

Fig. 2 Effect of oxygen partial pressure on interfacial tensions between molten copper and fayalite slag (Fe/Si0 2=1.23) at 1473 K. Fig. s Effect or o

1.7 D D 2 100m 10 9 ev f(x) xf(x) = c(s)x (s 1) (x + 1) (s 4.5) (1) s age parameter x f(x) ev 10 9 ev 2

1

T05_Nd-Fe-B磁石.indd

(43) Vol.33, No.6(1977) T-239 MUTUAL DIFFUSION AND CHANGE OF THE FINE STRUCTURE OF WET SPUN ANTI-PILLING ACRYLIC FIBER DURING COAGULATION, DRAWING AND

Study on Application of the cos a Method to Neutron Stress Measurement Toshihiko SASAKI*3 and Yukio HIROSE Department of Materials Science and Enginee

Fig. 1 Sampling positions from the ingot. Table 2 Chemical compositions of base metal (%) Fig. 2 (unit: mm) Shape and size of fatigue test specimen. T

Rate of Oxidation of Liquid Iron by Pure Oxygen Shiro BAN-YA and Jae-Dong SHIM Synopsis: The rate of oxidation of liquid iron by oxygen gas has been s

474 Nippon Shokuhin Kagaku Kogaku Kaishi Vol. /-, No.3,.1..2* (,**0) 24 Measurement of Deterioration of Frying Oil Using Electrical Properties Yoshio

Natural Convection Heat Transfer in a Horizontal Porous Enclosure with High Porosity Yasuaki SHIINA*4, Kota ISHIKAWA and Makoto HISHIDA Nuclear Applie

Studies of Foot Form for Footwear Design (Part 9) : Characteristics of the Foot Form of Young and Elder Women Based on their Sizes of Ball Joint Girth

橡

橡A PDF


304 Nippon Shokuhin Kagaku Kogaku Kaishi Vol. /., No.0, -*. -*3 (,**1) 58 * ** *** : * : ** *** Development of Sorting System Based on Potato Starch C

レーザ誘起蛍光法( LIF法) によるピストンの油膜挙動の解析

Fig. 1 Hydrostatic Thrust Bearing Fig. 2 Point loading of elastic half-space

磁気測定によるオーステンパ ダクタイル鋳鉄の残留オーステナイト定量

bosai-2002.dvi

Fig. 1. Horizontal displacement of the second and third order triangulation points accompanied with the Tottori Earthquake of (after SATO, 1973)

Fig, 1. Waveform of the short-circuit current peculiar to a metal. Fig. 2. Waveform of arc short-circuit current. 398 T. IEE Japan, Vol. 113-B, No. 4,

Netsu Sokutei 17 (1) Control and Measurement of Oxygen Partial Pressure, and Thermodynamic Properties Toshihide Tsuji The oxygen partial pressur

LAGUNA LAGUNA 10 p Water quality of Lake Kamo, Sado Island, northeast Japan, Katsuaki Kanzo 1, Ni

obtained for the liniarization, and was found to have a remarkably wider dynamic range (order of approximately 103) than that of conventional screen/f

THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS TECHNICAL REPORT OF IEICE.

Fig. 3 Coordinate system and notation Fig. 1 The hydrodynamic force and wave measured system Fig. 2 Apparatus of model testing

Table 1 Experimental conditions Fig. 1 Belt sanded surface model Table 2 Factor loadings of final varimax criterion 5 6

Fig. 1 Structure of a Sebaceous Follicle (Ref.1).

The Effect of the Circumferential Temperature Change on the Change in the Strain Energy of Carbon Steel during the Rotatory Bending Fatigue Test by Ch

110 B U N S E K I K A G A K U Vol Fig. 1 system Schematic diagram of the plasma measurement Fig. 2 Photograph of a time-resolved obserbation

Vol. 21, No. 2 (2014) W 3 mm SUS304 Ni 650 HV 810 HV Ni Ni Table1 Ni Ni μm SUS mm w 50 mm l 3 mm t 2.2 Fig. 1 XY Fig. 3 Sch

<30345F90BC96EC90E690B65F E706466>

EQUIVALENT TRANSFORMATION TECHNIQUE FOR ISLANDING DETECTION METHODS OF SYNCHRONOUS GENERATOR -REACTIVE POWER PERTURBATION METHODS USING AVR OR SVC- Ju

DVIOUT-ajhe

AUTOMATIC MEASUREMENTS OF STREAM FLOW USING FLUVIAL ACOUSTIC TOMOGRAPHY SYSTEM Kiyosi KAWANISI, Arata, KANEKO Noriaki GOHDA and Shinya

(a) -4furne.ce Fig. I Schematic drawing of cooling chamber Fig. 2 Priventive gas velocity at nozzle 405

Modal Phrase MP because but 2 IP Inflection Phrase IP as long as if IP 3 VP Verb Phrase VP while before [ MP MP [ IP IP [ VP VP ]]] [ MP [ IP [ VP ]]]

** Department of Materials Science and Engineering, University of California, Los Angeles, CA 90025, USA) Preparation of Magnetopulmbite Type Ferrite

Viscosity of Ternary CaO-SiO2-Mx (F, O)y and CaO-Al2O3-Fe2O3 Melts Toshikazu YASUKOUCHI, Kunihiko NAKASHIMA and Katsumi MORI Synopsis : Effects of add

1) T. L. Cottrel, A. J. Matheson, Trans. Farad. Soc., 58, 2336(1962). 2) E. N. Chesnokov, V. N. Panfilov, Teor. Eksp. Khimiya, 17, 699(1981). 3) M. Ko

news

UDC : ' : '24' : '24'26' : : A Study of Condition of Pits Formation and Their Fe

The Evaluation on Impact Strength of Structural Elements by Means of Drop Weight Test Elastic Response and Elastic Limit by Hiroshi Maenaka, Member Sh

プラズマ核融合学会誌７月号【８１－７】／集中講座

燃焼圧センサ

Fig. la PL spectra of PSL prepared on Si specimen (p = 1 k Q m) with electrochemical etching in HF solution (26wt %) under galvanostatic conditions of

10生活環境研究報告.indd

1

原稿.indd

1. Precise Determination of BaAl2O4 Cell and Certification of the Formation of Iron Bearing Solid Solution. By Hiroshi UCHIKAWA and Koichi TSUKIYAMA (

JFE.dvi

The Evaluation of LBB Behavior and Crack Opening Displacement on Statically Indeterminate Piping System Subjected to Monotonic Load The plastic collap

Decreasing Behavior of Acetylene in Oil-Immersed Transformers Takahiro Ohno, Member (Tokyo Electric Power Co.,Ltd.), Masami Katayama, Member, Toshi.tu

H17-NIIT研究報告


RIBF

JFE(和文)No.4-12_下版Gのコピー

weak ferromagnetism observed on Shimotokuyama and Ayumikotan natural crystals behaves as pre dicted by Dzyaloshinsky and Moriya, while Wagasennin and

On the Wireless Beam of Short Electric Waves. (VII) (A New Electric Wave Projector.) By S. UDA, Member (Tohoku Imperial University.) Abstract. A new e

On the Detectability of Earthquakes and Crustal Movements in and around the Tohoku District (Northeastern Honshu) (I) Microearthquakes Hiroshi Ismi an

年次大会原稿最終.PDF

The Phase Behavior of Monooleoylglycerol-Water Systems Mivoshi Oil & Fat Co.. Ltd. Faculty of Science and Technology, Science University of Tokyo Inst


S-6.indd

untitled

Transcription:

Temperature Rise in a Birefringent Substrate by RF Discharge Plasma Koichi Takaki, Member, Kunioh Sayama, Student Member, Atsushi Takahashi, Student Member, Tamiya Fujiwara, Member (Iwate University), Masakatsu Nagata, Member, Motoyuki Ono, Member (Fujikura Ltd.), Muaffaq Achmad Jani, Non-member (Iwate University) Temperature rises of a birefringent substrate (LiNbO3) have been measured in an argon RF discharge plasma. The measurement method is based on monitoring the variation of natural birefringence with temperature by laser interferometry. Using this method, the dependence of substrate temperature rise on applied RF power and gas pressure has been investigated. The evaluation of the temperature curves shows that heat flux from the plasma towards the substrate is independent of time and temperature. The magnitude of the flux differs largely from the applied power, and approximately 0.4% of the power. By measuring electron density, electron temperature and plasma potential with Langmuir probe, the energy of the ions incident on the substrate is estimated. The ion flux towards the substrate is calculated from the energy of ions and is compared with the measured heat flux. The dependence on the applied power is in approximate agreement between those fluxes. The temperature distribution over the substrate thickness is simulated numerically using the finite difference method.

Fig. 1. Schematic diagram of the experimental setup. Fig. 2. Relationship between substrate temperature and number of fringes.

Fig. 3. Temperature of the substrate as a function of time. Fig. 5. Substrate temperature rises with watercooling electrode. Fig. 4. Comparison between substrate temperature rises in the case of cooling and non-cooling electrodes.

Fig. 7. Separation of temperature rises in the substrate and the electrode surface. Fig. 6. Calculated temperature rises versus time, with heat transfer coefficient as parameter. Fig. 8. Heat transfer coefficient of the substrate.

Fig. 9. Temperature distribution over the substrate thickness. Fig. 10. Heat flux from plasma to the substrate as a function of RF power. Fig. 11. Plasma parameters as a function of RF power.

Electrochem. Soc., 131, 1164 (1984) (3) I. Hussla, K. Enke, H. Grunwald, G. Lorenz & H. Stoll: "In situ silicon-wafer temperature measurements during RF argon-ion plasma etching via fluoroptic thermometry", J. Phys. D: Appl. Phys., 20, 889 (1987) (4) M. Ulrickson: "Surface thermography", J. Vac. Sci. Technol., A4, 1805 (1986) (5) R. R. Manory: "A simple method for monitoring surface temperatures in plasma treatments", ibid., A4, 2329 (1986) (6) R. A. Bond, S. Dzioba & H. M. Naguib: "Temperature measurements of glass substrates during plasma etching", ibid., 18, 335 (1981) (7) R. Rochotzki & M. Friedrich: "Temperature measurements of polymer substrates (PMMA) in an RF discharge", IEE Proc., A139, 61 (1992) (8) T. Fujiwara & H. Yamada: "Temperature measurements of a birefringent substrate (LiNbO3) in a radio frequency discharge by laser interferometry", Rev. Sci. Instrum., 65, 267 (1994) (9) T. Fujiwara, Muaffaq Achmad Jani, M. Itagaki, S. Kato & H. Yamada: "Temperature measurements of birefringent substrate in RF discharge by laser interferometry", Proc. 12th Symp. on Plasma Processing, Sendai, 253 (1995) (10) T. Taniuchi & Y. Tsujimoto: "Fiber-Optic Temperature Sensor", National Tech. Report, 29, 23 (1983) (12) A. J. van Roosmalen, W. G. M. van den Hoek & H. Kalter: "Electrical properties of planar rf discharges for dry etch - ing", J. Appl. Phys., 58, No. 2, 653 (1985) (13) K. Kohler, J. W. Cobum, D. E. Home, E. Kay & J. H. Keller: "Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system", J. Appl. Phys., 57, No. 1, 59 (1985) (1) R. J. Visser: "Determination of the power and current densities in argon and oxygen plasmas by in situ temperature measurements", J. Vac. Sci. Technol., A7, 189 (1989) (2) J. J. Hannon & J. M. Cook: "Oxidative Removal of Photoresist by Oxygen/Freon 116 Discharge Products", J.

2024 © docsplayer.net プライバシー | 利用規約 | フィードバック