XPS分析のための簡易マニュアル

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たつぞうかやぬま
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1 XPS XPS XPS XPS XPS

2 1. N2 0.4MPa 2. ON PUMP 3. POWER SUPPLY CONTROL UNIT SPEC ON 4. POWER SUPPLY CONTROL UNIT X-R ON 0.4MPa RESET 5. X-RAY POWER UNIT (a) AUTO/MANUMANU (b) Al/MgMg (c) FILAMENT ON/OFFOFF (d) FILAMENT ADJ (e) HIGH VOLT (f) EMSN CURR (g) MONO/STD (h) ON/OFF OFF (i) X-RAY READYLED (j) X-R POWER/FILAMENT POWERFILAMENT POWER 6. X-RAY POWER UNIT FILAMENT ON 7. FILAMENT ADJ CURRENT 3.0 VOLTAGE X-RAY POWER/FILAMENT POWERX-RAY POWER X 10. X-RAY ON/OFFON

3 11. HIGH VOLT. X-RAY ON/ Pa 12.. X-RAY X PC X 13. HIGH VOLT 14. X-RAY ON/OFFOFF 15. AUTO/MANUAUTO CRT 19. PC SpecSurf 20,

4 1. a) POWER SUPPLY CONTROL UNIT V1 b) MGL c) MGL d) Z 2. OPERATION BOX X Y T X Y T MODE AUTO RESET PM NO E MOVE 3. VENT SWON

5 7. a) b) MGL c) 8. VENT OFF SW 9. READY LED 10. HOYA-SHOTT SW 11. V1ON 12. MGL MG

6 13. MGL MGL 14. MGL 15. V1OFF 16. XPS 1. CCD 21, X

7 . Multi Channel Detector Unit HT ON Scan Dwell Smoothing XPS 1. Acquire XPS (a) Experiment Experiment: Wide scan Lens Mode: 3.0mm & 1.0mm MovementNONE (b) Source Source: MgKa Al ma 5 10mA (c) Regions Scan: Average Mode: CAE Start (ev): 1000 Finish (ev): 0 Dwell (ms): 100 SCAN S/N 200 Pass (ev): 50 Scans: 1

8 2. Acquire XPS (a) Experiment Experiment: Narrow scan Lens Mode: 3.0mm & 1.0mm Movement: None (b) Source Source: MgKa Al Source: MgKa Al ma 5 10mA (c) Regions Element: Wide Region: Start (ev): Finish (ev): Dwell (ms): 100 Pass (ev): 10 Scans: 1 Group Default ScanAcross ModeCAE Save 3. Source Status X ON X-Ray Power Voltage Current 4. [Start] [Pause] [Stop] [Abort]

9 5. FileSave C: usr CSV Depth 1. FIL ON RVG050 Power Supply Control 2. AVC (10-2Pa ) (a) (b) (c) X Pa MEAS FIL ON 4. RVG050 ON X10Pa ON 5. Acquire XPS (a) Experiment Experiment: Depth Profile Acquisition Mode: Full Lens Mode: 3.0mm & 1.0mm Movement: Memory () (b) Source Source: MgKa Al Settings 10kV

10 5 ma10ma Status Automatic (c) Stage Groups : Default First = 1 Last = 1 Group = Default (d) Regions Element: Wide Region: Start (ev): Finish (ev): Dwell (ms): Pass (ev): 10 Scans: 12 () Repeat: 1 () (Group Default) ScanAcross ModeCAE (e) Profiling Ion Gun : Present 1 Group: Default Control: Before To Time (sec) Before To Time Enter Save 6. OPERATION BOX P/M 7. XPS Acquisition Window Profiling Pressure 8 [Set] 8E-2 Profiling Narrow Scan 8. XPS Acquisition Window [Start]

11 [Pause] [Stop] [Abort] 9. FileSave C: usr CSV 10. Pressure 11. X 1. OPERATION BOX P/M UP/DOWN E MOVE V1 OPEN ON V1 OPEN OFF 7. VENT ON B 11. VENT OFF 1. PC AcquireXPSXPS Acquisition Source Status OFFX-Ray High Voltage 2. Depth ProfileProfiling Pressure 3.

12 . AVC 23OFF Power Supply Control RVG050 OFF. 6. CCD OFF 22, MULTI CHANNEL DETECTOR HT OFF 8. X-R POWER (a) AUTO/MANUMANU (b) FILAMENT ADJ (c) FILAMENT ON/OFF OFF (d) FILAMENT POWER PS CONTROL UNIT X-R OFF SPEC OFF 11. OFF SpecSurf PC Position (a) HIGH VOLT (b) RVG V1,VENT 18, 19 X-RSPEC (2, 3)

13 AVC (23) E-7 E-4 (c) (d) PUMP (e) (f) 11 (g) Wide Scapn, Depth, Region PC AcquireXPSXPS Acquisition ) Experimental Movement: Memory Positions ) Stage Stage First= Last = Group Default Regions Group Default Stage Group 1 [Add] Group 2 [Add] Group Group=Group1, First=1, Last= 2 Group1 Group=Group2, First=3, Last= 3 Group2 Last [Group] Regions Group1Group2 Profiling Group1Group2 17

14 OPERATION BOX ) P/M ) P/M ) P/M ES 8504 MS

HITACHI HF-2000

HITACHI HF-2000 v. 4. 1 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 14. TV 15. 16. 17. 15 5-1 - 1. 1.1 COLUMN ON 1.2 OBJ. TEMP. MONITOR 20 1.3 POWER HV IP-1 ON ON LOCK (