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1 98 17 (2005) 81 () () [email protected]
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7 M. S. Phadke (Bell Telephone Laboratories, 1982/8) Contact Windows Size (mean 3.0m, smallest variance) TEST CONTROLFACTORS LEVEL SLIDING LEVEL AMask Dimension() 2 2.5* Viscosity: Spin Speed B Viscosity 204* 206 C 1 C 2 C 3 CSpin Speed(rpm) Low Normal High* B 1 204* * B Bake Temperature() * B DBake Time (min) 20 30* 40 Aperture: Exposure Time EAperture 1 2* 3 F 1 F 2 F 3 FExposure Time +20% Normal* 20% E GDevelop Time (sec) * E 2 2* 72 90* 108 HPlasma Etch Time (min) * 15.8 E (PEP-setting) Standard Levels * Optimum Levels
8 6. ORTHOGONAL ARRY 18 ( ) (Golden Array) ( =4374) SN ratio = 10log 10 B1 IMPROVEMENTS { } Mean S tan dard Deviation B3 B 1B 1 B 1B 2 Standard deviation of window size m 50% reduction Defect density (window size = 0) windows/chips 67% reduction Overall time (window photography) 50% reduction Yield 33%87%
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R&D 63 SN 63 96 986 986 989 996 ASQC 997 3 998 (ASQ) 998 (ASME) 7 993 994 99 996 997 998 999 3 4 Robust Engineering Robust Design Taguchi Method P-diagram SN MT Key Words DC INPUTOUTPUT P-diagram 73 74
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