Microsoft PowerPoint - SWTW2014_SV TCL 3D TSV Cu Pillar Challenges_Experience_akn.ppt

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1 3D TSV Cu Pillar Probing Challenges & Experience 3 次元 TSV プロービングの課題と経験 Ray Grimm/Mohamed Hegazy SV TCL An SV Probe Company Linjianjun (David) Hi Silicon Rick Chen SPIL

2 The Challenges 2

3 Cu Pillar Bump Reliability Shear Test Each Assembly/Packaging house has done many DOEs & optimized their bump geometry, UBM, PI thickness to optimize reliability. Reliability Test Bump Structure Corner Corner Fig 1. Stress Point after FC Attach Reflow Fig 2. Stress Point After Assembly 3

Cu Pillar Bump Probing w/staggered Probe High Risk of Peeling & Fracture Failures: 剥がれ破断不良のリスク Bump shear tests were performed as per the JEDEC standards (JEDD22-B117).

TH= 80µm, shear test start at 25µm & the other to solder cap at 70µm.

4 Cu Pillar Bump Probing w/staggered Probe High Risk of Peeling & Fracture Failures: 剥がれ破断不良のリスク Bump shear tests were performed as per the JEDEC standards (JEDD22-B117).: バンプせん断試験は JEDEC 規格 (JEDD22-B117) に従って実施した For Bump Shear Test, the wedge force at 20%~30% of Total Height of Pillar Eg.TH= 80µm, shear test start at 25µm & the other to solder cap at 70µm. After the shear test was complete, the next step is for TCT Thermal Cycle for 1000 cycles, and results were observed to be passing. If the geometry is not optimized then fractures will show up on the stress points. Same concept was performed if probing on 2 different conditions 70µm 25µm Shear Force Test Spec >7mgf/µm 2 Optimum Probe High Risk Probe shear force apply on stress point. 4

5 The SV TCL Experience 5

6 Recap of previous activities Case #1 :2010 Copper Pillar & Bump Probing Engineering lab tests Case #2: µm Pitch Array w/logictouch First trial on customer wafer 6

Case #1 Copper Pillar & Bump Probing Internal Work to Study Contact Behavior of Cu pillar Bumps at 60µm Pitch with Various Solder Cap Materials: 60um ピッチバンプ : Cu pillar with Eutectic Solder Cap:

7 Case #1 Copper Pillar & Bump Probing Internal Work to Study Contact Behavior of Cu pillar Bumps at 60µm Pitch with Various Solder Cap Materials: 60um ピッチバンプ : Cu pillar with Eutectic Solder Cap: 共晶はんだ Cu pillar with Lead free Solder Cap: 鉛フリーはんだ Cu pillars Demonstrated : 実証 Critical stress points and mechanical failure mechanisms of the probe card as well as the Cu Pillar : 機械的不良 Critical parameters to achieve reliable and stable contact to different configurations : 問題となるパラメータ Presented at SWTW 2010 Eutectic Cap Direct on Cu Lead Free Cap 7

8 Case #2 50µm Pitch Array w/logictouch Co presented with ASE at SWTW

9 So where have we gone since SWTW 2010 and 2012? SWTW2010,2012 以後の結果 9

10 Case#3 Production Reliability DOE Huawei/Hi Silicon/SPIL Cu Pillar + Solder Cap Probe Mark DOE Mobile Chip Hi

11 DOE set up 11

12 Probe Mark Size Sampling Plan 12

13 Probe Mark Size Analysis 13

14 RVSI Inspection Robotic vision bump inspection system 14

15 Die Test Results No Bin shifting observed Stability shown even with increasing TD and OD 15

16 Probe Mark SEM Verification 16

17 Ion Miller Verification of Low K Layer No Low K cracking observed 17

18 X Ray Results No Abnormality observed 18

19 C SAM Results C Mode Scanning Acoustic Microscope No Abnormality observed 19

20 No Abnormality observed T Ray Results Terahertz Radiation 20

21 Current Status : 現状 High yield observed : 高いイールド 98% Die yield 99% Mechanical bump damage yield 2 more Devices successfully completed reliability testing: 追加 2 デバイスの信頼性テスト良好 More than 10 devices are in full production:10 以上のデバイスを量産使用 21

22 Lifetime study versus actual 針寿命の考察結果 22

Probe mark and expected life time with aggressive clean Trio2milFlat pitch@80um Customer Patrs_ID Device # Close die Test Site Initial tip extension Current Tip extension Current TDs TDs per mil of

23 Probe mark and expected life time with aggressive clean Trio2milFlat Customer Patrs_ID Device # Close die Test Site Initial tip extension Current Tip extension Current TDs TDs per mil of tip extension loss Life expectanc y in TDs HIS HI0007 HI ,736 85, ,881 1-Obtain initial and current tip extension and TDs 2-Obtain TDs per mil of tip extension loss 3-Obtain life expectancy based on available tip extension and TDs per mil of tip extension loss 23

24 Actual life time with optimized clean Trio2milFlat 1,921,787 TDs 2 Million TDs! 24

25 Summary: まとめ Copper pillar probing requires not only electrical considerations, but also very precise mechanical probing techniques: 銅ピラープローブは電気的考慮だけでなく非常に精密な機械特性測定技術を必要とする The positional accuracy of the probe contacts to the copper pillar is critical to prevent shearing and fractures during probing: 銅ピラーに対するプローブコンタクトの位置合わせがプロービング時の剪断および破断を防止するために重要である 2 mil Trio probe contacts are an ideal solution for copper pillar applications: 2ミルのTrioプローブは銅ピラーアプリケーションに理想的なソリューションである Low cost: 低コスト Tried and proven technology: 実証済み技術 Repairable: リペア可能 Short lead time to market: 短納期 25

JOURNAL OF THE JAPANESE ASSOCIATION FOR PETROLEUM TECHNOLOGY VOL. 66, NO. 6 (Nov., 2001) (Received August 10, 2001; accepted November 9, 2001) Alterna

JOURNAL OF THE JAPANESE ASSOCIATION FOR PETROLEUM TECHNOLOGY VOL. 66, NO. 6 (Nov., 2001) (Received August 10, 2001; accepted November 9, 2001) Alternative approach using the Monte Carlo simulation to evaluate