Thick-GEM 06S2026A 22 3

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Thick-GEM 06S2026A 22 3

(MWPC-Multi Wire Proportional Chamber) MPGD(Micro Pattern Gas Detector) MPGD MPGD MPGD MPGD GEM(Gas Electron Multiplier) GEM GEM GEM Thick-GEM GEM Thick-GEM 10 4 Thick-GEM

1 Introduction 1 1.1 MWPC................................... 1 1.2 MPGD.................................... 1 1.2.1 GEM................................... 2 1.2.2 MSGC................................... 3 1.2.3 µ-pic................................... 3 1.2.4 MicroMEGAS............................... 4 1.3 MPGD................................ 4 1.4.................................. 5 2 GEM(Gas Electron Multiplier) 6 2.1 GEM.................................. 6 2.2 GEM................................. 7 2.3............................. 9 2.3.1.................................. 9 2.3.2.............................. 10 2.3.3................................. 11 2.4............................... 11 3 Thick-GEM 15 3.1................................... 15 3.2.............................. 17 3.3 X................................... 18 3.4................................. 19 3.5 Thick-GEM........................... 19 3.6 ADC(Analog to Digital Converter).................... 21 3.7............................... 23 3.8............................... 23 3.8.1................................. 24 3.8.2 P10........................... 24 3.8.3 P5........................... 25 3.8.4 Ar-CO 2........................ 26 i

ii 3.8.5............................ 27 4 Thick-GEM 28 4.1 Maxwell SV................................. 28 4.2 Garfield................................... 29 4.2.1........................ 29 4.2.2 step size............................. 30 4.2.3 step size.............................. 31 4.3 Thick-GEM............... 32 4.4......................... 34 4.5...................... 37 4.5.1 P10....................... 37 4.5.2 P5........................ 39 4.5.3 Ar-CO 2..................... 40 5 41 6 43 6.1.................................... 43 6.1.1.............................. 43 6.1.2............................. 43 6.2.................................. 43 44 45

1 Introduction (MWPC-Multi Wire Proportional Chamber) (MPGD-Micro Pattern Gas Detector) MWPC MPGD MPGD 1.1 MWPC MWPC MWPC *1 10 5 1.2 MPGD MWPC MWPC (MPGD-Micro Pattern Gas Detector) MPGD MWPC *1 1

1 Introduction 2 MPGD MPGD GEM(Gas Electron Muliplier) MSGC(Micro Strip Gas Chamber) µ-pic(micro Pixel Chamber) MicroMEGAS(Micromesh Gaseous Detector) 1.2.1 GEM 1.1 GEM GEM GEM GEM GEM GEM 1.1 GEM

1 Introduction 3 1.2.2 MSGC 1.2 MSGC MSGC 10µm 100µm MSGC 1.2 MSGC 1.2.3 µ-pic 1.3 µ-pic µ-pic MSGC MSGC µ-pic µ-pic 10 4 GEM 1.3 µ-pic

1 Introduction 4 1.2.4 MicroMEGAS 1.4 MicroMEGAS MicroMEGAS ( ) MicroMesh( ) MicroMesh MicroMEGAS MicroMesh MicroMEGAS 1.4 MicroMEGAS 1.3 MPGD MPGD ILC(International Linear Collider) TPC(Time Projection Chamber) TPC 2 3 TPC MPGD TPC MPGD MeV γ γ X

1 Introduction 5 X 1.4 MPGD GEM GEM 50µm 10 4 400µm GEM(Thick-GEM) 50µm GEM Thick-GEM Thick-GEM 10 4

2 GEM(Gas Electron Multiplier) GEM 2.1 GEM GEM MPGD 1996 CERN F.Sauli GEM GEM 50µm 5µm 70µm 140µm GEM 300V GEM 10 4 50µm GEM GEM GEM *2 10 4 Thick-GEM 2.1 CERN GEM 2.2 CERN GEM 2.1 CERN GEM 2.2 CERN GEM *2 GEM 6

2 GEM(Gas Electron Multiplier) 7 2.2 GEM MPGD GEM (1) 2.3 GEM GEM 2.3 (2) GEM 2.4 GEM 2.4

2 GEM(Gas Electron Multiplier) 8 (3) 2.5 GEM 2.6 2.5 2.6 2.5 CERN GEM 2.7 GEM 2.7 GEM 50µm 70µm 100µm 150µm 30µm 50µm

2 GEM(Gas Electron Multiplier) 9 GEM 400µm Thick-GEM 10mm 0.5mm Thick-GEM 0.3mm 0.2mm 0.2mm 0.1mm 2.3 (X γ ) X 2.3.1 2.8 X X X

2 GEM(Gas Electron Multiplier) 10 500keV 50keV 2.8 2.3.2 2.9 E E θ 0.51MeV E = 0.51 [MeV ] (2.1) 1 cos θ + 0.51/E[MeV ] (θ=0) θ = π/2 0.51MeV 0.6 5MeV 0.05 15MeV 2.9

2 GEM(Gas Electron Multiplier) 11 2.3.3 2.10 hν 0 2mc 2 =1.02MeV 1.02MeV 1.02MeV 5MeV 15MeV 2.4 2.10 ( ) ( ) 10kV/cm

2 GEM(Gas Electron Multiplier) 12 (2.2) dn N = αdx (2.2) α (first Townsend coefficient) (2.2) N(x) = N 0 e αx (2.3) N 0 N(x) x ( ) (2.3) x N(x) 2.11 GEM GEM GEM 2.11 GEM

2 GEM(Gas Electron Multiplier) 13 2.12 GM α β 2.12 α β 1. 2. 3. 4. 5. GM ( ) 6. 1. 2.

2 GEM(Gas Electron Multiplier) 14 3. 4. 5. GM 6. GEM

3 Thick-GEM Thick-GEM 3.1 3.1 3.1 Thick-GEM GEM Drift 3.1 GEM Induction Drift GEM GEM Induction 15

第 3 章 Thick-GEM の基礎特性の測定 図 3.2 カソードメッシュ 16 図 3.3 読み出しパッド カソードに図 3.2 のようなメッシュを用いることにより X 線が Drift 領域へ透過でき るようになっている また 読み出しパッドは図 3.3 のように５本のストリップによって できているが 本研究で用いる Thick-GEM のパターンの面積は小さく 一本のストリッ プのみで十分読み出し可能である したがって Thick-GEM のパターン真下のストリッ プ一本 (中央のストリップ) のみから読み出しを行う 図 3.4 チェンバーの全体図 図 3.5 ASD アンプ 図 3.4 は測定に用いたチェンバーである チェンバーは厚さ 5.0 mm のアルミ板で囲ま れており 容積は 21 cm 19 cm 4 cm となっている 強い強度の放射線を入射する 際は チェンバー上部の 10 cm 10 cm の薄いアルミ製の入射窓より放射線を入射する また 今回用いたチェンバーの底は二重になっており アンプを内蔵することによってノ イズを最小限に抑えることができる また 本研究では図 3.5 の ASD アンプを使用した ASD アンプは ATLAS 測定器の 検出器のひとつである TGC に取り付けられるアンプとして採用されている ASD アン プの増幅率は 0.8 V/pC である 信号の立ち上がりは 16 nsec と一定であり 入った電荷 量に比例した波高を出力する

3 Thick-GEM 17 3.6 Thick-GEM 3.7 Thick-GEM 3.6 Thick-GEM GEM 0.3mm 0.1mm 3.7 Thick-GEM 3.2 P10 (Ar CH 4 90 10 ) P5 (Ar CH 4 95 5 ) Ar-CO 2 (Ar CO 2 70 30 ) P10 P5 Ar-CO 2 50µm GEM P10 78 cc/min P5 94 cc/min Ar-CO 2 49 cc/min

3 Thick-GEM 18 3.3 X 55 Fe 55 Fe K 55 Mn K X L K α X M K β X X 3.8 3.8 55 Fe 55 Fe 5.9 kev X Ar K K (3.2keV) 2.7keV K Ar + (1) (2) X X 85:15 (1) Ar K 3.2keV 5.9keV 3.9 3.9

3 Thick-GEM 19 (2) X Ar (1) 3.2keV X X Ar + 2.7keV X 3.10 3.10 X 3.4 GEM Induction GEM 3.5 Thick-GEM 3.11 Thick-GEM Thick-GEM Thick- GEM GEM

3 Thick-GEM 20 GEM GEM 3.11 Thick-GEM Thick-GEM Thick-GEM 3.12 Thick-GEM Inverter Discriminator Gate Generator Gate Discriminator Thick-GEM ADC 3.6 Gate Delay 3.12

3 Thick-GEM 21 3.6 ADC(Analog to Digital Converter) ADC(Analog to Digital Converter) I R V V = IR I = dq dt V (3.1) V = R dq dt (3.2) ADC Gate Gate t V dt = RQ (3.3) Q = 1 R V dt (3.4) ADC Q Thick-GEM Gate 3.13 Gate 3.13 Thick-GEM

3 Thick-GEM 22 ADC ADC 3.14 P10 Thick-GEM V GEM =1520 [V] ADC X (mean ) 3.14 ADC ADC mean pedestal pedestal Clock Generator ADC mean pedestal mean

3 Thick-GEM 23 3.7 (3.5) ( ) ( ) ( G) = ( ) (3.5) Ar W 26eV W 55 Fe X 5.9keV ( ) 5.9 10 3 26 2.3 10 2 [ ] 55 Fe 1.60 10 19 2.3 10 2 3.6 10 5 [pc] ASD ASD (3.5) G = ADC(mean pedestal ) (1ADC ) e ( ) ( ) (3.6) ASD 400 1ADC 0.25 pc 3.8 400µm Thick-GEM GEM 10 4 Thick-GEM (P10 P5 Ar-CO 2 ) Thick-GEM

3 Thick-GEM 24 3.8.1 Drift Induction 0.5kV/cm 4.5kV/cm Thick-GEM Thick-GEM V GEM Thick-GEM ( ) V GEM 10V 10000 ADC P10 P5 Ar-CO 2 3.8.2 P10 P10 V GEM =1460 V 1620 V 1630 V V GEM V GEM 3.15 3.15 P10 V GEM 3.15 V GEM =1560 V 10 4

3 Thick-GEM 25 3.8.3 P5 P5 V GEM =1350 V 1450 V 1460 V V GEM V GEM 3.16 3.16 P5 V GEM 3.16 V GEM =1320 V 10 4 P5

3 Thick-GEM 26 3.8.4 Ar-CO 2 Ar-CO 2 V GEM =1880 V 1930 V 1940 V V GEM V GEM 3.17 3.17 Ar-CO 2 V GEM 3.17 Ar-CO 2 10 4

3 Thick-GEM 27 3.8.5 P5 Drift Induction 0.5 kv/cm 4.5 kv/cm V GEM 1400 V 3.18 ( ) (300 ) 0 30 10 300 30 60 360 3.18 3.18 Thick-GEM

4 Thick-GEM 400µm GEM( Thick-GEM) Maxwell SV Garfield 4.1 Maxwell SV GEM Maxwell SV Maxwell Ansoft *3 Maxwell 3D Maxwell SV 4.1 Thick-GEM 0.4mm Thick-GEM 0.3mm 35µm Drift Induction 1.0mm Drift 0.5 kv/cm Induction 4.5 kv/cm 0.1mm *3 ( ) ( ) 28

4 Thick-GEM 29 4.1 Thick-GEM 4.2 Garfield Garfield CERN ( ) Garfield Heed Magboltz Garfield Maxwell 4.2.1 Garfield step

4 Thick-GEM 30 4.2.2 step size Garfield step( 4.2) (step size) step size step size 4.2 step 1step 1. 1step 2. 1. step 3. step step 2. 3. step size step size 1step step size

4 Thick-GEM 31 step size step Garfield step 1000 Thick- GEM 400µm 1000 step step 10000 4.2.3 step size step size 4.1 4.3 P5 ( V GEM ) 1500 V 4.3 step size 10000 step 10000 4.4 4.4 step size step

4 Thick-GEM 32 4.4 step size step 10000 step size 3µm step 10000 95 step size 5µm 4.3 Thick-GEM 4.1 Thick-GEM Thick-GEM Thick-GEM 0.1mm 3.7 0.07mm 0.05mm Thick-GEM 4.5 4.9 4.5 cube etching 0.1mm 4.5 Thick-GEM cube 0.1mm 4.6 cube etching 0.07mm 4.6 Thick-GEM cube 0.07mm cube etching 0.1mm 0.03mm

4 Thick-GEM 33 4.7 cube etching 0.05mm 4.7 Thick-GEM cube 0.05mm cube etching 0.1mm 0.05mm 4.8 slash etching 1 4.8 Thick-GEM 0.1mm 4.9 slash etching 2 4.9 Thick-GEM 0.1mm 0.07mm 0.07mm

4 Thick-GEM 34 4.4 Maxwell SV Thick-GEM Thick-GEM 4.10 4.14 400µm Thick-GEM V GEM =1600 V 4.10 cube etching 0.1mm 30 kv/cm 10 kv/cm 40 kv/cm

4 Thick-GEM 35 4.11 cube etching 0.07mm 4.12 cube etching 0.05mm 4.11 32 kv/cm cube etching 0.1mm 4.12 34 kv/cm cube etching

4 Thick-GEM 36 4.13 slash etching 1 4.14 slash etching 2 4.13 38 kv/cm 4.14 32 kv/cm cube etching 0.07mm

4 Thick-GEM 37 4.5 Garfield (P5 P10 Ar-CO 2 ) 4.15 4.20 cube etching slash etching Thick-GEM ( V GEM ) 4.5.1 P10 4.15 P10 cube etching V GEM 4.15 cube etching V GEM 0.07mm cube etching Thick-GEM 0.05mm cube etching Thick-GEM 0.1mm cube etching Thick-GEM

4 Thick-GEM 38 4.16 P10 slash etching V GEM 4.16 slash etching V GEM slash etching 1 Thick-GEM 10 slash etching 2 Thick-GEM

4 Thick-GEM 39 4.5.2 P5 4.17 P5 cube etching V GEM 4.17 P5 0.05mm cube etching Thick-GEM 4.18 P5 slash etching V GEM 4.18 slash etching 1 P5 slash etching 2 1/2

4 Thick-GEM 40 4.5.3 Ar-CO 2 4.19 Ar-CO 2 cube etching V GEM 4.19 Ar-CO 2 0.07mm cube etching Thick-GEM 4.20 Ar-CO 2 slash etching V GEM 4.20 slash etching 2 Thick-GEM

5 5.1 ( ) V GEM 5.1 V GEM P10 V GEM =1630 V P5 V GEM =1460 V Ar-CO 2 V GEM =1940 V P10 P5 10 4 Ar-CO 2 10 4 P10 P5 Thick-GEM 50µm GEM Ar-CO 2 Thick-GEM P10 P5 3 10 4 Thick-GEM Ar-CO 2 6 10 3 41

5 42 V GEM =1940 V Thick-GEM P10 P5 Thick-GEM P10 P5 3.17 Thick-GEM 300 Thick-GEM 400µm 4.10 4.14 4.13 slash etching 1 Thick-GEM P10 Ar-CO 2 slash etching 2 cube etching 0.07mm Thick-GEM slash etching 2 cube etching 0.07mm P5 cube etching 0.05mm 0.1mm 3.7 Thick-GEM Thick-GEM

6 6.1 400µm Thick-GEM 6.1.1 Thick-GEM V GEM P10 P5 10 4 Ar-CO 2 10 4 300 Thick-GEM 6.1.2 Maxwell SV Garfield Thick-GEM Thick-GEM 6.2 Thick-GEM Thick-GEM Thick-GEM Thick-GEM 43

44 [1] GEM (2008) [2] TGEM (2009) [3] GEM (2006) [4] GEM (2008) [5] GEM (2008) [6] SLHC MicroMEGAS (2008) [7] F.Sauli PRINCEPLES OF OPERATION OF MULTIWIRE PROPORTIONAL AND DRIFT CHAMBERS (1977) [8] Ansoft Maxwell SV Getting Started:A 2D Electrostatic Problem (2002) [9] Garfield - simulation of gaseous detectors http://garfield.web.cern.ch/garfield/ [10] Garfield http://www.icepp.s.u-tokyo.ac.jp/ isobe/tips/garfield/ [11] The Gas Detectors Development Group in CERN http://gdd.web.cern.ch/gdd/ [12] Express http://www.pbfree.jp/index.html [13] F.Sauli DEVELOPMENTS AND APPLICATIONS OF THE GAS ELEC- TRON MULTIPLIER GEM [14] (2002)

4 2010 3 45

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