PALL NEWS November 2017 Vol.126 PALL NEWS vol.126 November 2017
NEW =2000 9660 41.4 MPa 24 MPa NFPA T2.06.01 R2-2001 CAT C/90/* (1x10 6 0-28 MPa 1x10 6 29 120 C 60 C 450 Pa 340 Pa 1 MPa JIS B 8356-3/ISO 2941) / 1 PALL NEWS vol.126 November 2017
1.25 230 L/min NEW 88.9 mm 88.9 mm 110 mm 110 mm 198 mm 24 mm 159.5 mm 2X 58 mm 122 mm 2X 95 mm 1.5 600 L/min 127 mm 127 mm 155 mm 155 mm 137 mm 197.5 mm 60 mm 87.1 mm 87.1 mm 120 mm 132 mm 2 PALL NEWS vol.126 November 2017
1 2017 EL 1 8000 ELOLED OLED 20202 2 OLED PMOLED AMOLED 2017AMOLED98 PMOLED AMOLED AMOLED AMOLED AMOLED2017 Apple iphoneel EL PMOLED Galaxy Round Galaxy Note Edge Galaxy S6 Edge Estimated Convex Curved Single Edge Curved Dual Edge Curved Inside Foldable In & Out Foldable Rollable 1920 x 1080 2560 x 1440 2560 x 1440 3840 x 2160 3840 x 2160 3840 x 2160 Smartphone Smartphone Smartphone Tablet Tablet Tablet 1: EL GALAXY Samsung IHS Display Japan 3 PALL NEWS vol.126 November 2017
3 6,6 P- HDPE PE- EL PFA 4 PF PTFE PTFE LCD Polarizer (Up) Glass OLED Plastic OLED CF Glass TFT Glass Polarizer (Down) Polarizer Encap. Glass TFT Glass Polarizer Encap. TFT Plastic Backlight Width 2mm 1mm < 0.5 mm 2: LCD OLED IHS Display Japan 4 PALL NEWS vol.126 November 2017
5 GC-MSGC-MS 37 2 (kpa) 1 PHF12UCFR (0.2 m) PHF12UCFT (0.1 m) PHF12UUCFX (0.45 m) 0 0 0.5 ml / sec 1 1.5 3 PF 1.2 1 GC-MS data 37% lower *HDPE-XP 1GC-MS 0.8 0.6 0.4 0.2 0 HDPE-XP Photokleen PF 4 PF 5 PALL NEWS vol.126 November 2017
Pressure gauge Pressure regulator PFA vessel Compressed air Challenge solution Test filter PFA bottle Electric balance 6 PALL NEWS vol.126 November 2017
Pressure regulator N 2 Pressure gauge Test filter Metal challenge solution Metal spiked solvent, unfiltered and filtered 300 mm Si wafer Sampling bottle TREX 632 III Removal efficlency 100% 80% 60% 40% 20% 0% 5 nm rated Nylon 6,6-1 5 nm rated Nylon 6,6-2 2 nm rated HDPE-1 2 nm rated HDPE-2 Li Na Mg Al K Ca Cr Mn Fe Co Ni Cu Zn Ag Cd Sn Ba W Pb Removal efficlency 100% 80% 60% 40% 20% 0% 5 nm rated Nylon 6,6-1 5 nm rated Nylon 6,6-2 2 nm rated HDPE-1 2 nm rated HDPE-2 Li Na Mg Al K Ca V Cr Mn Fe Co Ni Cu Zn As Ag Cd Ba W Pb -1, -2 100-200, 200-300 ml 0% 1% -1, -2 100-200, 200-300 ml 0% 1% 7 PALL NEWS vol.126 November 2017
Removal efficlency (%) 100 90 80 70 60 50 40 30 20 10 0 Mg 2 Na -1.5-1.0 Al 3 WO 4 2 1 2 4 LogP Al 3-0.5-0.0-0.5-1.0-1.5-2.0-1.5-1.0 2 Mg Na WO 4 2-0.5-0.0-0.5-1.0-1.5-2.0 1 2 3 4 Metal removal efficiency 100% 80% 60% 40% 20% a. Typical flow rate at POU filteration Typical flow rate at Bulk filtration 0% 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Flow rate per unit filtration area (g min -1 cm -2 ) Li Na Mg K Ca 100% 1: PGME-DI water; PGME 0, 25, 50, 75 100%, 2: PGME:PGMEA 70:30, 3:, 4: n- LogP :, : 5nm Solvent Na, Mg 2 Al 3, WO 4 2 H 2 O H O O N C C C C C C C C N C C C C C N C C H O O H Nylon 6,6 H O H H H O H H H H O Metal removal efficiency 80% 60% 40% b. Typical flow rate at Bulk filtration 20% Typical flow rate at POU 0% filteration 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Flow rate per unit filtration area (g min -1 cm -2 ) a.: Li, Na, Mg, K Ca, b: Mn, Fe, Co, Cr Ni. 2 Mn Fe Co Cr Ni 8 PALL NEWS vol.126 November 2017
100% Li 100% Mn Metal removal efficiency 80% 60% 40% a. 20% Typical flow rate at POU Typical flow rate at Bulk filtration 0% filteration 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Flow rate per unit filtration area (g min -1 cm -2 ) Na Mg K Ca Metal removal efficiency 80% 60% 40% 20% b. Typical flow rate at POU filteration Typical flow rate at Bulk filtration 0% 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Flow rate per unit filtration area (g min -1 cm -2 ) Fe Co Cr Ni a.: Li, Na, Mg, K Ca, b: Mn, Fe, Co, Cr Ni. 2 Unfiltered, 10ppb metal spiked solvent Filtered, N66, 0.1 ml min. -1 cm -2 Filtered, N66, 0.3mL min. -1 cm -2 Filtered, N66, 0.5mL min. -1 cm -2 9 PALL NEWS vol.126 November 2017
Filtered, HDPE, 0.1mL min. -1 cm -2 Filtered, HDPE, 0.3mL min. -1 cm -2 Filtered, HDPE, 0.5mL min. -1 cm -2 Unfiltered, 10ppb metal spiked solvent Filtered, N66, 0.1mL min. -1 cm -2 Filtered, N66, 0.3mL min. -1 cm -2 Filtered, N66, 0.5mL min. -1 cm -2 Filtered, HDPE, 0.1mL min. -1 cm -2 Filtered, HDPE, 0.5mL min. -1 cm -2 Filtered, HDPE, 0.3mL min. -1 cm -2 10 PALL NEWS vol.126 November 2017
[1] Kimura, Y., Hattori, N. and Mashiko, Y., Influence of Very-small-quantity Metal Contamination(Ca,Mg,Zn) on Device Yield, Proc. ISSM 2002, pp.57-60 (2002). [2] Hagiwara, T., et al, Study on Cone-defects during the Pattern Fabrication Process with Silicon Nitride, Journal of photopolymer science and technology 28(1), pp.17-24 (2015). Johokiko (Ed), Optimum selection and effectiveness improvement of filtration process, Johokiko, pp.456-464 (2010). [3] Capitanio, D., Mizuno, Y., and Leeca, J., Metal Ion Removal from Photoresist Solvents, Proc. SPIE 3678 (1999). [4] Buszewski, B. and Noga, S., Hydrophilic interaction liquid chromatography (HILIC)-a powerful separation technique, Anal. Bioanal. Chem., 402, 231-247 (2012). [5] Alpert, J., A., Hydrophilic-interaction chromatography for the separation of peptides, nucleic acids and other polar compounds, J. Chromatogr., 499, 177-196 (1990). TEL.03-6901-5700 11 PALL NEWS vol.126 November 2017
MF / 316L *1 3 *2 6 1 2 TEL.03-6386-0993 12 PALL NEWS vol.126 November 2017
GMP NEW XRS25 2 25 L ph DO cgmp Pall Link SCADA mpath cgmp 18 30 ml -1 2.50E+07 2.00E+07 1.50E+07 1.00E+07 5.00E+06 0.00E+00 0 50 100 150 200 250 300 350 400 XRS 25 100% 90% 80% 70% 60% 50% 40% 30% 20% 10% 0% XRS25 CHO 13 PALL NEWS vol.126 November 2017
NEW k La XRS25 STR STR 200 L 1000 L 2000 L TEL.03-6386-0995 14 PALL NEWS vol.126 November 2017
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