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1 1 2 2 3 3 RBS 3 K-factor 3 5 8 Bragg 15 ERDA 21 ERDA 21 ERDA 21 31 31 33 RUMP 38 42 42 42 42 42 42 4 45 45 Ti 45 Ti 61 Ti 63 Ti 67 Ti 84 i

Ti 86 V 90 V 99 V 101 V 105 V 114 V 116 121 Ti 121 Ti 123 V 124 V 126 129 130 131 ii

1 V( ) Ti( ) Ti( ) Ti( ) V( ) V( ) 1

2 Ti( ) Ti( ) V( ) V( ) 2

3 RBS K-factor RBS He + He He 3-1 3-1 SSD MCA SSD He 3-1 RBS 3-1RBS - 3 -

3-2 K-factor 3-2 m 1 v 0 x E v 1 E 0 v 2 1 2 1 2 1 2 mv 1 0 = mv 1 1 + mv 2 2 3-1 2 2 2 m1v0=m1v1cos m2v2 cos 3-2 0=m1v1sin m2v2sin 3-3 1 2 1 2 E 0 = m1v0, E1 = m1v1 2 2 E E kinematic factor K E 1 K = 1-4 E 0 K = E E 1 0 2 m1 cosθ + m2 m = ( m1 + m2) 2 1 sin 2 θ 2 1-5 - 4 -

RBS 3-5 K 3-3 Si K p m = p m i ) K m ( i K E = p K ) m K m 0 i( m i E0 K m 3-3RBS RBS - 5 -

RBS 3-4 P 3-4 x b x b x b b b b b sin - 6 -

3-5 P b b b 3-3-6 dσ σ b b φ b db = dω lim = Ω lim = sin Ω 0 Ω 0 θ θ φ sin θ dθ 3-7 db/d ( 90) ZZ MM E CGS 2 2 2 2 2 dσ Z { 1 ( 1 2 ) sin θ cosθ } 1Z 2e 4 M M + = dω 4 4E sin θ 1 ( M M MKS 2 2 2 2 2 dσ Z { 1 ( 1 2 ) sin θ cosθ } 1Z 2q 4 M M + = 4 dω 16πε 0 E sin θ 1 ( M M 1 1 2 2 ) ) 2 2 sin sin 2 2 θ θ 3-8 3-9 - 7 -

3-4 P 3-5 dσ σ = Ω 3-10 dω θ j dσ ν = j 0 Ω 3-11 dω θ S n t dσ ν 0 = nj 0 t Ω 3-12 dω θ 3-12 S N N N n n Nτ= 3-13 S Q Q=S jt 3-14 3-12 ν = N τ dσ 0 dω QΩ 3-15 x E E dedx E de lim ( E) 3-16 x 0 x dx - 8 -

E x E x de E( x) = E0 dx 3-17 0 dx dedx E dx dx = de ( E) de 3-18 x = E E 0 de dx 1 de 3-19 dedx dedx de de = const = 3-20 dx dx E 0 de de = const = 3-21 dx dx E 0 + E 1 x = ( E0 E) 3-22 de dx E0 2 de E = E0 x 3-23 dx E0 dedx dedx t E E dedx Et dedx N - 9 -

N dedx dedx x E = de x 3-24 dx E x N x N x x E E N x E N x ε= E 1 = N x N de dx 3-25 3-25 N dedx 1913 2 π ε = 4 4 2 2 Z1 Z2e Mv e ln ( I = 10Z ) 2 2 3-26 mv I e ZZ me v Bragg ε AmBn = mε A + nε B 3-27 N - 10 -

3-6 E 0 E 3-6 E x E E xcos E = x E 0 cosθ 1 de dx ( E ) 0 3-28 KE x de E KE dx KE KE x de dx KE 1 = ( ) ( 0) 3-29 cosθ2 cosθ2 KE 0 K de 1 de E1 = ( E0 ) + ( KE0 ) x 3-30 cosθ1 dx cosθ 2 dx 3-30 K E KE 3-30 E KE E = 1 S ] x 3-31 0 [ 0-11 -

S S K de 1 de S 0 ] ( E0 ) + ( KE ) cosθ1 dx cosθ 2 dx [ 0 3-32 ε 3-25 E = ε ] Nx 3-33 [ 0 ε stopping cross section factor K 1 ε 0 ] ε( E0 ) + ε( KE ) cosθ1 cosθ 2 [ 0 3-34 N MCA xi xi i i i i H i 3-15 Hi d d Ei Ni Ei xi xi d Ei - 12 -

3-7 (a) (b) RBS >0 i i/cos Hi H i dσ ΩQNτ = ( Ei) dω cosθ 1 i 3-35 3-35 xi Ei MCA i 3-7 E H 3-35 dσ ΩQNτ H0 = ( E0) dω cosθ1 0 3-36 KEKE 3-333-34 ξ Nτ0 = 3-37 [ ε ] 0 3-363-37 N - 13 -

H dσ ΩQξ = ( E ) 3-38 dω [ ε ]cos θ 0 0 0 1 3-8 x i (a) (b) RBS 3- xi xi Ni 3-37 ξ ε( KEi ) Nτ i = 3-39 ε ( E )] ε( E ) [ 0 i 1, i Ei xi E 1,i MCA εkei εe 1,i - 14 -

KEi E 1,i 3-39 3-37 xi Hi H i dσ ΩQξ ε( KEi ) = ( Ei) dω [ ε ( E )] cos θ ε( E ) 0 i 1 1, i 3-40 xi Bragg 2 AB AB - 15 -

3-9 (a) (b) RBS 3-9(a) 3-9(b) A B 2 kinematic factor K A B E HEHE E H E ) = H ( E ) + H ( E ) 3-41 ( i A i B i A B 1-36 H A,0 ΩQN τ AB A A,0 = σ A( E0) cosθ1 3-42 AB ΩQN B τ B, 0 HB, 0 = σ B( E0) 3-43 cosθ1 AB N N AB AB A A B B τa, B, A B - 16 -

A B σeσe A, B, 3-37 N AB N τ A, 0 AB B,0 ξ = 3-44 [ ε ] AB 0 A ξ τ = 3-45 [ ε 0 ] AB B [ ε 0 ] N AB AB AB [ ε 0 ] B AB,, A B AB AB AB N = mn N AB B H AB = nn 3-423-43 A ΩQmξ, 0 = σ A( E0) [ ] AB ε cos θ 0 A 1 3-46 ΩQnξ HB, 0 = σ B( E0) 3-47 [ ] AB ε0 B cos θ1 H A, 0 σ A ( E0) m [ ε0] = HB, 0 σ B ( E0) n [ ε0] [ ε ] 0 B [ ε ] m n 0 H = H AB AB A σ σ AB B AB A 3-48 1 ( E ) ( E ) A, 0 A 0 B, 0 B 0 3-49 3-49 AB AB mn 3-593-60 [ ε 0 ] [ ε 0 ] 3-48 mn A B A AB A - 17 -

3-423-43 3-35 H AB ΩQN A τ = σ ( E ) cosθ Ai, A i 1 Ai, 3-50 H B, i ΩQN τ AB B B, i = σ B( Ei ) cosθ1 3-51 1-441-45 3-39 N AB τ Ai, ξ = [ ε ( E )] ε ε AB ( KAEi) ( E ) AB AB 0 i A 1Ai, 3-52 AB AB ξ ε ( KBEi) N τ Bi, = 3-53 AB AB [ ε0( Ei)] B ε ( E1Bi, ) H H = σ AB ΩQmξ ε ( KAEi) ( E ) [ ( AB AB ε0 Ei )] A cos θ1 ε ( E1Ai, ) = σ AB ΩQnξ ε ( KBEi) ( E ) [ ( AB AB ε E )] cos θ ε ( E ) Ai, A i Bi, B i 0 i B 1 1Bi, 3-54 3-55 (3-46)(3-47) (3-54)(3-55) 3-102 - 18 -

(3-44)(3-45) (3-52)(3-53) AB AB 3-10 E,A E,B A B AmBn A B mn x E in E in AB = N ε AmBn in x cosθ 1 3-56 N AB AB E out kinematic factor x E A B E E AB AB E = [ ε] N x 3-57 A B A AB AB E = [ ε] N x 3-58 B [] [] AB A B 3-33 (3-34 AB K A AB 1 AB [ ε ] A = εin + ε out, A 3-59 cosθ1 cosθ 2 AB KB AB 1 AB [ ε ] B = εin + ε out, B 3-60 cosθ1 cosθ 2 in E 0 out E 0 A B K A E 0 K B E 0 3-593-60-19 -

[ ε ] 0 [ ε ] 0 K ( ) ( ) cosθ ε 1 = E cosθ ε 0 + KAE0 3-61 2 AB A AB AB A 1 K ( ) ( ) cosθ ε 1 = E cosθ ε 0 + KBE0 3-62 2 AB B AB AB B 1 3-573-58 x AB Bragg ε + AB A B = mε nε 3-63 mn x 3-573-58 x t t E in = E 0 t cosθ 1 de dx ( E ) 0 = E 0 t cosθ 1 N AB ε AB ( E ) 3-64 0 E in 3-61 3-62 E 0-20 -

ERDA ERDA Elastic Recoil Detection Analysis He + 3-11 ERDA ERDA 3-11 3-11 ERDA ERDA ERDA Au/SiTiO 2 SiC 3-12 ERDA Au/Si - 21 -

Energy (MeV) 0 1 2 3 4 25 20 Normalized Yield 15 10 5 Au 0 0 200 400 600 800 1000 Channel 3-12ERDA Au/si Au TiO 2 SiC 3-13 3-13 - 22 -

Econv XRUMP OMEGA FWHM( ) Econv XRUMP OMEGA FWHM( ) 60 Energy (MeV) 0.6 0.8 1.0 50 Normalized Yield 40 30 20 10 0 200 300 400 500 600 Channel 3-14ERDA OMEGA FWHM 3-14 OMEGA FWHM( ) ERDA Mev 2 dσ Z1Z2e 2 M1 2 1 ( ) ϕ = ( ) ( + 1) 3 dω 2E0 M 2 cos ϕ E 0 MeV e 2 1.439810-13 MeVcm (d /d) cm 2 Tirira - 23 -

dσ In H ( EHe, φ) 1 2 = A1 EHe + A2 + A3 EHe + A4 EHe dω A1A4 3-1 (deg) A 1 A 2 A 3 A 4 0 0.7651 1.7201 5.6116-1.7011 5 0.7581 1.7321 5.6302-1.7148 10 0.7366 1.7716 5.6797-1.7527 15 0.6994 1.8492 5.7417-1.8049 20 0.6449 1.9807 5.7890-1.8568 25 0.5732 2.1840 5.7880-1.8906 30 0.4779 2.4758 5.7117-1.8897 35 0.3651 2.8682 5.5349-1.8408 40 0.2349 3.3687 5.2445-1.7350 3-1 20 3-15 3-15Tirira Rutherford - 24 -

XRUMP XRUMP XSECT E2COF XRUMP XSECT E2COF 2 dσ E2COF = XSECT + 2 dω E XRUMP b[ ] b[ ]0.1602 XRUMP Tirira XRUMP XSECT E2COF Trira Mev Mev 3-2 0.81.52Mev 1.53Mev - 25 -

15 20 25 0.373875 0.396287 0.429319 0.360083 0.380799 0.411465 0.347847 0.366997 0.395482 0.336996 0.354692 0.381162 0.327379 0.343722 0.368323 0.318865 0.333944 0.356805 0.31134 0.325234 0.34647 0.304706 0.317484 0.337196 0.298878 0.310599 0.328877 0.29378 0.304497 0.321419 0.289347 0.299107 0.314741 0.285521 0.294363 0.308771 0.282254 0.290213 0.303446 0.279502 0.286605 0.29871 0.277225 0.283499 0.294515 0.275391 0.280855 0.290817 0.27397 0.278641 0.287577 0.272937 0.276828 0.284762 0.272267 0.275388 0.282342 0.271942 0.274301 0.280289 0.271944 0.273544 0.27858 0.272257 0.2731 0.277193 0.272868 0.272954 0.27611 0.273766 0.273091 0.275314 0.274939 0.273499 0.274789 0.27638 0.274167 0.274522 0.27808 0.275086 0.274501 0.280034 0.276246 0.274716 0.282236 0.277642 0.275156 0.284681 0.279266 0.275814 0.287366 0.281113 0.276681-26 -

1 2 ( ) 0. 1602 15 XSECT E2COF 3-16 3-16 15 XSECT 1.4603E2COF 1.6683 XSECT E2COF XSECTE2COF/ Trira XRUMP 3-17 3-17Trira XRUMP 15-27 -

2.3Mev XRUMP XRUMP 2.3Mev ERDA 1.5Mev2.3Mev XSECT E2COF 1 3-2 1.5Mev2.3Mev 2 ( ) XSECT 0. 1602 E2COF 3-18 3-19 3-20 3-18 15 3-19 20-28 -

3-20 25 XSECT 1.2077 E2COF 2.4534 20 XSECT 1.1592E2COF 2.8849 25 XSECT 1.1085E2COF 3.4715 XSECT E2COF XSECTE2COF/E 2 Tirira XRUMP 3-21 3-22 3-23 3-21Trira XRUMP 15-29 -

3-22Trira XRUMP 20 3-23Trira XRUMP 25 3-21 3-22 3-23 Tirira XRUMP 2-30 -

Li 3-24 A154 3-24 He Li Li He He - 31 -

He He He 3-25 3-25 He - 32 -

N 2 N 2 IN N 2 N 2 kgf/cm 2 T/C T/C LV-TC T/C LV-TC CLOSE O T/C T/C N 2 N 2 L/EH/E - 33 -

ON ON ALi 650 10 A 1.000MV ON 428DETECTORBIASSUPPLY OFF POS ON NT2400 NT2400 ON NT2400 MENUPF1 EXTCLOCK ENTRYENT INT EXT ENTPF4 MENUPF1 Main Menu WindowsNT LOGIN kutele RBS Datetake Network-NT2400ON He + 80 He 2+ 90 I/S A I/S 1.5A 2.0A 90.0V V I/S V ON I/S V ON I/S V ON Y I/S V ON GV-L OPEN - 34 -

12.40A ON L/EH/E 0.0004A LE xy k ON LE k ON Q 62 48 ON OUT Y HE 0.3k ON GV-LGV-R OPEN He + 15AHe + 10A ON 428 SSD CCD Datetake Gonio Move c: users data - 35 -

Datatake Takedata ERDA/2SSDERDA/ Tilt 5.0 0.0 360.0 1.0/Step 20000nC Tilt 20000nC SSD SSD 169.4 Au10 MevHe + c: users data watarabo jikken3 428 SSD - 36 -

428 SSD Li 250 Li OFF OFF L/HH/E OFF Datatake GonioMove GonioStatus DatatakeNetworkNT2400OFF Datatake WindowsNT OFF 428DETECTOR BIAS SUPPLY POSOFF NT2400 STOP OFF NT2400 OFF - 37 -

RUMP XRUMP 3-26 25 Energy (MeV) 0.4 0.6 0.8 1.0 1.2 20 Normalized Yield 15 10 5 0 100 200 300 400 500 600 Channel 3-26 3-3 - 38 -

========================================================== Beam: 1.998 MeV 4He+ 1.00 ucoul @ 0.00 na Geometry: General Theta: 80.00 Phi: 10.60 Psi: 69.40 MCA: Econv: 1.909 77.532 First chan: 0.0 NPT: 1024 Detector: FWHM: 80.0 kev Tau: 5.0 Omega: 2.000 Correction: 1.1600 # Thickness Sublayers Composition... 1 2000.00 KAP auto C 22.000 H 10.000 N 2.000 O 5.000 3-3XRUMP 1.998Mev He 3-3 BEAM 2.000msr 3-3 Omega 10.6 3-3 Phi 69.4 3-3 Psi 80 3-3 Theta 0ch1024ch 3-3 NPT C 22 H 10 N 2 O 5 RUMP 3-3 1 2000KAPKAP KAP C22.0 H10.0N2.0O5.0 3-27 - 39 -

25 Energy (MeV) 0.4 0.6 0.8 1.0 1.2 20 Normalized Yield 15 10 5 0 100 200 300 400 500 600 Channel 3-27 3-4 1 8000KAP KAP KAP C22.0 H10.0 N2.0 O5.0 Ag0.050 3-28 - 40 -

========================================================== Beam: 1.998 MeV 4He+ 1.00 ucoul @ 0.00 na Geometry: General Theta: 80.00 Phi: 10.60 Psi: 69.40 MCA: Econv: 1.909 77.532 First chan: 0.0 NPT: 1024 Detector: FWHM: 80.0 kev Tau: 5.0 Omega: 2.000 Correction: 1.1600 # Thickness Sublayers Composition... 1 8000.00 KAP auto C 22.000 H 10.000 N 2.000 O 5.000 Ag 0.050 3-4XRUMP 25 Energy (MeV) 0.4 0.6 0.8 1.0 1.2 20 Normalized Yield 15 10 5 0 100 200 300 400 500 600 Channel 3-28 - 41 -

He + 1.995MeV 169.4 He + 1.995MeV 3-29 3-29 3-29 Ti( )V( ) - 42 -

(mv) 3-4 3-4 (mv) SLIDETRANS( ) SLIDETRANS( )INPUT 3-30 SLIDETRANS( ) 3-31 3-30 3-31 SLIDETRANS( ) - 43 -

3-29 3-32 3-32 3-29 SLIDETRANS( ) SLIDETRANS( ) SLIDETRANS( ) - 44 -

4-1-1 3-4 Ti Ti Ti V V 4-1-1 Ti 0,135,250,370,440 Ti 0,120,250,370,470 V 0,115,250 V0,120,250 Ti 4-1- step 4-1-2 Ti kpa W sccm 0.6 0 40 1.6 600 40 2.7 600 100 5.3 800 150 6.7 1000 200 8.0 1800 300 10 Ti 4-2-1 Ti RBS 4-2-2 ERDA RBS 4-2-1 ERDA 4-2-2 45

4-2-1 Ti 4-2-2 Ti 46

4-2-1 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 45.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.500 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.028 C 0.400 Au 0.006 2 300.00 A auto Ti 1.000 H 0.020 C 0.400 3 600.00 A auto Ti 1.000 H 0.010 C 0.180 4 500.00 A auto Ti 1.000 H 0.006 C 0.200 5 1200.00 A auto Ti 1.000 H 0.005 C 0.160 6 2500.00 A auto Ti 1.000 C 0.100 7 10000.00 A auto Ti 1.000 4-2-2 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.754 45.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 50.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.028 C 0.400 Au 0.006 3 300.00 A auto Ti 1.000 H 0.020 C 0.400 4 600.00 A auto Ti 1.000 H 0.010 47

C 0.180 5 500.00 A auto Ti 1.000 H 0.006 C 0.200 6 1200.00 A auto Ti 1.000 H 0.005 C 0.160 7 2500.00 A auto Ti 1.000 C 0.100 8 10000.00 A auto Ti 1.000 [at%] 4-2-3 4-2-3 Ti 4-2-4 Ti 135 RBS 4-2-5 ERDA RBS 4-2-3 ERDA 4-2-4 48

4-2-4 Ti 135 4-2-5 Ti 135 49

4-2-3 135 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 45.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.500 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.040 C 0.400 Au 0.006 2 300.00 A auto Ti 1.000 H 0.025 C 0.400 3 600.00 A auto Ti 1.000 H 0.014 C 0.180 4 500.00 A auto Ti 1.000 H 0.010 C 0.200 5 1200.00 A auto Ti 1.000 H 0.008 C 0.160 6 2500.00 A auto Ti 1.000 C 0.100 7 10000.00 A auto Ti 1.000 4-2-4 135 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.754 43.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 50.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.040 C 0.400 Au 0.006 3 300.00 A auto Ti 1.000 H 0.025 C 0.400 4 600.00 A auto Ti 1.000 H 0.014 50

C 0.180 5 500.00 A auto Ti 1.000 H 0.010 C 0.200 6 1200.00 A auto Ti 1.000 H 0.008 C 0.160 7 2500.00 A auto Ti 1.000 C 0.100 8 10000.00 A auto Ti 1.000 [at%] 4-2-6 4-2-6 135 Ti 4-2-7 Ti 250 RBS 4-2-8 ERDA RBS 4-2-5 ERDA 4-2-6 51

4-2-7 Ti 250 4-2-8 Ti 250 52

4-2-5 250 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 67.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.530 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.044 C 0.400 Au 0.006 2 300.00 A auto Ti 1.000 H 0.029 C 0.400 3 600.00 A auto Ti 1.000 H 0.015 C 0.180 4 500.00 A auto Ti 1.000 H 0.010 C 0.200 5 1200.00 A auto Ti 1.000 H 0.008 C 0.160 6 2500.00 A auto Ti 1.000 C 0.100 7 10000.00 A auto Ti 1.000 4-2-6 250 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.754 43.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 50.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.044 C 0.400 Au 0.006 3 300.00 A auto Ti 1.000 H 0.029 C 0.400 4 600.00 A auto Ti 1.000 H 0.015 53

C 0.180 5 500.00 A auto Ti 1.000 H 0.010 C 0.200 6 1200.00 A auto Ti 1.000 H 0.008 C 0.160 7 2500.00 A auto Ti 1.000 C 0.100 8 10000.00 A auto Ti 1.000 [at%] 4-2-9 4-2-9 250 Ti 4-2-10 Ti 370 RBS 4-2-11 ERDA RBS 4-2-7 ERDA 4-2-8 54

4-2-10 Ti 370 4-2-11 Ti 370 55

4-2-7 370 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 72.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.550 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.057 C 0.400 Au 0.006 2 300.00 A auto Ti 1.000 H 0.050 C 0.400 3 600.00 A auto Ti 1.000 H 0.026 C 0.180 4 500.00 A auto Ti 1.000 H 0.019 C 0.200 5 1200.00 A auto Ti 1.000 H 0.020 C 0.160 6 2500.00 A auto Ti 1.000 C 0.100 7 10000.00 A auto Ti 1.000 4-2-8 370 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.754 34.550 First chan: 0.0 NPT: 1024 Detector: FWHM: 50.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.057 C 0.400 Au 0.006 3 300.00 A auto Ti 1.000 H 0.050 C 0.400 4 600.00 A auto Ti 1.000 H 0.026 56

C 0.180 5 500.00 A auto Ti 1.000 H 0.019 C 0.200 6 1200.00 A auto Ti 1.000 H 0.020 C 0.160 7 2500.00 A auto Ti 1.000 C 0.100 8 10000.00 A auto Ti 1.000 [at%] 4-2-12 4-2-12 370 Ti 4-2-13 Ti 440 RBS 4-2-14 ERDA RBS 4-2-9 ERDA 4-2-10 57

4-2-13 Ti 440 4-2-14 Ti 440 58

4-2-9 440 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 75.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.560 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.078 C 0.400 Au 0.006 2 300.00 A auto Ti 1.000 H 0.066 C 0.400 3 600.00 A auto Ti 1.000 H 0.042 C 0.180 4 500.00 A auto Ti 1.000 H 0.031 C 0.200 5 1200.00 A auto Ti 1.000 H 0.030 C 0.160 6 2500.00 A auto Ti 1.000 C 0.100 7 10000.00 A auto Ti 1.000 4-2-10 440 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.754 23.550 First chan: 0.0 NPT: 1024 Detector: FWHM: 50.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.078 C 0.400 Au 0.006 3 300.00 A auto Ti 1.000 H 0.066 C 0.400 4 600.00 A auto Ti 1.000 H 0.042 59

C 0.180 5 500.00 A auto Ti 1.000 H 0.031 C 0.200 6 1200.00 A auto Ti 1.000 H 0.030 C 0.160 7 2500.00 A auto Ti 1.000 C 0.100 8 10000.00 A auto Ti 1.000 [at%] 4-2-15 4-2-15 440 Ti 60

Ti Ti 4-2-16 ( Ti ) 4-2-17 4-2-18 4-2-16 Ti 61

4-2-17 Ti 4-2-18 Ti 62

Ti 4-2-16 4-2-17 4-2-18 Ti 4-2-19 Ti RBS 4-2-20 ERDA RBS 4-2-11 ERDA 4-2-12 50 Energy (MeV) 1.0 1.2 1.4 1.6 40 Normalized Yield 30 20 10 0 400 500 600 700 800 Channel 4-2-19 Ti 63

3.5 Energy (MeV) 0.6 0.8 1.0 Normalized Yield 3.0 2.5 2.0 1.5 1.0 0.5 0.0 200 300 400 500 600 Channel 4-2-20 Ti 4-2-11 ========================================================== Beam: 1.998 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 0.00 MCA: Econv: 1.850 148.480 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.45 Correction: 1.0000 # Thickness Sublayers Composition... 1 200.00 A auto Ti 0.010 H 0.010 C 0.980 2 300.00 A auto Ti 0.555 H 0.045 C 0.399 Au 0.001 3 300.00 A auto Ti 0.700 H 0.072 C 0.227 Au 0.001 4 600.00 A auto Ti 0.740 H 0.050 C 0.209 Au 0.001 5 500.00 A auto Ti 0.733 H 0.037 C 0.229 Au 0.001 6 1200.00 A auto Ti 0.818 H 0.038 C 0.143 Au 0.001 64

7 2500.00 A auto Ti 0.900 C 0.099 Au 0.001 8 10000.00 A auto Ti 0.975 Au 0.025 4-2-12 ========================================================== Beam: 1.998 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: General Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.869 63.481 First chan: 0.0 NPT: 1024 Detector: FWHM: 55.0 kev Tau: 5.0 Omega: 2.300 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 200.00 A auto Ti 0.010 H 0.010 C 0.980 3 300.00 A auto Ti 0.555 H 0.045 C 0.399 Au 0.001 4 300.00 A auto Ti 0.700 H 0.072 C 0.227 Au 0.001 5 600.00 A auto Ti 0.740 H 0.050 C 0.209 Au 0.001 6 500.00 A auto Ti 0.733 H 0.037 C 0.229 Au 0.001 7 1200.00 A auto Ti 0.818 H 0.038 C 0.143 Au 0.001 8 2500.00 A auto Ti 0.900 C 0.099 Au 0.001 9 10000.00 A auto Ti 0.975 Au 0.025 ( Ti ) 4-2-21 4-2-22 65

4-2-21 Ti 4-2-22 Ti 66

4-2-21 4-2-22 Ti 4-3-1 Ti RBS 4-3-2 ERDA RBS 4-3-1 ERDA 4-3-2 4-3-1 Ti 67

4-3-2 Ti 4-3-1 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 42.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.480 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.012 C 0.200 Au 0.006 2 450.00 A auto Ti 1.000 H 0.004 C 0.750 3 600.00 A auto Ti 1.000 H 0.002 C 0.350 4 1100.00 A auto Ti 1.000 H 0.002 C 0.220 5 300.00 A auto Ti 1.000 H 0.001 C 0.180 68

5 500.00 A auto Ti 1.000 H 0.001 C 0.200 5 1200.00 A auto Ti 1.000 H 0.001 C 0.160 6 2500.00 A auto Ti 1.000 C 0.050 7 10000.00 A auto Ti 1.000 4-3-2 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.650 60.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.750 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.012 C 0.200 Au 0.006 3 450.00 A auto Ti 1.000 H 0.004 C 0.750 4 600.00 A auto Ti 1.000 H 0.002 C 0.350 5 1100.00 A auto Ti 1.000 H 0.002 C 0.220 6 300.00 A auto Ti 1.000 H 0.001 C 0.180 7 500.00 A auto Ti 1.000 H 0.001 C 0.200 8 1200.00 A auto Ti 1.000 H 0.001 C 0.160 9 2500.00 A auto Ti 1.000 C 0.050 10 10000.00 A auto Ti 1.000 69

[at%] 4-3-3 4-3-3 Ti 4-3-4 Ti 120 RBS 4-3-5 ERDA RBS 4-3-3 ERDA 4-3-4 70

4-3-4 Ti 120 4-3-5 Ti 120 71

4-3-3 120 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.650 105.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 70.0 kev Tau: 5 Omega: 1.450 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.011 C 0.200 Au 0.006 2 450.00 A auto Ti 1.000 H 0.004 C 0.750 3 600.00 A auto Ti 1.000 H 0.002 C 0.350 4 1100.00 A auto Ti 1.000 H 0.002 C 0.220 5 300.00 A auto Ti 1.000 H 0.001 C 0.180 5 500.00 A auto Ti 1.000 H 0.001 C 0.200 5 1200.00 A auto Ti 1.000 H 0.001 C 0.160 6 2500.00 A auto Ti 1.000 C 0.050 7 10000.00 A auto Ti 1.000 4-3-4 120 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.650 53.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.011 72

C 0.200 Au 0.006 3 450.00 A auto Ti 1.000 H 0.004 C 0.750 4 600.00 A auto Ti 1.000 H 0.002 C 0.350 5 1100.00 A auto Ti 1.000 H 0.002 C 0.220 6 300.00 A auto Ti 1.000 H 0.001 C 0.180 7 500.00 A auto Ti 1.000 H 0.001 C 0.200 8 1200.00 A auto Ti 1.000 H 0.001 C 0.160 9 2500.00 A auto Ti 1.000 C 0.050 10 10000.00 A auto Ti 1.000 [at%] 4-3-6 73

4-3-6 120 Ti 4-3- Ti 250 RBS 4-3-8 ERDA RBS 4-3-5 ERDA 4-3-6 4-3-7 Ti 250 74

4-3-8 Ti 250 4-3-5 250 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.650 92.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 45.0 kev Tau: 5 Omega: 1.730 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.019 C 0.200 Au 0.006 2 450.00 A auto Ti 1.000 H 0.005 C 0.750 3 600.00 A auto Ti 1.000 H 0.002 C 0.350 4 1100.00 A auto Ti 1.000 H 0.002 C 0.220 5 300.00 A auto Ti 1.000 H 0.001 75

C 0.180 5 500.00 A auto Ti 1.000 H 0.001 C 0.200 5 1200.00 A auto Ti 1.000 H 0.001 C 0.160 6 2500.00 A auto Ti 1.000 C 0.050 7 10000.00 A auto Ti 1.000 4-3-6 250 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.650 60.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.019 C 0.200 Au 0.006 3 450.00 A auto Ti 1.000 H 0.005 C 0.750 4 600.00 A auto Ti 1.000 H 0.002 C 0.350 5 1100.00 A auto Ti 1.000 H 0.002 C 0.220 6 300.00 A auto Ti 1.000 H 0.001 C 0.180 7 500.00 A auto Ti 1.000 H 0.001 C 0.200 8 1200.00 A auto Ti 1.000 H 0.001 C 0.160 9 2500.00 A auto Ti 1.000 C 0.050 10 10000.00 A auto Ti 1.000 76

[at%] 4-3-9 4-3-9 250 Ti 4-3-10 Ti 370 RBS 4-3-11 ERDA RBS 4-3-7 ERDA 4-3-8 77

4-3-10 Ti 370 4-3-11 Ti 370 78

4-3- 370 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.650 92.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 45.0 kev Tau: 5 Omega: 1.270 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.040 C 0.200 Au 0.006 2 450.00 A auto Ti 1.000 H 0.170 C 0.750 3 600.00 A auto Ti 1.000 H 0.180 C 0.350 4 1100.00 A auto Ti 1.000 H 0.160 C 0.220 5 300.00 A auto Ti 1.000 H 0.001 C 0.180 5 500.00 A auto Ti 1.000 H 0.001 C 0.200 5 1200.00 A auto Ti 1.000 H 0.001 C 0.160 6 2500.00 A auto Ti 1.000 C 0.050 7 10000.00 A auto Ti 1.000 4-3-8 370 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.650 60.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 50.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.040 79

C 0.200 Au 0.006 3 450.00 A auto Ti 1.000 H 0.170 C 0.750 4 600.00 A auto Ti 1.000 H 0.180 C 0.350 5 1100.00 A auto Ti 1.000 H 0.160 C 0.220 6 300.00 A auto Ti 1.000 H 0.001 C 0.180 7 500.00 A auto Ti 1.000 H 0.001 C 0.200 8 1200.00 A auto Ti 1.000 H 0.001 C 0.160 9 2500.00 A auto Ti 1.000 C 0.050 10 10000.00 A auto Ti 1.000 [at%] 4-3-12 80

4-3-12 370 Ti 4-3-13 Ti 470 RBS 4-3-14 ERDA RBS 4-3-9 ERDA 4-3-10 4-3-13 Ti 470 81

4-3-14 Ti 470 4-3-9 470 Ti ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.650 92.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 33.0 kev Tau: 5 Omega: 0.910 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 1.000 H 0.040 C 0.200 Au 0.006 2 450.00 A auto Ti 1.000 H 0.330 C 0.750 3 600.00 A auto Ti 1.000 H 0.450 C 0.350 4 1100.00 A auto Ti 1.000 H 0.430 C 0.220 5 300.00 A auto Ti 1.000 H 0.450 82

C 0.180 5 500.00 A auto Ti 1.000 H 0.470 C 0.200 5 1200.00 A auto Ti 1.000 H 0.001 C 0.160 6 2500.00 A auto Ti 1.000 C 0.050 7 10000.00 A auto Ti 1.000 4-3-10 470 Ti ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.650 40.600 First chan: 0.0 NPT: 1024 Detector: FWHM: 50.0 kev Tau: 5 Omega: 2.100 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto Ti 1.000 H 0.040 C 0.200 Au 0.006 3 450.00 A auto Ti 1.000 H 0.330 C 0.750 4 600.00 A auto Ti 1.000 H 0.450 C 0.350 5 1100.00 A auto Ti 1.000 H 0.430 C 0.220 6 300.00 A auto Ti 1.000 H 0.450 C 0.180 7 500.00 A auto Ti 1.000 H 0.470 C 0.200 8 1200.00 A auto Ti 1.000 H 0.001 C 0.160 9 2500.00 A auto Ti 1.000 C 0.050 10 10000.00 A auto Ti 1.000 83

[at%] 4-3-15 4-3-15 470 Ti Ti Ti 4-3-16 ( Ti ) 4-3-17 4-3-18 84

4-3-16 Ti 4-3-17 Ti 85

4-3-18 Ti Ti 4-3-16 4-43-17 4-3-18 Ti 4-3-19 Ti RBS 4-3-20 ERDA RBS 4-3-11 ERDA 4-3-12 86

50 Energy (MeV) 1.0 1.2 1.4 1.6 40 Normalized Yield 30 20 10 0 400 500 600 700 800 Channel 4-3-19 Ti 15 Energy (MeV) 0.6 0.8 1.0 1.2 1.4 Normalized Yield 10 5 0 200 300 400 500 600 700 800 Channel 4-3-20 Ti 87

4-3-11 ========================================================== Beam: 2.010 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 0.00 MCA: Econv: 1.850 148.480 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.45 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto Ti 0.645 H 0.045 C 0.309 Au0.001 2 550.00 A auto Ti 0.500 H 0.200 C 0.299 Au 0.001 3 600.00 A auto Ti 0.540 H 0.260 C 0.199 Au 0.001 4 500.00 A auto Ti 0.570 H 0.280 C 0.149 Au 0.001 5 1200.00 A auto Ti 0.600 H 0.300 C 0.099 Au 0.001 6 2700.00 A auto Ti 0.900 0.099 Au 0.001 7 10000.00 A auto Ti 0.990 Au0.010 4-3-12 ========================================================== Beam: 1.998 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: General Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.869 63.481 First chan: 0.0 NPT: 1024 Detector: FWHM: 55.0 kev Tau: 5.0 Omega: 2.300 Correction: 1.0000 # Thickness Sublayers Composition... 6.00 um auto Al 1.000 300.00 A auto Ti 0.645 H 0.045 C 0.309 Au0.001 550.00 A auto Ti 0.500 H 0.200 88

C 0.299 Au 0.001 600.00 A auto Ti 0.540 H 0.260 C 0.199 Au 0.001 500.00 A auto Ti 0.570 H 0.280 C 0.149 Au 0.001 1200.00 A auto Ti 0.600 H 0.300 C 0.099 Au 0.001 2700.00 A auto Ti 0.900 0.099 Au 0.001 10000.00 A auto Ti 0.990 Au0.010 ( Ti ) 4-3-21 4-3-22 4-3-21 Ti 89

4-3-22 Ti 4-3-21 4-3-22 V 4-4-1 V RBS 4-4-2 ERDA RBS 4-4-1 ERDA 4-4-2 90

4-4-1 V 4-4-2 V 91

4-4-1 V ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 42.100 First chan: 0.0 NPT: 1024 Detector: FWHM: 20.0 kev Tau: 5 Omega: 1.700 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto V 1.000 H 0.067 C 0.300 2 1300.00 A auto V 1.000 H 0.004 C 0.010 3 2000.00 A auto V 1.000 C 0.010 4 10000.00 A auto V 1.000 4-4-2 V ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.0 Psi: 80.00 MCA: Econv: 1.650 57.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 30.0 kev Tau: 5 Omega: 2.000 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto V 1.000 H 0.067 C 0.300 3 1300.00 A auto V 1.000 H 0.004 C 0.010 4 2000.00 A auto V 1.000 C 0.010 5 10000.00 A auto V 1.000 92

[at%] 4-4-3 4-4-3 V 4-4-4 V 115 RBS 4-4-5 ERDA RBS 4-4-3 ERDA 4-4-4 93

4-4-4 V 115 4-4-5 V 115 94

4-4-3 115 V ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 42.100 First chan: 0.0 NPT: 1024 Detector: FWHM: 20.0 kev Tau: 5 Omega: 1.700 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto V 1.000 H 0.058 C 0.300 2 1300.00 A auto V 1.000 H 0.004 C 0.010 3 2000.00 A auto V 1.000 C 0.010 4 10000.00 A auto V 1.000 4-4-4 115 V ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.0 Psi: 80.00 MCA: Econv: 1.650 57.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 30.0 kev Tau: 5 Omega: 2.000 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto V 1.000 H 0.058 C 0.300 3 1300.00 A auto V 1.000 H 0.004 C 0.010 4 2000.00 A auto V 1.000 C 0.010 5 10000.00 A auto V 1.000 95

[at%] 4-4-6 4-4-6 115 V 4-4-7 V 250 RBS 4-4-8 ERDA RBS 4-4-5 ERDA 4-4-6 96

4-4-7 V 250 4-4-8 V 250 97

4-4-5 250 V ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 42.100 First chan: 0.0 NPT: 1024 Detector: FWHM: 20.0 kev Tau: 5 Omega: 1.700 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto V 1.000 H 0.046 C 0.300 2 1300.00 A auto V 1.000 H 0.004 C 0.010 3 2000.00 A auto V 1.000 C 0.010 4 10000.00 A auto V 1.000 4-4-6 250 V ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.0 Psi: 80.00 MCA: Econv: 1.650 57.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 30.0 kev Tau: 5 Omega: 2.000 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto V 1.000 H 0.046 C 0.300 3 1300.00 A auto V 1.000 H 0.004 C 0.010 4 2000.00 A auto V 1.000 C 0.010 5 10000.00 A auto V 1.000 98

[at%] 4-4-9 4-4-9 250 V V V 4-4-10 ( ) 4-4-11 4-4-12 99

4-4-10 V 4-4-11 V 100

4-4-12 V V 4-2-10 4-2-11 4-2-12 V 4-4-13 V RBS 4-4-14 ERDA RBS 4-4-7 ERDA 4-4-8 101

50 Energy (MeV) 1.0 1.2 1.4 1.6 40 Normalized Yield 30 20 10 0 400 500 600 700 800 Channel 4-4-13 V Energy (MeV) 0.6 0.8 1.0 2.5 2.0 Normalized Yield 1.5 1.0 0.5 0.0 200 300 400 500 600 Channel 4-4-14 V ERDA 102

4-4-7 V ========================================================== Beam: 2.010 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 0.00 MCA: Econv: 1.850 148.480 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.45 Correction: 1.0000 # Thickness Sublayers Composition... 1 300.00 A auto 0.710 H 0.058 C 0.230 Au0.002 2 1300.00 A auto 0.795 H 0.004 C 0.200 Au 0.001 3 2000.00 A auto 0.790 0.209 Au 0.001 4 10000.00 A auto 0.970 Au 0.030 4-4-8 V ERDA ========================================================== Beam: 1.999 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: General Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.869 63.481 First chan: 0.0 NPT: 1024 Detector: FWHM: 55.0 kev Tau: 5.0 Omega: 2.300 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 300.00 A auto 0.710 H 0.058 C 0.230 Au0.002 3 1300.00 A auto 0.795 H 0.004 C 0.200 Au 0.001 4 2000.00 A auto 0.790 0.209 Au 0.001 5 10000.00 A auto 0.970 Au 0.030 103

( V ) 4-4-15 4-4-16 4-4-15 V 4-4-16 V 104

4-4-15 4-4-16 V 4-5-1 V RBS 4-5-2 ERDA RBS 4-5-1 ERDA 4-5-2 4-5-1 V 105

4-5-2 V 4-5-1 V ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 46.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 20.0 kev Tau: 5 Omega: 1.650 Correction: 1.0000 # Thickness Sublayers Composition... 1 230.00 A auto V 1.000 H 0.068 C 0.730 2 670.00 A auto V 1.000 H 0.019 C 0.330 3 1000.00 A auto V 1.000 H 0.019 C 0.025 4 2100.00 A auto V 1.000 C 0.015 5 5000.00 A auto V 1.000 C 0.008 6 10000.00 A auto V 1.000 106

4-5-2 V ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.650 63.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 30.0 kev Tau: 5 Omega: 2.000 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 230.00 A auto V 1.000 H 0.068 C 0.730 3 670.00 A auto V 1.000 H 0.019 C 0.330 4 1000.00 A auto V 1.000 H 0.019 C 0.025 5 2100.00 A auto V 1.000 C 0.015 6 5000.00 A auto V 1.000 C 0.008 7 10000.00 A auto V 1.000 [at%] 4-5-3 107

4-5-3 V 4-5-4 V 120 RBS 4-5-5 ERDA RBS 4-5-3 ERDA 4-5-4 108

4-5-4 V 120 4-5-5 V 120 109

4-5-3 120 V ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 42.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 20.0 kev Tau: 5 Omega: 1.650 Correction: 1.0000 # Thickness Sublayers Composition... 1 230.00 A auto V 1.000 H 0.068 C 0.730 2 670.00 A auto V 1.000 H 0.022 C 0.330 3 1000.00 A auto V 1.000 H 0.022 C 0.025 4 2100.00 A auto V 1.000 C 0.015 5 5000.00 A auto V 1.000 C 0.008 6 10000.00 A auto V 1.000 4-5-4 120 V ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.650 60.000 First chan: 0.0 NPT: 1024 Detector: FWHM: 30.0 kev Tau: 5 Omega: 2.000 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 230.00 A auto V 1.000 H 0.068 C 0.730 3 670.00 A auto V 1.000 H 0.022 C 0.330 4 1000.00 A auto V 1.000 H 0.022 C 0.025 5 2100.00 A auto V 1.000 C 0.015 6 5000.00 A auto V 1.000 C 0.008 7 10000.00 A auto V 1.000 110

[at%] 4-5-6 4-5-6 120 V 4-5-7 V 250 RBS 4-5-8 ERDA RBS 4-5-5 ERDA 4-5-6 111

4-5-7 V 250 4-5-8 V 250 112

4-5-5 250 V ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 10.60 MCA: Econv: 1.820 42.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 28.0 kev Tau: 5 Omega: 1.650 Correction: 1.0000 # Thickness Sublayers Composition... 1 230.00 A auto V 1.000 H 0.105 C 0.730 2 670.00 A auto V 1.000 H 0.029 C 0.330 3 1000.00 A auto V 1.000 H 0.023 C 0.025 4 2100.00 A auto V 1.000 C 0.015 5 5000.00 A auto V 1.000 C 0.008 6 10000.00 A auto V 1.000 4-5-6 250 V ERDA ========================================================== Beam: 1.995 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.650 63.500 First chan: 0.0 NPT: 1024 Detector: FWHM: 50.0 kev Tau: 5 Omega: 2.000 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 230.00 A auto V 1.000 H 0.105 C 0.730 3 670.00 A auto V 1.000 H 0.029 C 0.330 4 1000.00 A auto V 1.000 H 0.023 C 0.025 5 2100.00 A auto V 1.000 C 0.015 6 5000.00 A auto V 1.000 C 0.008 7 10000.00 A auto V 1.000 113

[at%] 4-5-9 4-5-9 250 V V V 4-5-10 ( ) 4-5-11 4-5-12 114

4-5-10 V 4-5-11 V 115

4-5-12 V V 4-5-10 4-5-11 4-5-12 V 4-5-13 RBS 4-5-14 ERDA RBS 4-5-7 ERDA 4-5-8 116

50 Energy (MeV) 1.0 1.2 1.4 1.6 40 Normalized Yield 30 20 10 0 400 500 600 700 800 Channel 4-5-13 V 2.0 Energy (MeV) 0.6 0.8 1.0 1.5 Normalized Yield 1.0 0.5 0.0 200 300 400 500 600 Channel 4-5-14 V 117

4-5-7 V ========================================================== Beam: 2.010 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: IBM Theta: 0.00 Phi: 10.60 Psi: 0.00 MCA: Econv: 1.850 148.480 First chan: 0.0 NPT: 1024 Detector: FWHM: 25.0 kev Tau: 5 Omega: 1.45 Correction: 1.0000 # Thickness Sublayers Composition... 1 230.00 A auto 0.564 H 0.049 C 0.385 Au0.002 2 670.00 A auto 0.470 H 0.022 C 0.507 Au 0.001 3 1000.00 A auto 0.707 H 0.024 0.268 Au 0.001 4 2100.00 A auto 0.812 H 0.028 0.158 Au 0.001 5 10000.00 A auto 0.970 Au0.030 4-5-8 V ========================================================== Beam: 1.998 MeV 4He+ 10.00 ucoul @ 0.00 na Geometry: General Theta: 80.00 Phi: 160.00 Psi: 80.00 MCA: Econv: 1.869 63.481 First chan: 0.0 NPT: 1024 Detector: FWHM: 55.0 kev Tau: 5.0 Omega: 2.300 Correction: 1.0000 # Thickness Sublayers Composition... 1 6.00 um auto Al 1.000 2 230.00 A auto 0.564 H 0.049 C 0.385 Au0.002 3 670.00 A auto 0.470 H 0.022 C 0.507 Au 0.001 4 1000.00 A auto 0.707 H 0.024 0.268 Au 0.001 5 2100.00 A auto 0.812 H 0.028 0.158 Au 0.001 118

6 10000.00 A auto 0.970 Au0.030 ( V ) 4-5-15 4-5-16 4-5-15 V 119

4-5-16 V 4-5-15 4-5-16 V 250 V 120

Ti Ti ( ) 5-1-1 5-1-2 5-1-1 Ti 121

5-1-2 Ti 5-1-1 5-1-2 Ti 4 4-2-21 4-2-22 Ti Ti 5-1-3 5-1-3 Ti 122

Ti Ti ( ) 5-2-1 5-2-2 5-2-1 Ti 5-2-2 Ti 123

5-2-1 5-2-2 Ti Ti 4 4-3-21 4-3-22 Ti Ti Ti 5-2-3 5-2-3 Ti Ti V V ( ) 5-3-1 5-3-2 124

5-3-1 V 5-3-2 V 125

5-3-1 5-3-2 Ti V 4 4-4-15 4-4-16 V V 5-3-3 5-3-3 V V V Ti Ti V V V V 250 V V ( ) 5-4-1 5-4-2 126

5-4-1 V 5-4-2 V 127

5-4-1 5-4-2 Ti V 4-5-15 4-5-16 V V 5-4-3 5-4-3 V V V V V V V 250 128

5-5-1 5-5-1 129

1990 RBS RBS RBS RBS Rump/Genplot CGS 9 1997 ( ) (mv) 4) (2004) 5) (2004) - 130 -

131

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