Siフォトダイオード 第 2章 1 Siフォトダイオード 章 1-1 動作原理 1-2 等価回路 1-3 電流ー電圧特性 1-4 直線性 1-5 分光感度特性 1-6 ノイズ特性 1-7 感度均一性 1-8 応答速度 1-9 オペアンプとの接続 1-10 応用回路例 2 フォトダイオード S i 2 PSD 位置検出素子 2-1 2-2 2-3 2-4 2-5 2-6 2-7 特長 構造 動作原理 位置検出誤差 位置分解能 応答速度 飽和光電流 使い方 3 応用例 3-1 3-2 3-3 3-4 3-5 3-6 3-7 3-8 粒度分布計 レーザ回折 散乱法 バーコードリーダ UVセンサ ロータリーエンコーダ カラーセンサ VICS 道路交通情報通信システム 三角測距 ダイレクト位置検出 23
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1. 1-2 1-1 KPDC0002JA Io = IL - ID - I, q VD = IL - IS (exp - 1) - I,... (1) k T IS: q : 1 k: T: Voc = k T IL ln - I (, + 1 )... (2) q Is ( ) q Isc Rs Isc = IL - Is exp - 1 - Isc Rs... (3) k T Rsh KPDC0004JA 25 KPDC0003JA
1-3 KPDB0002JB KPDC0005JA KPDC0006JA KPDB0001JB 26
1-4 KPDB0004JA Psat = VBi + VR... (4) (RS + RL) Sλ Psat : [W] (Psat 10 mw) VBi : [V] (0.2 0.3 V ) VR : [V] RS : ( Ω ) RL : [Ω] Sλ : λ [A/W] KPDC0008JC KPDB0003JD KPDB0009JC 27
1-5 λc = 1240 [nm]... (5) Eg Eg: [ev] QE = S 1240 100 [%]... (6) λ S: [A/W] λ: [nm] KPINB0395JA 1-6 KSPDB0247JB in = ij 2 + isd 2 + isl 2 [A]... (7) 28
ij = 4k T B [A]... (8) Rsh k: T: B: isd = 2q ID B [A]... (9) q: 1 ID: isl = 2q IL B [A]... (10) NEP = in [W/Hz 1/2 ]... (11) S in: [A/Hz 1/2 ] S: [A/W] 1-7 1-8 KPDB0006JB t1 = 2.2 Ct RL... (12) Cj A {(VR + 0.5) ρ} -1/2-1/3... (13) KPDB0007JA 29
d d t3 = = 2... (14) vd VR KPDC0010JB tr = t1 2 + t2 2 + t3 2... (15) KPDB0010JA fc = 0.35... (16) tr KSPDB0298JA 30
KSPDB0297JA KPDC0011JA IC : en : KPDC0035JA 1-9 KPDC0009JA 31
: 1-18 (a) : AD549 : Cf=0 pf : Cf=10 pf KPDB0021JA : 1-18 (a) : AD549 : 780 nm : Cf=0 pf : Cf=10 pf KPDB0019JA : 1-18 (a) : AD549 : 780 nm Cf=0 pf KPDB0020JA 32
1-10 KPDB0016JA IC1 : FET IC2 : OP07 Cf : 10 pf 100 pf Rf : 10 GΩ max. SW : PD : S1226/S1336/S2386, S2281 Vo = Isc Rf [V] KSPDC0051JC KSPDC0052JB KSPDC0053JB 33
: TTL Low IC : LF356 SW: CMOS 4066 PD : S1226/S1336/S2386 C : VO = Isc to 1 C [V] KPDC0027JB D: IB : IB << Isc R : 1 GΩ 10 GΩ Io: D 10-15 10-12 A IC: FET Isc + IB Vo = -0.06 log ( + 1) [V] Io KPDC0021JA lx lx lx lx 34
PD: S9219 (4.5 A/100 lx) KSPDC0054JB PD : S1226/S1336/S2386 IC : LF356 D : ISS226 Vo = Rf (Isc2 - Isc1) [V] (Vo<±0.5 V) KPDC0017JB lx lx lx VR : IC : TLC271 PD : S7686 (0.45 A/100 lx) A : Log PD: S5870 KPDC0018JE Vo = log (ISC1/ISC2) [V] KPDC0025JC 35
A :, 1 ma 10 ma PD : S2387-1010R B : S : Si S2387-1010R: 930 nm S=0.58 A/W Po : Po = Isc S [W] KPDC0026JA PD : PIN (S5971, S5972, S5973, S9055, S9055-01 ) RL, R, Rf: IC : AD8001 Vo = Isc RL (1 + Rf ) [V] R KPDC0015JE PD: PIN (S5971, S5972, S5973 ) Rf : IC : AD745, LT1360, HA2525 Vo = -Isc Rf [V] KPDC0020JD 36
PD : PIN (S5971, S5972, S5973, S9055, S9055-01 ) RL, R, Rf, r: IC : AD8001 Vo = Isc RL (1 + Rf ) [V] R KPDC0034JA 2. 2-1 2-2 PD : PIN (S2506-02, S5971, S5972, S5973 ) RL : RS : FET FET: 2SK362 KPDC0014JE 37
KPSDC0010JB IX2 - IX1 2XA =... (9) IX1 + IX2 LX KPSDC0005JB LX LX - XA + XA 2 IX1 = Io... (1) 2 IX2 = Io... (2) LX LX IX2 - IX1 2XA =... (3) IX1 + IX2 LX IX1 LX - 2XA =... (4) IX2 LX + 2XA LX - XB IX1 = Io... (5) LX IX2 = XB Io... (6) LX IX2 - IX1 2XB - LX =... (7) IX1 + IX2 LX IX1 LX - XB = IX2 XB... (8) IX1: X1 IX2: X2 Io : (IX1 + IX2) LX : () XA : PSD XB : X1 KPSDC0009JC KPSDC0012JC (IX2 + IY1) - (IX1 + IY2) 2XA =... (10) IX1 + IX2 + IY1 + IY2 LX KPSDC0006JA (IX2 + IY2) - (IX1 + IY1) 2YA =... (11) IX1 + IX2 + IY1 + IY2 LY 38
KPSDB0114JA - 3 2 KPSDC0071JB E = Xi - Xm [ m]... (12) Xi : [ m] Xm: [ m] IX2 - IX1 LX Xm = IX1 + IX2 2... (13) KPSDB0005JA KPSDC0073JA 39
KPSDC0074JA KPSDC0076EA KPSDC0075JA KPSDC0063JA KPSDC0077JA 2-4 XB + Δx IX2 + ΔI = Io... (14) LX ΔI: Δx: ΔI Δx = LX... (15) Io Is = 2q (IO + ID) B [A]... (17) q : 1 [C] IO: [A] ID: [A] B : [Hz] 40 In ΔR = LX... (16) Io
Ij = 4kTB [A]... (18) Rie k : [J/K] T : [K] Rie: [Ω] ) Rsh >> Rie Rsh en Ien = B [A]... (19) Rie en: [V/Hz 1/2 ] In = Is 2 + Ij 2 + Ien 2 [A]... (20) KPSDB0083JB Vs = Rf 2q (Io + ID) B [V]... (21) Vj = Rf 4kTB [V]... (22) Rie Ven = 1 + Rf en B [V]... (23) Rie VRf = Rf 4kTB [V]... (24) Rf Vin = Rf in B [V]... (25) in: [A/Hz 1/2 ] Vn = Vs 2 + Vj 2 + Ven 2 + VRf 2 + Vin 2 [V]... (26) KPSDB0084JA 41
t1 = 2.2 Ct (Rie + RL)... (27) 2-5 t1 = 0.5 Ct (Rie + RL)... (28) tr = t1 2 + t2 2... (29) 2-6 KPSDB0110JB KPSDC0078JA 42
KPSDB0087JA 2-7 KPSDB0086JB KPSDC0085JC KPSDC0026JE KPSDB0003JA 43
KPSDC0029JE KACCC0223JA 44
3. 3-1 3-3 3-4 3-2 KSPDC0056JA KSPDC0062JA 45
3-5 3-6 KACCC0212JE KLEDC0029JA 46
KPSDC0080JB - 7 3 KPSDC0087JA KPSDC0086JA 3-8 KPSDC0088JA KPSDC0089JA 47
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