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590nm 2200nm 0 1.739 1.713 5 1.708 1.682 10 1.678 1.652 0-10 0.061061 0.061061 11
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1.0 x1.0 0.5 x0.5 0.2 x0.2 0.1 x0.1 bg/30ms GS/30ms GS/sqrt(bg) R-band 20.3 21.8 23.8 25.3 76 10.1 1.15 I-band 19.2 20.7 22.7 24.2 161 7.7 0.61 J-band 14.8 16.3 18.3 19.8 1037 23.8 0.74 H-band 13.4 14.9 16.9 18.4 2825 21.4 0.40 K-band 12.6 14.11 16.11 17.6 1078 18.7 057 0.57 1.0 x1.0 0.5 x0.5 0.2 x0.2 0.1 x0.1 bg/100ms GS/100ms GS/sqrt(bg) R-band 20.3 21.8 23.8 25.3 3403 449 77 7.7 I-band 19.2 20.7 22.7 24.2 7166 343 4.1 J-band 14.8 16.3 18.3 19.8 11629 1060 9.8 H-band 13.4 14.9 16.9 18.4 31666 956 5.4 30 K-band 12.6 14.1 16.1 17.6 48117 836 3.8
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W22 W 21 W 21 W 22 S1 X S1 Y W 11 W 12 S1 Y S1 X W 11 W 12 S1 X =C x 1/2 x ( W 12 W 11 + W 22 W 21 ) S1 Y =C x 1/2 x ( W 21 W 11 + W 22 W 12 ) S1 X =C x 1/2 x ( W 12 W 11 ) S1 Y =C x 1/2 x ( W 21 W 11 ) 35
S1 X W 11 W 12 S1 Y 1-1 0 1-1 0 0 0 0 W -1-1 0 1 1 0 0 0 0 13 S2 X 0-1 1 0-1 1 0 0 0 W 21 S2 Y 0-1 -1 0 1 1 0 0 0 W 0 0 0-1 1 0 1-1 0 22 = 1/2 S3 X S3 Y S4 X S4 Y 0 0 0-1 -1 0 1 1 0 0 0 0 0 1-1 0 1-1 0 0 0 0-1 -1 0 1 1 s = A w w =( A T A ) -1 A T s 36 W 23 W 31 W 32 W 33
BS-plate 37
BS-plate 38
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Element count 1024 = 32x32 (goal: 4096 = 64x64) Pitch Aperture size Fill factor 98% Actuator yield > 99% Stroke (overall) 300 1,000 um 10 30mm (goal: 20 60mm) 20 um Stroke (at highest spatial freq.) 4 um Surface roughness (RMS) Flatness (controlled; RMS) Bandwidth First resonance < 20nm (goal: <10nm) < 20 nm > 100Hz > 1kHz Hysteresys < 0.1% Reflective surface Uniformity of surface reflectivity Stability Repeatability Resolution Maximum drive voltage Gold (Silver) w/ overcoat ±1% RMS < 4nm < 4nm < 4nm < 300V Operating temperature -5 +15 (goal: -30 +30 ) Relative Humidity 0 90 % Altitude 0 4500 m 42
Continuous mirror (smooth phase control) Segmented mirror (uncoupled control) 43
IRIS AO web page 44
ALPAO web page. AO4ELT2 booth 45
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ピエゾを いた場合の現状として Palomer/PALM3000 の例 Xinetics 3388 素 66x66 素 が1.8mmピッチで並ぶ ケーブリングが 変なことになっている 隣どうしのストロークは 12um 1.2um Bouchez et al. 2008, SPIE 47
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Acquisition camera DM CL- WFS To IRCS Science pickoff CL-WFS OAE Room for CU OL- WFS OL- WFS DM Beam from the telescope OL- WFS Room for LGS- 69 WFS
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Laser Guide Star Tip-Tilt Guide Star 73
0 90 180 270 74
Target Star 3 Gide Stars 3 Guide Star WFSs Atmospheres Target WFS Aperture 75
位相板と口径との距離が 48.3cm 位相板上での光路の重なり トモグラフィーで 200 直接測定した波面 推定した波面 残差波面 100 0-100 -200-200 -100 0 100 200 RMS = 310.0nm RMS = 30.07nm 76
Si/HfO2 Bimorph spring Original Points 1. HfO2 crystallization-induced stress is used to introduce large out-of-plane deflection. 2. Relatively soft spring structure (small spring constant) instead of fixed posts is used to increase the stroke. 3. High optical quality mirror surface is guaranteed by the top layer of SOI wafer and the Si-Si plasma activation bonding. High-stroke MEMS-DM Structure 77
(c) Bonding and release 78
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