1 1905 A.Einstein 1917 A.Einstein 1954 C.H.Townes MASER Microwave Amplification by Stimulated Emission of Radiation 23.9 GHz 1.26 cm 1960 T.H.Maiman LASER Light Amplification by Stimulated Emissin of Radiation cm 1
2 ( ( ) 2
L = n λ 2 3
3 = 4
4 694 1960 1963 Nd 1.06 1961 1968 He Ne 633 1962 1962 0.9 1962 1965 10.6 1964 1966 Nd YAG 1.06 1964 1965 1.315 1964 1983 Ar 488 514 1964 1966 337 1966 1969 510 578 1966 1981 ( ) 320 970 1966 1969 He Cd 442 325 1968 1970 1975 1976 700 815 1977 1981 He Ne Ar Nd YAG Nd 5
5 5.1 Al 2 O 3 +Cr 2 O 3 (0.05%) 5.2 Nd YAG Nd 3+ Y 3 Al 3 O 12 Nd 3+ Y 3+ 3 400 W YAG 1.06 μm ( 0.94 μm 1.3 1.4 μm 2.098 μm CO 2 1/10 6
5.3 Cr 3+ BeAl 2 O 4 Cr 3+ Be 3 Al 2 (SiO 3 ) 6 GSGG Cr 3+ Gd 3 Sc 2 Ga 3 O 12 Ti 3+ Al 2 O 3 700 818 nm 720 842 nm 742 842 nm 680 1100 nm 5.4 ( Er 1.55 μm Yb 1.075 μm( 10kW ) 1.55 μm 100W 10 7
6 6.1 He-Ne 1 10 mw 2 3 Ne He He Ne 1.15 μm 632.8 nm 543.5 nm 1 3 Torr 0.00132 0.004 He Ne kv 10 kv 2 3 ma 0.01 0.1 0.1 5 mw 6.2 Ar : 1 2 : 3 1 10 W 10 mw 100W 514.5 nm 488 nm 1Torr 100 V 10 A 8
6.3 CO 2 N 2 He : CO 2 5% N 2 15% CO 2 He 80% 10.6 μm 9.6 μm ( MW 15 30% 6.4 excimer excited dimer 3 6 50 200 W % 9
KrF Kr F 2 Kr F 2 70 75 76 UV Xe( Xe 2 Kr 2 Ar 2 KrF( ) XeF( ) ArF( ) XeCl 0.248 0.308 0.193 0.351 μm HgBr HgCl HgI TFT ) 500 6.5 HeCd 10
1,500 511nm( ) 578nm( ) 400 (20 40ns) (40kW) HeCd 250 He 325nm( ) 442nm( ) :442nm 150mW 325nm 40mW 11
7 0.3 1.2 μm () 4 3 2 1 S 1 S 0 T 1 T 2 T 1 12
8 20 30 10 / 1962 GE IBM MIT 196 850nm GaAs N.Holonyak GaP 650nm 1970 20 40 13
GaAlAs 780 nm W 10 W 50 W InGaAsP 1.3 μm 1.5 μm AlGaInP 650 nm 580 nm 77 0.67 μm 100 mw GaN InGaN 400 nm GaN 531 nm 2009 9 FEL cm 100 18 μm 1999 6.45 μm 150 nm MW 14
10 1 Å 11 ( MW ( Hydrogen Fluoride (HF) HF 2.7 2.9μm 3.8μm Deuterium Fluoride (DF) 15
Chemical Oxygen Iodine Laser (COIL) ( ) 145 2NaOH + Cl 2 +H 2 O 2 2NaCl + O 2 +2H 2 O (2KOH) 1.32μm () 1978 4mW W 10kW () (NCl 3 ) (H) (HI) 16
12 0.39μW (400nm 700nm) 1mW M (5mW) B 0.5W 0.5W B ( ) 17
13 ( InGaAsP 1.48 μm SiO 2 70km (300 ) ) Nd YAG GaAlAs 14 Laser Radar Lidar Light Detection and Ranging 1969 11 18
Nd YAG GaAlAs CO 2 NASA } 701 826 nm Ti Al 2 O 3 660 986 nm Co MgF 2 1.5 2.3 μm CH 4 Nd YAG 1.06 μm SO 2 NO 2 { Nd YAG LGB(Laser-guided bombs) 19
15 A 1 A 2 He-Ne 632.8 nm/0.15 μm LSI M A B / He-Ne 632.8 nm 20
16 Ar + Kr + 1948 D Gabor R O H ) He-Ne Ar + 21
17 CD CD-ROM CD-R CD-RW ) Ar + 488 nm 780 nm He-Ne 0.4 μm.8 μm 1.5 Digital Video Disc DVD CD-RW ) Blue Ray Disc BD CD DVD BD( ) 780nm 650nm 405nm 870nm 400nm 150nm 700MB 4.7GB 2 25GB 2 22
18 Pd-Cu-Si Ni IC CO 2 10kW Nd YAG 5.5kW CO 2 10kW 100W 1.55μm 23
19 KrF 248 nm LSI Cl 2 Si CVD Chemical Vapor Deposition Al(CH 3 ) 3 Al Al(CH 3 ) 3 N 2 O C 2 H 2 H 2 ArF Al 2 O 3 C Zn(CH 3 ) 2 NO 2 (CH 3 ) 3 InP(CH 3 ) 3 P(CH 3 ) 3 ZnO InP Al(CH 3 ) 3 or B(CH 3 ) 3 Al or B 24
20 CO 2 Nd YAG 1000 514.5 nm Ar + 25
21 22 235 U 235 U 238 U 235 U 23 4 1 1H 4 2He + 2e + +27.05MeV Coulomb 0.29MeV 34 2 1D+ 3 1T 4 2He + n +17.6MeV T 6 3Li + n 4 2He + 3 1T+4.8MeV 7 3Li + n 4 2He + 3 1T+n 2.47MeV 26
2 1D+ 2 1D 3 2He + n +3.27MeV 2 1D+ 2 1D 3 1T+p +4.03MeV D 1/650 T Gekko, Water Fall 2011 2010 B.E.A.Saleh M.C.Teich 2008 2007 2006 2000 1997 1992 J.Wilson J.F.B.Hawkes 1992 1991 1987 27