研究成果報告書
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1 UV MEMS
2 (1) : (5) (4) (6) : (1)(5) TOTAL (2) (3) : (4)
3 (1)Hidetoshi Shinohara, Makoto Fukuhara, Tamano Hirasawa, Jun Mizuno, Shuichi Shoji, Fabrication of Magnetic Nanodots Array Using UV Nanoimprint Lithography and Electrodeposition for High Density Patterned Media, Journal of Photopolymer Science and Technology, Vol. 21, No. 4, 2008, pp (2)H.Shinohara, Y.Takahashi, J.Mizuno, S.Shoji, Surface hydrophilic treatment of polyurea film realized by vacuum ultraviolet light irradiation and its application for poly (methylmethacrylate) blood analysis chip, Sensors and Actuators B 132 (2008) (3) Hidetoshi Shinohara, Takafumi Suzuki, Fumihiko Kitagawa, Jun Mizuno, Koji Otsuka, Shuichi Shoji, Polymer microchip integrated with nano-electrospray tip for electrophoresis mass spectrometry, Sensors and Actuators B 132 (2008) (4) Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno, Shuichi Shoji, Fabrication of High Light-Extraction Efficiency Light-Emitting Diodes Using Nanostructures by Ultraviolet Nanoimprint Lithography and Electrodeposition, Japanese Journal of Applied Physics, Vol.47, No.2, 2008, pp (5) Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Fabrication of microchannel Device by Hot Embossing and Direct Bonding of poly(methyl methacrrylate), Japanese Journal of Applied Physics, Vol.46, No.6A, 2007, pp (6)Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Low-temperature Direct Bonding of poly(methyl methacrrylate) for polymer Microchips, TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING IEEJ Trans 2007; 2: pp (7) Yoshitaka Shirasaki, Hirokazu Sugino, Masayasu Tatsuoka, Jun Mizuno, Shuichi Shoji, and Takashi Funatsu, On-chip Cell Sorting System Using Thermoreversible Gelation Polymer, IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOL.13, NO.2, MARCH/APRIL.2007, pp (8) Makoto Fukuhara, Jun Mizuno, Mikiko Saito, Takayuki Homma, Shuichi Shoji, Fabrication of Metallic Nanopatterns Using the Vacuum Type UV-NIL, TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING IEEJ Trans 2007; 2: pp (9) Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka: High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips, In Micro Total Analysis Systems 2006, Kitamori, T.; Fujita, H.; Hasebe, S. Eds.; Society for Chemistry and Micro-Nano Systems: Tokyo, (2006) Vol. 1, pp (10),,,,,,,,,,,2006 9,9 2 (1) Akira Saeki, Chiaki Aoyama, Yoshitaka Shirasaki, Makoto Tsunoda, Jun Mizuno, Takashi Funatsu, Shuichi Shoji, The long pillar array column with the low-dispersion curve for liquid chromatography, 8th International Symposium on Microchemistry and Microsystems (ISMM 2008), Kyoto, Japan; December (2) Fumihiko Kitagawa, Kei Kubota,
4 Hidetoshi Shinohara, Yoshikazu Takahashi, Jun Mizuno, Shuichi Shoji, Koji Otsuka, Electrophoretic analyses of biogenic compounds using surface modified polymer microchips, 8th International Symposium on Microchemistry and Microsystems (ISMM 2008), Kyoto, Japan; December (3) Fumihiko Kitagawa, Kei Kubota, Hidetoshi Shinohara, Yoshikazu Takahashi, Jun Mizuno, Shuichi Shoji, Koji Otsuka, Electrophoretic analyses of biogenic compounds using surface modified polymer microchips, The 33rd International Symposium on High Performance Liquid Phase Separations and Related Techniques (HPLC2008 Kyoto), Kyoto Univ., Kyoto, Japan; December (4) Mikiko Saito, Jun Mizuno, Hideo Nishikubo, Hidemichi Fujiwara, and Takayuki Homma, Preparation of Electrodeposited Pt Nano Patterned Electrode using UV-Nano Imprinting Lithography, 214th Meeting of the Electrochemical Society, 2008 (ECS2008), A2, pp337 (5) Hideo Nishikubo, Hidemichi Fujiwara, Mikiko Saito, Jun Mizuno and Takayuki Homma, Electrochemical Synthesis of Metal Nano Particles Using Electrodeposited Pt Electrode with Nano Patterned Surface, 214th Meeting of the Electrochemical Society, 2008 (ECS2008), A2, pp336 (6) Takanari Ouchi, Yuki Arikawa, Jun Mizuno, Shuichi Shoji, Takayuki Homma, Electrochemical Fabrication of CoPt Nanodot Arrays on Glass Disks by UV Nanoimprint Lithography, 214th Meeting of the Electrochemical Society, 2008 (ECS2008), F4, pp2571 (7) Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, HIGH-THORGHPUT NANO-METAL PATTERNING PROCESS USING UV NANOIMPRINT LITHOGRAPHY AND ELECTRODEPOSITION, The 7th International Conference on Nanoimprint and Nanoprint Technology (NNT2008), Kyoto Internationa Conference Center, Kyoto, Japan October 13-15, 2008, pp (8) Hidetoshi Shinohara, Fumihiko Kitagawa, Jun Mizuno, Koji Otsuka and Shuichi Shoji, HIGHLY STABLE AND REPRODUCIBLE CYCLO-OLEFIN POLYMER NANO-ELECTROSPRAY TIP FOR ELECTROPHORESIS-MASS SPECTROMETRY, Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT2008), TAYIH Landis Hotel, Tainan, Taiwan National Cheng Kung University, June22-25,2008,pp219 (9) Katsuyuki Sakuma, Hiroshi Ono, Noriyasu Nagai, Mikiko Saito, Jun Mizuno, Shuichi Shoji, A NEW FINE-PITCH VERTICAL INTERCONNECTION PROCESS FOR THROUGH SILICON VIAS AND MICROBUMPS, Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008 (APCOT2008), TAYIH Landis Hotel, Tainan, Taiwan National Cheng Kung University, June22-25, 2008,pp47 (10) Hirokazu Kurotaki, Hidetoshi Shinohara, Hiroshi Kobayashi, Jun Mizuno, Shuichi Shoji, Study of Low-temperature Wafer Bonding with Au-Au Bonding Technique, proceeding of MicroNano2008, June 3-5,2008, Clear Water Bay, Kowloon, Hong Kong,pp (11) H. Shinohara, Y. Takahashi, J. Mizuno, S. Shoji, POST-HYDROPHILIC TREATMENT FREE PLASTIC BIOCHIP FABRICATION METHOD USING POLYUREA FILM, MEMS2008, Tucson, AZ., USA, January; 13-17, 2008, pp (12) Fumihiko Kitagawa, Takafumi Suzuki, Shoji, Koji Otsuka: Application of cycloolefin polymer chip directly integrated with an electronanospray tip to electrophoretic separation and mass spectrometric detection, 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (u TAS 2007), Paris, France; 7-11 October 2007 (13) Fumihiko Kitagawa, Takafumi Suzuki, Shoji, Koji Otsuka: Application of cycloolefin polymer chip directly integrated with an electronanospray tip to electrophoretic separation and mass spectrometric detection, 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (u TAS 2007), Paris, France; 7-11 October 2007 (14) Fumihiko Kitagawa, Takafumi Suzuki, Shoji, Koji Otsuka: Electrophoretic separation and mass spectrometric detection on polymer chip directly
5 integrated with an electronanospray tip, 1st Shenyang International Colloquium on Microfluidics (SICOM I), Shenyang, China; Octobor 2007 (15) Fumihiko Kitagawa, Takafumi Suzuki, Shoji, Koji Otsuka: Electrophoretic separation and mass spectrometric detection on polymer chip directly integrated with a nano ESI tip, 7th International Symposium on Microchemistry and Microsystems (ISMM 2007), Tsukuba, Ibaraki, Japan; October 2007 (16) Fumihiko Kitagawa, Takafumi Suzuki, Shoji, Koji Otsuka: Microchip electrophoresis-mass spectrometry on polymer microfluidic device directly integrated with a nano ESI tip, 7th Asia-Pacific International Symposium on Microscale Separations and Analysis (APCE 2007), Singapore International Convention & Exhibition Centre, Singapore; December 2007 (17) Kitagawa, F.; Suzuki, T.; Shinohara, H.; Mizuno, J.; Shoji, S.; Otsuka, K.: Application of Cycloolefin Polymer Chip Directly Integrated with an Electronanospray Tip to Electrophoretic Separation and Mass Spectrometric Detection, In Micro Total Analysis Systems 2007, Viovy, J.-L.; Tabeling, P.; Descroix, S.; Malaquin, L. Eds.; Chemical and Biological Microsystems Society: San Diego, (2007) Vol. 2, pp (18) T. Suzuki, F. Kitagawa, H. Shinohara, J. Mizuno, K. Otsuka, and S. Shoji, POLYMER MICROCHIP FOR ELECTROPHORESIS-MASS SPECTROMETRY FABRICATED BY HOT EMBOSSING AND LOW TEMPERATURE DIRECT BONDING, The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 10-14, 2007, 3EA13.P, pp (19) H. Shinohara, Y. Takahashi, T. Nishi, K. Uemura, C.Takahashi, J. Mizuno and S. Shoji, SURFACE HYDROPHILIC POLYUREA FILM FOR PMMA BLOOD ANALYSIS CHIP REALIZED BY VACUUM ULTRAVIOLET LIGHT IRRADIATION, The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 10-14, 2007, 2C1.2: pp (20) Hiroshi Ono, Shuichi Shoji, Mikiko Saito, Jun Mizuno, Fabrication of Multilayer Interconnection Using Ultraviolet Nanoimprint Lithography, 4th International Conference on Networked Sensing Systems, INSS June 2007 in Braunschweig, Germany, pp (21) Fumihiko Kitagawa*, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka: Fabrication of integrated nano ESI tip for microchip electrophoresis mass spectrometry, 21st International Symposium on Microscale Bioseparations (MSB 2007), Vancouver, Canada; January 2007.pp277 (22) Fumihiko Kitagawa*, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka: High performance electrophoretic analysis on cycloolefin polymer microchips, 6th Asia-Pacific International Symposium on Microscale Separations and Analysis (APCE 2006), Kyoto, Japan; November 2006.,pp80 (23) Hidetoshi Shinohara, Jun Mizuno, Fumihiko Kitagawa, Koji Otsuka and Shuichi Shoji, FABRICATION OF HIGHLY DIMENSION CONTROLLED PMMA MICROCHIP BY HOT EMBOSSING AND LOW TEMPERATURE DIRECT BONDING, The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (utas2006),tokyo,5-9,november,2006,p p (24) Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji and Koji Otsuka, HIGH PERFORMANCE ELECTROPHORETIC ANALYSIS ON CYCLOOLEFIN POLYMER MICROCHIPS, The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (utas2006),tokyo,5-9,november,2006,p p (25) Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno and Shuichi Shoji, Fabrication of High Light-Extraction Efficiency LED Using Nanostructures by UV Nanoimpr int Lithography and Electrodeposition,SSDM2006,Yokohama,1 4-16,September (26)H.Kurotaki, H.Shinohara, H.Ishida, V.Dragoi, T.Glinsner, O.Lindner, J.Mizuno, S.Shoji, Equipments and Technologies for Packaging of Nano / Micro-structured Polymer Applications,COMS2006,Florida,
6 (27) H. SHINOHARA, M. ISHIZUKA, J. MIZUNO AND S. SHOJI, LOW TEMPERATURE DIRECT BONDING OF PMMA FOR POLYMER MICROCHIPS, Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, 25-28, June,2006,95-FT-A0062 (28) MAKOTO FUKUHARA, MIKIKO SAITO, TAKAYUKI HOMMA, JUN MIZUNO, SHUICHI SHOJI, MAKOTO OHTAGUCHI, TAMANO HIRASAWA, GAKU SUZUKI, NORIHITO FUKUGAMI, FABRICATION OF METALLIC NANOPATTERNS USING THE VACUUM TYPE UV-NIL EQUIPMENT, Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, 25-28, June, 2006, 95-FT-A0144 (29) (30) (31) (32) (33) (34) (35) (1),O puls E,, vol.31 No.2,pp (2),,, ,pp (3), TAS, NEMS,, ,pp (4), ////// /UV,, ,pp (5),,, ,pp (6),,, , pp (7), LED,, , pp (8),,, , pp SAITO MIKIKO
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