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1 ( ) ( ) 1

2 MEMS : MEMS ( +13% / ) 2

3 3

4 ISFET ph,co 2 (K.Shimada, M.Esashi, Med.& Biol.Eng.& Comp.,18 (1980) p.741) (M.Esashi T.Matsuo, Supplement to the J.J.AP.,44 (1975), ) 4

5 5

6 (Y.Matsumoto, S.Shoji, M.Esashi, 22nd Conference on Solid State Devices and Materials (1990) 701) 6

7 (1000V) (DC~10GHz) LSI MEMS (MEMS )( ) 7

8 (NHK, ) (T.Tajima (NHK), M.Esashi et.al., Microelectronic Engineering, (2003) 508) 8

9 SiO 2 LPCVD (650 ) 125nm Si poly-si (1000 ) (3MPa) ( m / min) Si (M.Kirsten, B.Wenk (Fraunhofer-Inst.), F.Ericson, J.A.Schweitz (Uppsala Univ.) Thin Solid Films, 259 (1995) pp ) ST Microelectronics 9

10 (J.C.Eloy, SEMICON Japan 2010)

11 (M.Nagao et.al.,sae World Congress, Detroit, (2004)) 11

12 2 (IDG-1000) ( ) (J.Seeger, M.Lim and S.Nasiri : Technical Digest Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, 61 (2010) ) 12

13 1.5mm 7.4 ( ) ( ) MESAG-100 (Micro Electrostatically Suspended Accelerometer Gyro) ( ) 13 (T.Murakoshi, Jpn. J. Appli. Phys., 42, Part1 No.4B (2003) p.2468)

14 ( ) 14

15 (T.Katsumata et.al., Optical MEMS 97) (K. Totsu et.al., Transducers 03 (2003) ) 15

16 / ~10 18 g 400 m 0.2 m f 0 =669.5Hz Q=1325 NdFeB (10 m ) (Magnetic Resonance Force detective Microscope (MRFM)) (T.Ono and M.Esashi, Rev. of Scientific Instruments, 74 (2003) 5141) 16

17 MRFM 17

18 Optical image 10 m (MRFM) (ESR) DPPH (diphenylpicrylhydrazil))( ) 18

19 (1 ) (NEC) (S.Tohyama, Optical Engineering, 45 (2006) p ) 19

20 ( NEC) 20

21 64 64 ( ) (T.Shimizu ( ), SEMI Technology Symposium (STS) 2010) 21

22 4 22 SAW (J.Kuypers, APCOT2006 p.293)

23 SAW (S.Hashimoto, Proceedings of the 24th Sensor Symposium, (2007), p.267) 23

24 SAW (A.Randles, 2008 IEEE International Ultrasonic Symposium (2008) p.1124) 24

25 (N.Asada et.al., IEEE Trans. on Magnetics 30 (1994)) 3 ( 33 1 (2009) 41) 25

26 Concept PZT CVD pixels (SVGA) 40 cm (H.Matsuo, Y.Kawai and M.Esashi : Jap. J. Appl. Phys, 49 (2010) 04DL19 ) (E.Kawasaki, H.Yamada and H.Hamanaka : IDW 09 (2009) 1345 ) 26

27 ( ) 27

28 ( ) 1999 Star Wars : Episode 1 (George Lucas ) DLP DMD (Digital Micromirror Device)( TI ) 28

29 TiAl 3 DMD TiAl 3 (DLP) DMD TiAl 3 - (J.Tregilgas, Advanced materials and Processes, (2005 Jan.) 45-49) 29

30 FBAR (Film Balk Acoustic Resonator) LSI LSI (T.Matsumura (NICT), 2009 IEEE Internl. Ultrasonic Symp. (2009) 2141) 30

31 LSI SAW (502 MHz) (SAW) LSI (K. D. Park, IEEJ The 26th Sensor Symposium, 37 (2009) 31

32 MEMS SAW (T.Yasue, Transducers 2011) 32

33 Au 33

34 Au/Cr Through via hole NPG LTCC Au Photoresist LTCC LTCC h 2 h 2 > h 1 h 1 Si Au-Sn LTCC MEMS components Mechanical sealing frame Pressure, voltage and heat (Sn ) LTCC AuSn LTCC h 1 h 2 NPG Si (NPG) ENAS ) 34 (Y.-C. Lin, W.-S. Wang et.al., Transducers 2011)

35 6 / ( 1039, 2010/9/20) 35

36 Beam Blanker Array 1.4mm 1.5mm (110 ) 13,000 Y 2 m X 22nm (30nm LS ) (5kV) 0.3nA 10 (300mm ) / Mapper ( (EB) ( EB ( ) (2009) p.158) 36

37 10 mm Si (A Kojima, H. Ohyi and N. Koshida ( ), J. Vac. Sci. Technol., 37 B26, 6 (2008) 2064)

38 ( ) 38

39 MEMS PC (80 ) MEMS (MEMSPC) MEMS (20mm ) (MNC) (2 LSI )) ( SIC) ( (4/6 )) (4/6 ) U.C.Berkeley MEMS MEMS Industry Group IMEC NICT LETI MEMS 39

40 2 ( ) (,,,, vol.10, no10, pp.32-35, Oct.1990.) 40

41 ( ) 41

42 ( ) 42

43 (MNC) (2 LSI ) ( ) (4/6 MEMS ) MEMS MEMS MEMS (20mm ) (8 ) 43

44 ( ) 4 Tr 4/6 MEMS 44

45 ( ) 45

46 ( ) 46

47 IMEC ) IMEC Strategic Partner ( (EPFL)) 47

48 48

49 49

50 ) MEMS ( CD) ( ) / / / / / / MEMS (MEMSPC) MEMS 50

51 MEMS ican ican LED 2 ican ican ican2009 ican 11 (2010/9/3) ICAN MEMS 51

52

53 53

54 ( ) ( )

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