db log db db db log log log db log log log4 y log4 log y log log y log4 log log log y log 4 log log log y log log log log y log log y log log y log y 5V.5 m db db log db db.893 - +..5.779-3 +3.43 db(.) 3.5-6 +6.995 3dB(.43).36 - + 3.6.5. - +
DC DC DC () D 3D 3 4 5DC khz d (a) (b) a. b. c. d. e. a b c d e 3 4 5
a b Hz b a Hz khz V BT Lm vm s e / B v L S N k m fv fa+fv fo+fa+fv FM fo fo+fa fv i fa fo μm/s RL e o (Hz) khz HP Hz CEC Vibration ProductsHP -4 m/s -5 m/s 3
(Compression type) (Shear type) Ni-CrNi-Cu (Pyro) (PVDF) (PZT) (grain) (Pyro) - - O Q d F n Si - F - - - F 9pC/(m/s ),39g 39pC/(m/s ),5g O - Q d F n Si - - F y - - - F y (pc/ms - ) 6pC/(m/s ),3g.pC/(m/s ),5g.5pC/(m/s ),.g k k k (Hz) 4
5%.5m/s m/s.7m/s +4% 5% 6 5% 5.3 pc / (m/s) () 5. mv / (m/s) ----- ----- FET a CCLD : Constant Current Line Drive ( ) 5
.5% s egnd m. 638m s egnd m s egnd m a o Nm 8 8 Hz% khz.5% khzkhz3% () q a -A C f R f A (Open loop gain ) R f Ω C f e 6
() q a pc/(m/s ) C f pf e o q a eo C f mv/(m/s ) pf mv/pc pc mv -A C f R f q a e 6Hz 57.5mV 99.4mV/pC A B. mv/pc 4.8pC/(m/s ) 3.4mV(rms) k e i Q = CV e o C C C q a c i a q a = (C a +C c +C i )e i 6Hz 53.7mV 5.36pC/(m/s ) 9.86mV/pC A B q a pc/(m/s ) C a C c e s qa es mv/(m/s Ca C ) C k qa eo C C a C mv/(m/s ) pf pf q a C a Cc e i e o k 7
6Hz 53.7mV 5.36pC/(m/s ) 9.86mV/pC φ.mm m 8pF φ.mm m 6pF PV-8A PV-94 PV- PV-45 PV-65 PV-8 6Hz 9.94 8pF 3.6mV 6pF 95.mV φ5.5*7.8 4he*5 φ6*8 6he* 6he*3 4*4*4 g.7 9 5.5 9 6 39 pc/(m/s)..7 7. 7. 9 Hz 5,, 5,, 9,, pf 4 36 73 97 3,9,4 % 5 4 5 5 5 4-5+6-5+6-5+6-5+6-5+6-5+6 M6 M3-3UNF M6 M6 q a = 6.pC/(m/s ) Ca = 7pF Cc = 6pF es 36pF 8
5.3pC/(m/s ) mv/pc 53mV/(m/s ) y d Ma:354mV Min:-9mV 354mV 8mV 5. 5m s 53mV m s 354mV 9mV 8mV Δ Δy d % ( ). mv/(m/s ) mv/g G 9.8m/s % 5% 6μm Δy/Δ 3μm API 67 7.87mV/μm API 67 5μm μm API 67 mm 8μm,μm 7.87mV/μm.% of F.S. 5.%. μm. μm 3. 7.87μm 4. 4μm 5..8μm y Δ Δy d 9
9.6 V DC 65mV p-p AC DC mv/mil DC 7μm,5μm 5,7mV,4mV y 7μm,5μm 5,7mV,4mV 5,7 = 7a + b,4 =,5a + b y = a + b a = 7.9 (mv/μm) b = 468.8 (mv) ISO 373 /5 V...3.4.5 (s) Ma:9.7V Min:9.34V 97mV 934mV 36mV 36mV 7.9 45.5m p p mv m ISO 37JIS B 97 %(- db)
3 t f3db 4. 5 Hz m 3 t f3db 5. Hz m t (mm) (Hz) m (g) 6 mm 3 mm.6 mm 6 mm 3 mm.6 mm k f n m f n k m m k (Hz).6 mm 35 g -3 db Hz (g) f n / 3 f n k k k (Hz) m (a) (b) (c) (d) k (e) (f) (g) (h)
3kHz A BAB 4 Gain (db) A B - 5 5 Frequency (Hz) a. b. c. 35kHz d. A B Charge Amplifier Low Pass Filter High Pass Filter Intrgrator A V A V D True RMS Detector a. b. c. d. Integrator V D Peak Detector a. b. c. d. e. a b c d e 3 4 5 k k k k 3 k k 5k k 5k
k k k k 3 k k 5k k 5k m/s m/s mm/s Over 87 m/s HzkHzrms Over all m/s. k k m/s.m/s m/s m/s ISO 86- C/D 4.5 mm/s B/C.8 mm/s A/B.7 mm/s.mm/s 87 m/s 5m/s m/s.m/s. k k m/s dynamic range m/s m/s Hz FFT m/s.m.mm.μm m. k k 87 m/s 3
6dB 87m/s 5Hz 3 33 U rms U 77 U sin d. U Vibration meter Over 4 m mm/s m/s 6 8 3 U rms U Function Multiplier 3 Disp. p-p.3 3 Disp. peak Vel. rms. Acc. rms.3 3 Acc. peak. U p-p p-p t i rms rms U 4ms U p W U= U n T : 8ms4ms W JIS B97:989 W : 4ms rms rms U rms T T u dt N N i u i u U W rms U rms U T : 8ms U p-p p-p 9% W 4
U 4ms rms 9% rms W rms p-p. T. T T : 8ms W U 4ms rms 9% rms W rms p-p. T. T T : ms W U 4ms rms 9% rms W rms p-p. T. T T : 4ms W rms 5% 5
5 m/s 5-5 - -5 A rms dt i.83m/s ISO 86 Mechanical vibration Evaluation of machine vibration by measurements on non-rotating parts JIS B 96 m/s 3 3 ISO 799 Mechanical vibration of non-reciprocating macines Measurements on rotating shafts and evaluation criteria JIS B 9 τ:ms τ:5ms ISO ISO 3373-5.. () 6
Direct Coupled, Center-hung Tach 5 points, tach Motor Machine Gearbo-driven points, tach Motor Tach Gearbo Machine ISO799- Direct Coupled, Over-hung Tach 5 points, tach Fan Motor 3 points, tach Fan Motor Belt Drive, Center-hung Tach Belt Drive, Over-hung Tach Fan Motor Fan Motor 5 points, tach 5 points, tach IRD 7
S B D A M S B D A M S B D A M (ISO 3373-) DE d (t) (S) D A S B d S t D sin t S D S d BS d d B S t D D sint d B B t t DB sint t A B S d S t t d t d t B BS D B t AB d t B S 8
ISO799-3 y ISO 3373-9
ω:.73ω:.4 ω:.74ω:.3 μm 5 5-5 - -5 Ω -5 - -5 5 5 ω:.7ω:.5
y t bsint q.6 p.6 r.6 a :.6 b :.6 θ: 9 t bsint y t a sint t a sint q p p.4 r q.4.6.3 a :.55.3.6 b :.4 θ: -5 r a :.55 b :.4 θ: 5 p q r y t bsint 9 rpm ( f=n/6 5. Hz) q p r t a sint (RMS) (RMS) prms p p rms = 8. mm/s P.4 mm f qrms q q rms = 8.7 mm/s Q.8 mm f rrms r r rms = 9.6 mm/s R.44 mm f y t a sint t bsint P=.4 mm Q=.8 mm.8.44.5.4 a.5 b.4.5.84 P mm Q mm R mm b = P Q a R.5P.5 R Q arccos.73a P.5 R=.44 mm.44.8 arccos.8.73.84.4 t.84sint.8 t.4 sint y
3 4 振動加速度は弾性波振動で 次元 A C B D vertical horizontal aial radial tangential tangent aial 6 3
3 Aial Tangential Radial.5 5 5. 84 7.857 5 89.857. 84 5...5 84 3 89.8rpm 84 3 5 84 3 84 3 5 36 36 振動計測の基礎
V. mm/s 5 4 3 - - -3 8 ms ( φ) SSTVM-3VI 5 4 φ y(t) Re(DC) 3 P/R PLL cos sin - - Im(DC) y -3 8 ms Re Im DC yt cos t dt a cos DC yt sin t dt a sin -y 9 9 8 mm/s 4mm/s 8 445 9 6 595 3 7 775 85 9 94 97 3 5775 355 47 3345 369 348 33 375 3 38 7 7 4