SAW 14 2 M3622
i 1 1 1-1 1 1-2 2 1-3 2 2 3 2-1 3 2-2 5 2-3 7 2-3-1 7 2-3-2 2-3-3 SAW 12 3 13 3-1 13 3-2 14 4 SAW 19 4-1 19 4-2 21 4-2-1 21 4-2-2 22 4-3 24 4-4 35
5 SAW 36 5-1 Wedge 36 5-1-1 SAW 36 5-1-2 38 5-1-3 41 5-1-4 41 5-2 Wedge2 45 5-2-1 SAW 45 5-2-2 47 5-2-3 5 5-3 53 ii 6 55 6-1 55 6-2 55 57 58 59 6
1 1 1-1 1 ( ) 1) 2) 3) ( ) - 1 -
1 1-2 SAW 4) SAW 1-3 1 2 SAW 3 4 SAW 2 5 SAW 2 SAW 3 6-2 -
2 2 5) 128Y X LiNbO3 LiNbO3 2-1 (surface acoustic wave:saw) (interdigital transducer:idt) SAW λ λ/2 2-1 - 3 -
x 2 x 1 2 1885 Lord Rayleigh 1 9% 9 2-1 1/5 ( ) LiNbO3 2-2 x1 (x3 ) xi ui u = A e i i αω υx e ω j ωt υ 3 x 1 ( i = 1 ~ 3) i (=13) υ α x3 x 3 2-2 - 4 -
2 α 3ω α pω = υx 3 υx 3 1 u1 F1 e pe e ω j ωt υx u = 1 α 3ω α pω F 1 = υx 1 3 υx 3 1 u1 j e e e α 3 p ω j ωt υx p =-F2/F1 F1F2 u3 u1 9 2-2 SAW 128Y X LiNbO3 µm 4µm2 IDT 2-3 SAW 2-4 LiNbO3 396 m/s SAW f υ λ υ f = λ 4µm 9.6 MHz - 5 -
2 2-3 SAW LiNbO 3 : [mm] t = 1 IDT 16 43 2 IDT : [mm] 9 16 8.1 : aluminum : µm : 4 µm 2 2-4 SAW - 6 -
2 2-3 2-3-1 SAW (HEWLETT PACKARD IMPEDANCE/GAIN- PHASE ANALYZER 4194A) 2-5 LiNbO3 (G) 9.59 MHz 2-6.1 ml G G G 2 SAW 2 1 2-7.1 ml 9.59 MHz 9.59 MHz - 7 -
2 G [S] 25 2 15 5 9. 9.5..5-5 -5 - B G [MHz] 25 2 15 5 - B [S] 2-5 () 15 15 15 15 G [S] 5 9. 9.5..5-5 B [MHz] G (a).1 ml 5-5 B [S] G [S] 5 9. 9.5..5-5 B [MHz] G (b).2 ml 5-5 B [S] 15 15 15 15 G [S] 5 9. 9.5..5-5 B [MHz] G 5-5 B [S] G [S] 5 9. 9.5..5-5 B [MHz] (c).3 ml (d).4 ml G 5-5 B [S] 2-6 SAW ( ) - 8 -
2 mist Fluid SAW device IDT 15 G 15 G [S] 5 B 5 B [S] 9. 9.5..5-5 [MHz] -5 2-7 SAW ( ) - 9 -
2-3-2 2 9.59 MHz 1 khz 1 msec 9.59 MHz 2-8 IDT LiNbO3 8 V-p 1 khz (1 msec) 2-8 (LDVLaser Doppler Vibrometer, Polytec OFV 51,OFV27) A f V V = 2πfA 2-9 - -
2 2-6 V-p 1 khz G [nm] 3 25 2 15 5 1.5 1..5 [m/sec] 2 3 4 5 6 7 8 [V -p ] 2-9 [nm] 2 15 5 1.2 1..8.6.4.2 [m/sec] 9.5 9.6 9.7 9.8 9.9. [MHz] 2- - 11 -
2 2-3-3 SAW SAW 2-11 ( ) θr θ R = sin 1 V W / V R VR VW θr =23 θ R 2-11 - 12 -
3 3 3-1 3-1 (IDT) 128 Y X (MHz) ( ) IDT IDT 3-1 - 13 -
3 3-2 3-2 ( ) θ R 3-2 3-3 (1) (5) (A) (C) ( ) υ - 14 -
3 (A) (B) (C) (1) (2) (3) (4) (5) T c t 3-3 - 15 -
3 φ 3-4 x x ( ) z xz 2 2 φ φ + = 2 2 x z φ υ ρ σλ g λ πσ υ = g 2 2 π + ρλ λ = 2π / k λ = 2π / k 3-4 - 16 -
3 λ 2πσ υ (3.1) ρλ τ υ λ = υτ (3.1) λ υ = = τ 2πσ ρλ 3 λ 2πσ = 2 τ ρ fe fk τ = 1 f k 3 2πσ λ = (3.2) 2 ρf k fe fk f = n/ 2 k f e n 1 n = f k = f e / 2 () - 17 -
8πσ λ = 2 ρf e 3 1 3 d λ κ 1 3 8πσ d = κ 2 (3.3) ρf e d fe 2/3 fe d 3-5 (3.3) κ 3-5 khz MHz MHz 5 MHz (3.3) κ = 1. MHz 3µm [µ] k k 1 M M [Hz] 3-5 - 18 -
4 SAW 4 SAW 3 2 SAW 2 4-1 SAW 2 4-1 IDT (SAW ) SAW SAW SAW SAW SAW SAW 2 SAW 4-2 4-2 A B Normal - 19 -
4 SAW SAW 4-1 Normal A B IDT SAW IDT SAW 4-2 - 2 -
4-2 4 SAW 4-2-1 2 2-4-2 2 2-4-2 4-2 A B 4-3 G Q 4-1 15 G 15 G [S] 5 B 5 B [S] 9. 9.5..5-5 [MHz] (a) A -5 15 G 15 G [S] 5 B 5 B [S] 9. 9.5..5-5 [MHz] (b) B -5 4-3 - 21 -
4 SAW 4-1 A B G Q A 9.59 MHz 11.1 ms 135.1 B 9.59 MHz 12.7 ms 129.7 4-2-2 LDV 4-4 SAW 4 µm LDV LDV LDV µm 4-5 9.59 MHz 1 khz y IDT LDV 3 mm y 4-5 2 2 SAW IDT 4-4 - 22 -
A [mn] A [mn] 3 4 SAW 18 2 A θ -18.5 1. 1.5 2. 2.5 3. [mm] 3 (a) A 2 A θ -18.5 1. 1.5 2. 2.5 3. [mm] (b) B 4-5 18 θ [] θ [] - 23 -
4 SAW 4-3 SAW 2 9.59 MHz 1 khz 4-6 2 1 1 (2 CH) (1 khz) 2 CH 9.59 MHz 2 CH 2 2 EN MODEL 24L RF POWER AMPLIFIER WAVE FACTORY HEWLETT PACKARD WF1946 3314A CH1 CH1 CH2 Iwatsu DS-8812 CH2 CH1 CH2 4-6 - 24 -
4 SAW VrmsI G 2 W = IV rms = GV rms 1 khz 9.59 MHz 959 859 19.59 1 W/9.59 SAW 2 (1) (.1 ml.15 ml) 1 4-7 SAW 4-7 - 25 -
4 SAW IDT 4-8 (a) (DOW CORNING : HIGH VACUUM GREASE) 4-8 (b)(c) SAW A [mn] A [mn] 3 (a) 18 2 A θ -18.5 1. 1.5 2. 2.5 3. [mm] 3 (b) 2 A θ -18.5 1. 1.5 2. 2.5 3. [mm] (c) 4-8 18 θ [] θ [] - 26 -
4 SAW 4-8 (2) 2 4-9 2 9.59 MHz 1 khz 2 4-9 1.27 mm Normal 1.27 mm.12. 1.27 mm [ml/min].8.6.4.2.8 1. 1.2 1.4 1.6 1.8 2. [mm] 4-9 - 27 -
(3) 4 SAW 2 1 2 4-9.59 MHz 1 khz 1.27 mm.12. 2 9.59 MHz 9.59 MHz [ml/min].8.6.4 1 9.59 MHz.2 2. 4. 6. 8. [W] 4- - 28 -
4 SAW 4-2 1 1/2 1 2 1 1 2 2 (3) 4-11 (a) 4-11 (b) 4-11 (b) 2 IDT θ.1 4-11 (a).8.6.4.2 2 2 3 4 5 6 7 [V -p ] 8 4-11 (b) - 29 -
4 SAW (4) 2 SAW 2 4-12 (a) 2 18 4-12 (b) 2 2 4-12 (c) 9.59 MHz 1 khz 1.27 mm 2 23 (a).12. (b) [ml/min].8.6.4.2 2. 4. 6. 8. [Wh] (c) 4-12 2-3 -
4 SAW (5) 5 mm 5 4-13 9.59 MHz 1 khz 1.27 mm 4-13 [mm] 15.. 5. 5 mm 2.5 cm 2. 4. 6. 8. [W] 4-13 - 31 -
4 SAW (6) 4-14 (a) 1 mm He-Ne 4-14 (b) 4-14 (b) 6 W.25 msec IDT 3.3 mm IDT 4 m/s.8 µsec He-Ne 4. (a) [msec] 3. 2. 1. 2. 4. 6. 8. [Wh] (b) 4-14 - 32 -
(8) 4 SAW Normal 4-15 4-15 4-15 - 33 -
(7) 4 SAW ml ml 4-15 N/m.5.4 [ml/min].3.2.1 : 5.4 W.2.4.6.8.1 [N/m] 4-16 - 34 -
4 SAW 4-4 SAW 2 Normal 1.27 mm SAW 1 2 2 ( ) - 35 -
5 SAW 5 SAW 4 2 SAW SAW 2 SAW IDT 3 2 Wedge IDT 3 2 Wedge2 2 5-1 Wedge 5-1-1 SAW SAW 2 2 SAW IDT 3 5-1 5-1 C D Wedge - 36 -
5 SAW Wedge C SAW D SAW IDT IDT SAW 9.57 MHz 9.57 MHz (a) 1 mm 1 mm 1 mm 27 22 1 mm LiNbO 3 (a) SAW 5-1 Wedge SAW - 37 -
5 SAW 5-1-2 (1) 5-1 C D 5-2 G Q 5-1 2 2 15 15 G [S] G B [S] 5 B 5 9. 9.5..5-5 2 [MHz] (a) C -5 2 15 15 G [S] G B [S] 5 B 5 9. 9.5..5-5 [MHz] (b) D -5 5-2 5-1 C D G Q C 9.57 MHz. ms 81. D 9.57 MHz 11. ms 135. - 38 -
5 SAW (2) LDV C 5-3 x y u v D y 5-4 9.57 MHz 1 khz SAW SAW x y u v A [mn] A [mn] 3 IDT 5-3 2 θ A -18.5 1. 1.5 2. 2.5 3. 3 [mm] (a) C y 18 18 2 θ A -18.5 1. 1.5 2. 2.5 3. [mm] (b) D y θ [] θ [] 5-4 (1) - 39 -
A [mn] A [mn] 3 2 θ 5 SAW 18-18.5 1. 1.5 2. 15 5 [mm] (c) C u θ A -18.5 1. 1.5 2. [mm] (d) C v A 18 θ [] θ [] 5-4 (2) 5-4 (1) (a)(b) y (b).5 mm 18 2 2 5-4 (2) (c) u - 4 -
5 SAW 5-4 (2) (d) v 5-1-3 Wedge 9.57 MHz 1 khz 1.27 mm SAW LDV - 41 -
5 SAW (1) 2 5-5 Wedge 2 (2) 18 SAW 2 2 18 2 5-5 2 1.5.12. [ml/min].8.6.4.2 2. 4. 6. 8 [Wh] 5-5 2. - 42 -
5 SAW (2) 5-6 Wedge 5-7 8 6. 4. 2. [W] 15.. 5. [mm]. 5-6 5-7 - 43 -
5 SAW 5-1-4 5-4 (2) 5-8 5-8 5-8 IDT IDT IDT IDT SAW 5-8 - 44 -
5 SAW 5-2 Wedge2 5-2-1 SAW SAW 2 2 SAW IDT 3 5-9 5-9 E F Wedge2 Wedge_2 E F IDT IDT SAW 9.74 MHz SAW 9.74 MHz (a) 5-9 (1) Wedge2-45 -
5 SAW 1 mm 3 1 mm (b) SAW 5-9 (2) Wedge2-46 -
5 SAW 5-2-2 (1) 5-9 5- G Q 5-2 2 2 15 15 G [S] G B [S] 5 B 5 9. 9.5..5-5 2 [MHz] (a) E -5 2 15 15 G [S] G B [S] 5 B 5 9. 9.5..5-5 [MHz] (b) F 5- -5 5-1 E F G Q E 9.74 MHz 13.5 ms 1.3 F 9.74 MHz 13.4 ms 13.5-47 -
5 SAW (2) LDV 5-11 y u 5-12 SAW u y IDT A [mn] 3 5-11 18 2 A θ -18.5 1. 1.5 2. θ [] A [mn] 3 (a) E y 18 2 A θ -18.5 1. 1.5 2. (b) F y θ [] 5-12 (1) EF - 48 -
5 SAW A [mn] 3 18 2 A θ -18.5 1. 1.5 2. θ [] (c) E u A [mn] 3 18 θ 2 A.5 1. 1.5-18 2. (d) F u θ [] 5-12 (2) EF 5-12 (1) (a)(b) 18 2 2 2 5-12 (2) (c)(d) Wedge - 49 -
5 SAW 5-2-3 Wedge2 9.74 MHz 1 khz 1.4 mm (1) 5-13 Normal Wedge 2 Wedge2 2 5-14 5-14 2 18 2 3 2 [ml/min].16.8.4.12 4. [W] 8. 2. 6. 4. [W] 8. 2. 6..14..6.2 5-14 - 5 -
5 SAW [ml/min] Wedge2.12..8.6.4.2-18 -9 9 18 [] 7 W (2) 5-14 5-15 2 4 W mm Wedge2 mm [mm] 15.. 5. 2. 4. 6. 8. [W] 5-15 - 51 -
5 SAW (3) Wedge2 5 mm 5-16 5 µm MHz µm µm 5-16 ( ) - 52 -
5 SAW 5-3 SAW IDT 3 2 Wedge IDT 3 2 Wedge2 2 2 4 Normal 5-17 Wedge2 5-18 Wedge2 Wedge2 5 5-3 Normal 1 4 W 2 2 2 Wedge2 2-53 -
.16.14 Wedge2 9.74 MHz 9.74 MHz 5 SAW [ml/min].12..8.6.4 Normal Wedge 9.59 MHz 9.59 MHz 9.57 MHz 9.57 MHz.2 [mm] 15.. 5. 2. 4. 6. [W] 5-17 () 8. 2. 4. 6. 8. [W] 5-18 ( ) 5-3 Normal 1 1 1 Wedge 1.4.65 1 Wedge2 3 1.35 5-54 -
6 6 6-1 2 SAW SAW SAW SAW IDT 3 2 Wedge IDT 3 2 Wedge2 2 3 Wedge2 2 2 2 2 Wedge2 2 6-2 SAW - 55 -
6 SAW 2 2 2 SAW SAW SAW SAW IDT IDT SAW - 56 -
James R Friend SAW 2 1 3 1 2-57 -
1) Japan Hardcopy '99(1999) 2) () (1993) 3) (199) 4) SAW 5) US95-2pp. 1-8 (1995) 6) (1978) 7) (1983) 8) 15 (1993) 9) (1988) - 58 -
(1), J. Friend,,, " 2 ", 13 21.9 (2), J. Friend,,, " SAW ", 21.11 (3), J. Friend,,, " SAW ", 14 22.3-59 -
IDT (1) 1. 3 2. 3 (2) 2 Al φ.1 mm 8m Cr cm 2. -3 Pa CrAl - 6 -
(3) 9 3 ( ) (4) 6 LiNbO3 128Y-cut X XY 8 2 ( ) (5) 1 CrAl AlCr - 61 -
Table 1 The kind of etching liquids : = 2 : 1 cc 2 17 g 5 cc - 62 -