イメージセンサ 1 CCDイメージセンサ 1-1 1-2 1-3 1-4 構造 動作原理 特性 使い方 新たな取り組み 2 NMOSリニアイメージセンサ 6 アンプ付フォトダイオードアレイ 6-1 6-2 6-3 6-4 6-5 特長 構造 動作原理 特性 使い方 7 InGaAsリニアイメージセンサ 7-1 7-2 7-3 7-4 7-5 7-6 5 特長 構造 動作原理 特性 使い方 新たな取り組み イメージセンサ 特長 構造 動作原理 特性 使い方 5章 章 2-1 2-2 2-3 2-4 2-5 第 3 CMOSリニアイメージセンサ 3-1 3-2 3-3 特長 動作原理 特性 新たな取り組み 8 InGaAsエリアイメージセンサ 8-1 8-2 8-3 8-4 特長 構成 特性 新たな取り組み 4 CMOSエリアイメージセンサ 4-1 4-2 4-3 特長 動作原理 特性 新たな取り組み 5 測距イメージセンサ 5-1 5-2 5-3 5-4 5-5 特長 構成 動作原理 特性 使い方 9 応用例 9-1 9-2 9-3 9-4 9-5 9-6 9-7 DNAシーケンサ ICP AES装置 発光分光分析装置 分光測光装置 穀物選別機 光チャンネルモニタ SD-OCT (Spectral Domain-Optical Coherence Tomography) 9-8 セキュリティ 入退出管理 障害物検知 形状認識 9-9 すばる望遠鏡の主焦点カメラ用検出器 9-10 小惑星探査機 はやぶさ 99
100
KMPDC0105JH KMPDC0106JC 101
1. 1-1 P1 P2 P3 (Metal) (Oxide film) (Semiconductor) KMPDC0036JB KMPDC0037JA 102
103 KMPDC0038JA KMPDC0039JA KMPDC0040JA
KMPDC0042JB KMPDC0280JA RD RG MOS1 OD P1 SG OG MOS2 OS FD KMPDC0043JB 104
KMPDC0045JB KMPDC0044JA Qinj = Iinj t (1) Qinj : [C] Iinj : [A] t : [s] 105
KMPDC0137JA KMPDC0136JB KMPDC0179JB KMPDC0180JB 106
KMPDC0138JB KMPDC0281JA KMPDC0282JA KMPDC0016JE KMPDC0456JA 107
108 KMPDB0295JC KMPDC0140JA KMPDB0180JA
KMPDC0139JA KMPDC0266JB v = f d (2) v : f : d : KMPDC0267JA 109
KMPDC0320JA KMPDC0321JB KMPDC0461JA 1-2 110
ΔVout = Av Q / Cfd (3) Av : MOSFET Q : [C] Cfd : [F] Sv = q ΔVout / Q [V/e-] (4) q: 1 S7030/S7031: Sv=2.2 μv/e- S11071 : Sv=8.0 μv/e- Cfd = q Av / Sv [F] (5) S7030/S7031: Cfd=48 ff S11071 : Cfd=12 ff KMPDB0280JB KMPDB0205JC KMPDB0383JA 111
KMPDB0385JA KMPDB0110JA 112
PRNU = 100 [%] (6) Vsat = FW Sv (7) FW : Sv : LR = ( 1 - ) 100 [%] (8) Sm : Tm : S : T : KMPDB0210JA KMPDB0211JA 113
= n CTI (9) n: CTI (Charge Transfer Inefficiency: ) = 1 - CTE KMPDC0046JA KMPDB0152JB 114 KMPDC0047JB
KMPDB0055JB Ns = S (10) S: [e - ] KMPDB0212JA Nt = Nf 2 + Ns 2 + Nd 2 + Nr 2 (11) 115
KMPDB0057JB MTF = sinc {(π f)/(2 fn)} (14) = (12) ( ) = 20 log [db] (13) f : fn : KMPDB0206JA 116
2 Xdep 2 k T σd = (15) Vbb q Xdep: k : T : Vbb : q : 1 KMPDC0048JA KMPDB0207JA KMPDB0281JB 117
118 KMPDB0208JA KMPDC0285JA KMPDC0286JA
119 KMPDB0282JA KMPDC0287JA KMPDB0283JA KMPDB0284JB
KMPDC0412JA 120
1-3 KMPDC0413JA 121
( ) ( ) ( ) Tpwv P1V Tovr P2V, TG P1H Tpwh,Tpws P2H SG RG Tpwr OS KMPDC0050JB ( ) ( ) Tpwv P1V P2V, TG P1H P2H SG RG OS Tovr P2V, TG P1H Tpwh, Tpws P2H SG RG OS Tpwr KMPDC0049JB 122
( ) ( ) Tpwv P1V P2V, TG P1H P2H SG RG OS Tovr P2V, TG P1H Tpwh, Tpws P2H SG RG OS Tpwr KMPDC00145JA ( ) ( ) Tpwv P1V P2V, TG P1H P2H SG RG OS Tovr P2V, TG Tpwh, Tpws P1H P2H SG RG Tpwr OS KMPDC0051JB 123
Tpwv P1V P2V, TG P1H P2H SG RG OS Tovr P2V, TG Tpwh, Tpws P1H P2H SG RG Tpwr OS KMPDC0146JA 124
) 1-55 (a) P1V P2V TG KMPDC0147JA ) 1-56 (a) P1V P2V TG KMPDC0148JA 125
VDD +Vcc P1V P2V Rd Rd 10 μf 6 5 4 7 10 μf 3 VEE EL7212 2 2.2 k 2.2 k 100 p 100 p 2.2 k 2.2 k 18 17 16 15 14 13 12 11 Y1 Y2 Y3 Y4 Y5 Y6 Y7 Y8 74HCT540 20 A1 A2 A3 A4 A5 A6 A7 A8 G1 G2 10 0.1 μf 2 3 4 5 6 7 8 9 1 19 P1V_in P2V_in VDD: High VEE: Low Rd: ( ΩΩ) KMPDC0052JB 126 KMPDC0183JA
KMPDC0303JB KMPDC0304JA 127
KMPDC0305JA KMPDC0306JA KMPDC0053JC 128
KMPDC0457JA KMPDC0382JB 129
KMPDB0328JA KMPDC0381EA Nt(x, y, t, T) = Nd(x, y, T) t + Nb(x, y, T) (16) x : y : t : T : CCD Nd(x, y, T): [e - /pixel/s] Nb(x, y, T): I(x, y) = Nt(x, y, t, T) + i(x, y) r(x, y) (17) i (x, y): r(x, y): 130 KMPDC0382JA
KMPDB0243JA KMPDC0206JA KMPDB0179JA 131
KMPDB0384JA KMIRC0023JA 132
1-4 KMPDC0458JA KMPDC0459JA 133
2. 2-1 KMPDC0020JA 2-2 2-3 134
2-4 KMPDB0161JA PRNU = (ΔX/Xave) 100 [%] (1) Xave: ΔX : KMPDB0042JB 135
2-5 KACCC0149JA KMPDC0024JA Vout = Qout/Cf (2) 136
3. 3-1 3-2 KMPDC0150JC 137
138 KMPDC0312JA KMPDC0462JA
139 KMPDC0407JA KMPDC0408JA KMPDC0293JA KMPDC0463JA
KMPDC0292JA 140 VWO - VBO CTF = (1) VW - VB VWO : VBO : VW : VB : KMPDC0226EA
141 KMPDC0070JA KMPDB0291JA KMPDC0464JA KMPDC0465JA KMPDC0466JA
142 KMPDC0467JA KMPDB0308JB KMPDC0232JC KMPDC0279JB
3-3 KMPDC0233JC KMPDB0250JE 143
4. 4-1 4-2 144
KMPDC0468JA 4-3 KMPDC0197JA 145
5. 5-1 5-2 KMPDC0469JA 146
Td = {V2/(V1 + V2)} T0 (3) L = 1/2 c Td = 1/2 c {V2/(V1 + V2)} T0 (4) c: (3 10 8 m/s) KMPDC0430JA KMPDC0470JA KMPDC0443JA 5-3 V1 = Q1/Cfd1 = N Iph {(T0 - Td)/Cfd1} (1) V2 = Q2/Cfd2 = N Iph (Td/Cfd2) (2) Cfd1, Cfd2 : N : Iph : T0 : Td : 147
5-4 KMPDC0471EA KMPDB0389JA KMPDC0472EA 5-5 KMPDB0390JA 148
KMPDC0473JA KMPDB0391JA KMPDB0392JA KMPDB0393JA 149
6. KMPDC0186JA 6-1 6-3 6-2 150
KMPDC0153JA 6-4 KMPDB0220JA 6-5 KMPDC0294JB 151
7. 7-1 7-2 152
7-3 KMIRC0033JC KMIRC0034JA KMIRC0039JA 7-4 153
KMIRC0019JB y = ax γ + b... (1) KMIRB0081JA y: a: () x: γ: b: (=0 ) KMIRB0082JA 1.24 λc = [ m]... (2) Eg Eg: [ev] 154
PRNU = (ΔX/X) 100 [%]... (3) X : ΔX: X KMIRB0068JB KMIRB0026JC KMIRB0065JB 155
KMIRB0027JC KMIRB0028JA Vd = ID (Ts/Cf) + Voff... (4) Vd : [V] ID : [pa] Ts : [s] Cf : [pf] Voff : ROIC [V] Tsmax = Cf Vsat/ID... (5) IDT = IDT1 β (T - T1) [A]... (6) N = Nd 2 + Ns 2 + NR 2... (7) 156
2ID Nd = TS [e - rms]... (8) q 2IS Ns = TS [e - rms]... (9) q Is: q : 1 Ts Nd = 2q ID [V rms]... (10) Cf Ts Ns = 2q IS [V rms]... (11) Cf 7-5 KMIRB0030JB KMIRC0013JA KMIRB0029JB 157
KMIRB0031JC KMIRC0035JA KMIRB0032JC 158
KMIRC0023JA tscan = (tc 14) + (tr N)... (12) = 1 [ s] 14 + 8 [ s] 256 = 2062 [ s] KMIRC0024JA tc: CLK N: = 1/( + tscan)... (13) = 1/(6 [μs] + 515.5 [μs] = 1917 [lines/s] 159
KACCC0224JB KMIRC0050JC 160
tscan = (tc 12) + (tr N)... (14) = 0.2 [ s] 12 + 0.2 [ s] 512 = 104.8 [ s] tc: CLK N: = 1/( + tscan)... (15) = 1/(17.8 [μs] + 104.8 [μs] = 8156 [lines/s] 7-6 161
8. KMIRB0084JA 8-1 8-2 162
KMIRC0078JA 8-3 KMIRC0036JB KMIRC0079JA KMIRC0019JB y = ax + b (1) y : a : () x : : b : (=0) 163
PRNU = (ΔX/X) 100 [%] (2) X : ΔX: X Vd = ID (Ts/Cf) + Voff (3) Vd : [V] ID : [pa] Ts : [s] Cf : [pf] Voff : ROIC [V] IDT = IDT1 (T - T1) [A] (4) KMIRB0085JA KMIRB0086JA 164
N = Nd 2 + Ns 2 + Nr 2 + NR 2... (5) 8-4 9. 9-1 9-2 KMPDC0204JA KMPDC0205JA 165
9-3 9-4 9-6 KMIRC0037JA 9-5 KMIRC0038JA 9-7 166
9-8 KMPDC0460JA KMPDC0474JA 9-9 KMPDC0478JA KMPDC0475JA KMPDC0476JA 167
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