1 5 1.1................................ 5 1.2 MPGD.......................................... 6 1.2.1 GEM...................................... 6 1.2.2

19 GEM 2 2008/3/13

1 5 1.1................................ 5 1.2 MPGD.......................................... 6 1.2.1 GEM...................................... 6 1.2.2 MICROMEGAS................................ 7 1.2.3 MSGC...................................... 7 1.3 X......................... 8 2 9 2.1............................... 9 2.1.1..................................... 9 2.1.2................................. 10 2.1.3................................... 11 2.2............................... 11 2.2.1..................................... 11 2.3 5.9keV X........................... 12 2.3.1 X.................................... 12 2.3.2.................................. 12 2.3.3................................... 13 2.4............................... 13 3 GEM(Gas Electron Multiplier) 14 3.1 GEM........................................ 14 3.2 GEM....................................... 14 3.3 GEM................................ 15 3.4 GEM........................... 16 4 17 4.1........................................... 17 4.1.1................................... 17 4.1.2.................................. 17 4.1.3...................................... 18 4.1.4.................................. 18 4.1.5............................. 18 4.1.6..................................... 18 4.2................. 19 4.2.1 V GEM.......................... 20 1

4.2.2 E D............................ 22 4.2.3 E I............................. 24 4.2.4 E T............................ 25 4.2.5 G T............................ 28 4.2.6 G I............................. 30 4.3......................................... 32 4.3.1.................................. 33 4.3.2.................................. 33 4.3.3..................................... 35 4.3.4................................. 35 4.3.5....................... 37 4.3.6 E T.................... 39 5 GEM 42 5.1 100µm GEM..................................... 42 5.1.1.................................. 42 5.1.2 V GEM.......................... 42 5.1.3 E D E I.......................... 44 5.1.4 90µm............................ 44 5.2 25µm GEM...................................... 46 5.3 GEM........................................ 48 5.3.1..................................... 49 5.4 Radiation GEM..................................... 49 5.5 GEM........................................ 49 5.5.1 E D............................ 51 5.5.2 E I............................. 52 5.5.3 V GEM.......................... 52 6 ASIC FPGA GEM 54 6.1 ASIC FPGA............. 54 6.2...................................... 57 6.3......................................... 58 6.3.1 ASIC.................................. 58 6.3.2 FPGA.................................. 61 6.4 V TH........................................... 63 6.4.1 V chip TH....................................... 63 6.4.2 VTH ch....................................... 63 7 GEM 64 7.1............................... 64 7.2......................................... 65 7.3 B-GEM......................................... 65 7.4 B-GEM......................... 66 7.4.1.................................. 66 2

7.4.2 1 V GEM.................. 67 7.4.3..................................... 69 7.5 10 B............................ 70 7.5.1.................................. 70 7.5.2..................................... 71 7.6 B-GEM.......................... 72 7.6.1..................................... 72 7.7......................................... 73 7.8 γ............................ 73 7.9....................................... 74 7.9.1.................... 74 7.9.2 1.6mm................ 75 7.9.3............................ 76 7.9.4 0.8mm................ 76 8 78 8.1 MUSASI......................................... 78 8.1.1.................................. 79 8.1.2.................................. 82 8.2 NOP........................................... 86 8.2.1.................................. 86 8.3 MINE2......................................... 87 8.3.1..................................... 87 8.3.2.............................. 90 8.3.3......................... 91 8.3.4............................. 91 8.3.5................... 93 8.4 MINE1......................................... 95 8.4.1........................... 95 8.4.2......................... 98 8.4.3.................................. 98 8.4.4.................................. 99 8.5 B-GEM........................ 102 9 GEM X 103 9.1 GEM X............................ 103 9.2...................................... 103 9.3 2.................................... 105 10 106 10.1 GEM GEM............. 106 10.2.................................. 106 10.3 X.................................. 106 10.4...................................... 107 3

108 4

1 ( ) MPGD(Micro Pattern Gas Detector) MPGD X MPGD GEM X (J-PARC) X 1.1 (10 5 ) 5

1.2 MPGD MPGD MPGD 3 1. GEM(Gas Electron Multiplier) 2. MICROMEGAS(Micromesh Gaseous Detector) 3. MSGC(Micro Strip Gas Chamber) 1.2.1 GEM GEM 10 5 Hz/mm 2 ( ) GEM 1.1: GEM( 70µm 140µm) 6

1.2.2 MICROMEGAS MICROMEGAS 50µm 1.2: MICROMEGAS 1.2.3 MSGC MSGC µ-pic GEM 1.3: µ-pic 7

MPGD GEM 1.3 X X GEM GEM X 3 He GEM 20cm 20cm 50 1mm X CCD X 1 1 X GEM X 1 1 X X 200keV 10 FWHM 0.3mm 500keV 1.7 FWHM 1mm 20cm 20cm 8

2 GEM [1] 2.1 2 (γ ) ( ) 3 1. 2. 3. 2.1.1 E B E B K 500keV 50keV 9

2.1: 2.1.2 ( ) E E 2.1 E = 0.51 [MeV ] (2.1) 1 cosθ + 0.51/E 0.51MeV (θ=0) θ = π/2 0.51MeV 0.6 5MeV 0.05 15MeV 2.2: 10

2.1.3 2 1.022MeV 2.3: 2.2 2.2.1 ( 100m/s) ( ) 11

2.3 5.9keV X Ar Ar K 3.2keV X 55 Fe X 5.9keV 5.9keV X ( ) 3.2keV 2.7keV Ar M Ar 100 Ar M L K 2.3.1 X X X X Ar M X K M Ar L X X K X L 110 2.3.2 M K 3.2keV Ar 230 12

2.4: E auger X E through Ar E auger E through E auger : E through = 85 : 15 2.3.3 de/dx 55 Fe X 55 Fe X 5.9keV 2.2 n = 5900 w[ev ] (2.2) w 1 Ar Ar w 26eV 230 2.4 13

3 GEM(Gas Electron Multiplier) GEM 3.1 GEM GEM ( ) 5µm GEM 50µm GEM [2] 10cm 10cm 50µm 70µm 140µm V GEM ( ) 10 5 Hz/mm 2 GEM GEM MICROMEGAS GEM [3] 3.2 GEM GEM CERN F.Sauli CERN [4] GEM 1. 2. 3. CERN GEM 2. 3. 3.1 1. 14

2. 3. 3. 3.1: 3.3 GEM GEM GEM GEM GEM v 1 2 mv2 3.2: 15

3.4 GEM GEM GEM1 GEM1 GEM R D ( ) R T ( ) R I ( ) 3 3.3 GEM1 R D GEM1 GEM2 GEM2 GEM3 GEM R T1 R T2 GEM3 R I R D GEM GEM (collection efficiency) R T GEM GEM GEM R I GEM GEM (extraction efficiency) GEM collection efficiency GEM extraction efficiency 3 3 GEM 3.3: GEM 3 50µm GEM 100µm GEM 16

4 GEM GEM 4.1 4.1.1 4.1 4.1 5mm 20cm 20cm 5cm GEM 4.1: 4.1.2 10cm 10cm 1.6cm 1.6cm 6 6 ( 4.2) 17

4.2: 4.1.3 Belle CDC(Central Drift Chamber) 300mV/pC 10 4.1.4 NIM CAMAC 2 NIM CAMAC ADC 2249W 300nsec ADC 2390pC/ch NIM CAMAC 4.1.5 ADC Mean Pedestal (ADC ) (Mean Pedestal) ( ) (1.6 10 19 ) 4.1.6 ( ) (GEM3 ) 18

4.3: 4.4 4.4: 4.2 GEM GEM V GEM E D E T E I G T G I 19

4.1 P10 Ar-CO 2 P10 Ar-CH 4 (90-10) Ar-CO 2 Ar-CO 2 (70-30) 4.1: V GEM (V) E D (kv/cm) E T1 (kv/cm) E T2 (kv/cm) E I (kv/cm) V GEM P10 290 360 0.5 1.8 1.8 3.6 Ar-CO 2 320 390 1.3 2.8 2.8 6.0 E D P10 320 0.1 2.5 1.6 1.6 3.2 Ar-CO 2 350 0.3 3.5 2.1 2.1 5.95 E I P10 320 1.0 1.6 1.6 0.2 7.8 Ar-CO 2 350 1.5 2.1 2.1 0.8 9.4 E T P10 320 1.0 0.4 2.9 0.4 2.9 3.2 Ar-CO 2 350 1.5 0.7 3.8 0.7 3.8 5.95 E T1 Ar-CO 2 350 1.3 0.4 3.9 2.1 5.95 E T2 Ar-CO 2 350 1.3 2.1 0.4 3.9 5.95 G T E T P10 320 1.0 0.4 3.9 0.4 3.9 3.2 Ar-CO 2 350 1.5 0.3 3.2 0.3 3.2 5.95 G I E I P10 320 1.0 1.6 1.6 0.3 7.8 Ar-CO 2 350 1.5 1.6 1.6 0.7 10.5 ADC GEM GEM GEM GEM 4.2.1 V GEM GEM V GEM V GEM V GEM GEM GEM GEM1 ( V GEM ) GEM2 3 V GEM V GEM 55 Fe 5.9keV X P10 Ar-CO 2 4.1 4.5 20

4.5: 4.6 GEM3 10 2 10 5 P10 55 Fe X 225 V GEM =290V 3 210 1 6 V GEM 1V 9 Ar-CO 2 55 Fe X 213 V GEM =320V 3 210 1 6 V GEM 1V 7 4.6: V GEM V GEM P10 300 350V Ar-CO 2 330 380V 21

4.2.2 E D R D GEM collection efficiency 4.7 R D E D 4.7: 4.8 4.8 Maxwell Garfield ( 4.9) GEM GEM Ar-CO 2 P10 R D GEM R D GEM E D GEM 22

4.8: E D 4.9: Maxwell Garfield E D 23

4.2.3 E I R I GEM extraction efficiency 4.10 R I E I 4.10: 4.11 4.12 GEM 24

4.11: E I 4.12: Maxwell Garfield E I 4.2.4 E T R T GEM GEM ( ) GEM 4.13 E T1 E T2 2 4.14 GEM E I E T1 E T2 4.15 E T1 E T2 2 4.16 25

4.13: 4.14: 2 26

4.15: E T1 E T2 4.16: E T1 E T2 2 27

R T 4.13 GEM1 GEM2 R I GEM2 GEM3 R D E T 2 4.17 4.17: 4.17 GEM GEM 4.2.5 G T G T E T 4.18 G T 1 2 4mm P10 4.19 E T P10 G T G T Ar-CO 2 4.20 Ar-CO 2 28

4.18: 4.19: G T (P10) 29

4.20: G T (Ar-CO 2 ) 4.2.6 G I G I E I 4.21 G I 0.5 1 2 4mm P10 4.22 Ar-CO 2 4.23 G I 30

4.21: 4.22: G I (P10) 31

4.23: G I (Ar-CO 2 ) 4.3 GEM 4.24 4.25 50mm 0.2mm 64 4.24: 32

4.25: 4.3.1 4.26 CAMAC ADC pulse transfomer 30m ( 0.5m) 4.3.2 GEM 3 4.27 G D =4mm G T1 =2mm G T2 =2mm G I =1mm 4.27 55 Fe X 4.27 GEM ADC X 33

4.26: 4.27: 34

4.3.3 64ch ( ) 4.28 (0) ( ) 4.29 1 4.28 0-2 +2-2 +2 4.28: strip 4.29: -2 0 +2 Strip 4.30 4.28 0-4 +4 4.31 0-6 +6 4.29 4.31 X 4.3.4 (Center Of Gravity: ) 35

4.30: -4 0 +4 Strip 4.31: -6 0 +6 Strip 36

1. ADC 2. 5 3. X 5 ADC ADC Y 1 5 4. C.O.G P10 Ar-CO 2 V GEM 4.32(P10) 4.33(Ar-CO 2 ) 4.32: (P10) 4.32(P10) 4.33(Ar-CO 2 ) GEM X 4.3.5 3 GEM 2 GEM G D G T G I G Total (Total Gap) G Total 37

4.33: (Ar-CO 2 ) G D G Total = G D 2 + (G T1 + G T2 ) + G I 4.2 3 GEM G D =4mm G T1 =2mm G T2 =2mm G I =1mm G D G T1 G T2 G I =4 2 2 1 G Total 7mm 2 GEM G D G T1 G I =1.5 2 1 G Total 3.75mm 2 GEM 1 G T1 4.2: GEM GEM structure G Total P10 Ar-CO 2 3 GEM G D G T1 G T2 G I =4 2 2 1 7 0.465 G D G T1 G T2 G I =1.5 2 2 1 5.75 0.417 0.207 G D G T1 G T2 G I =1.5 1 1 2 4.75 0.390 0.203 G D G T1 G T2 G I =1.5 1 1 1 3.75 0.343 0.181 2 GEM G D G T1 G I =1.5 2 1 3.75 0.340 0.173 G D G T1 G I =1.5 1 1 2.75 0.157 4.2 G Total 38

GEM G Total GEM G Total 4.34 Magboltz ( ) GEM 4.34: 4.34 GEM Ar-CO 2 X 4.3.6 E T R T 4.35 5.1 4.3: E T V GEM (V) E D (kv/cm) E T1 (kv/cm) E T2 (kv/cm) E I (kv/cm) E T P10 335 0.5 0.7 3.0 0.7 3.0 3.3 Ar-CO 2 380 0.5 1.0 3.5 1.0 3.5 5.18 4.36 39

4.35: 4.36: E T 40

P10 Ar-CO 2 P10 Ar-CO 2 GEM 100µm 41

5 GEM 5.1 100µm GEM 50µm GEM 3 50µm GEM 3 1 GEM 100µm GEM Ar-CO 2 [5] 100µm GEM 10cm 10cm LCP( ) 100µm 70µm 90µm 140µm 70µm 90µm 50µm GEM 70µm 90µm LCP(Liquid Crystal Polymer) 50µm GEM V GEM E D E I 5.1.1 5.1 100µm GEM 55 Fe 50µm GEM 5.3 5.1.2 V GEM 5.2 100µm GEM V GEM 50µm V GEM 50µm GEM 100µm GEM 50µm GEM3 3000 42

5.1: 5.1: 100µm GEM V GEM (V) E D (kv/cm) E I (kv/cm) 70µm V GEM Ar-CO 2 540 680 0.75 7.0 E D Ar-CO 2 660 0.3 3.5 6.0 E I Ar-CO 2 660 0.75 1.0 9.2 90µm V GEM Ar-CO 2 600 740 1.5 6.0 E D Ar-CO 2 660 0.1 3.5 6.0 5.2: 50µm GEM 100µm GEM V GEM 43

5.1.3 E D E I E D E I 5.3 5.4 5.3: 50µm GEM 100µm GEM E D 5.4: 50µm GEM 100µm GEM E I E D 50µm GEM 5.1.4 90µm 90µm 140µm V GEM 5.5 70µm 44

5.5: V GEM 70µm 10000 E D 5.6 5.6: E D 70µm 50µm GEM R T 90µm E I 45

5.2 25µm GEM GEM X 25µm GEM 25µm GEM 10cm 10cm 25µm 70µm 140µm 5.7 5.9 5.2 5.2: 25µm GEM E D (kv/cm) E T (kv/cm) E I (kv/cm) 5.7 Ar-CO 2 1.5 1.5 6.6 5.9 Ar-CO 2 1.5 6.6 5.7 25µm GEM 100µm GEM 5.7: 5.8 25µm GEM V GEM GEM GEM 1 46

5.8: 25µm GEM 5.7 5.9 25µm GEM 5.3 5.4 5.9: 47

V GEM (V) pulse height (100µm GEM) (mv) 630 82 645 124 660 174 5.3: 25µm GEM V GEM (V) V GEM (V) pulse height (100µm GEM) (25µm GEM) (mv) 630 135 74 150 82 165 89 645 150 117 165 128 5.4: 25µm GEM 25µm GEM 1 160V 50µm GEM 1 5.3 GEM GEM 1 GEM GEM GEM 23cm 23cm 50µm 70µm 140µm ( 90 Sr 55 Fe) 5.10 5.10: 5.5 48

5.5: GEM V GEM1 2 3 (V) E D (kv/cm) E T1 (kv/cm) E T2 (kv/cm) E I (kv/cm) Ar-CO 2 440 1.0 1.2 1.2 6.0 5.3.1 5.11 5.12 GEM V GEM E D E I 5.11: 90 Sr 5.12: 55 Fe 5.4 Radiation GEM GEM X GEM 100µm GEM γ 60 Co 100Mrad (Radiation GEM ) 100µm GEM 5.13 100µm GEM(70µm ) γ γ 5.5 GEM GEM1 100µm GEM GEM 49

図 5.13: Radiation GEM と通常の 100µm 厚 GEM(70µm 径) の VGEM に対するガス増幅度の 測定 検出面積 10cm 10cm LCP(絶縁体) の厚さ 100µm 孔径 (Cu) 90µm 径 130µm 径 孔径 (LCP) 70µm 径 90µm 径 ピッチ間隔 140µm 電極である Cu の孔径と LCP の孔径を変え 絶縁体の孔径を小さくすることで高いガス増幅度 が得られるようにした この GEM を後退 GEM と呼ぶ 後退 GEM には 2 種類あり それぞれで Cu と LCP の孔径が異なる それぞれの様子を表した ものが図 5.14 と図 5.15 である 図 5.14: 後退 GEM 孔径 90µm 径 (Cu) 図 5.15: 後退 GEM 孔径 130µm 径 (Cu) 70µm 径 (LCP) 90µm 径 (LCP) 50

5.14 5.15 GEM V GEM E D E I 100µm GEM 100µm GEM 5.6 5.6: GEM V GEM (V) E D (kv/cm) E I (kv/cm) E D Ar-CO 2 800 0.3 3.0 6.0 E I Ar-CO 2 800 1.5 3.0 8.5 V GEM Ar-CO 2 750 870 1.5 6.0 Ar-CO 2 750 870 2.0 6.0 Ar-CO 2 750 870 3.0 6.0 Ar-CO 2 750 870 4.0 6.0 Ar-CO 2 750 870 5.0 6.0 Ar-CO 2 750 870 4.0 3.0 Ar-CO 2 750 870 4.0 4.0 Ar-CO 2 750 870 4.0 6.0 Ar-CO 2 750 870 4.0 8.0 5.5.1 E D E D 5.16 5.16: E D E D 51

5.5.2 E I E I 5.17 5.17: E I E I 5.5.3 V GEM V GEM E D 50µm GEM 100µm GEM E D E I E D V GEM E I 6.0kV/cm E D 5.18 5.18: E D V GEM 52

E D 4.0kV/cm E D 4.0kV/cm E I 5.19 5.19: E I V GEM E I 100µm GEM 53

6 ASIC FPGA GEM NIM CAMAC GEM X NIM CAMAC 6.1 6.2 128ch 256ch 6.1: (NIM CAMAC) ASIC(Application Specific Integrated Circuit) FPGA(Field Programmable Gate Array) 6.1 ASIC FPGA GEM 6.2 54

6.2: ASIC FPGA 6.2 GEM 10cm 10cm GEM GEM ASIC 4 FPGA ASIC FE2006 ASIC [6] FPGA XiLinx XC4VLX25-10FF668 FPGA ASIC FPGA NIM+CAMAC 6.3 6.3: PC PC 55

TCP(Transmission Control Protocol) TCP ( ) ( ) TCP ASIC UDP(User Datagram Protocol) UDP TCP 6.1 6.1: (HV) (LV) PC HV- LV- ( ) ( ) ( ) HV ( ) LV ( ) ( ) ASIC FPGA FPGA PC 6.4 6.4: 56

6.2 GEM 6.5 6.5: 6.5 ASIC ASIC 6.7 6.6 GEM 6.6: ( ) 57

6.3 6.7 6.7: ( ) ( ) ASIC FPGA ASIC FPGA ASIC 4 FPGA 1 ASIC FPGA PC ASIC FPGA 6.3.1 ASIC 1 ASIC 8 ASIC ASIC 1 8ch 1 64ch ASIC 6.8 ASIC ASIC DAC DAC V chip TH ASIC DAC DAC V ch TH 58

6.8: ASIC V TH V TH (LVDS) FPGA FPGA DAC ASIC ASIC 6.9 6.9: FE2006 DAC(V chip TH ) (10µsec) PZC(Pole Zero Cancellation) (20nsec ) V ch TH LVDS BPF(Band Pass Filter) 1 6.10 8ch ASIC 6.11 6.11 ASIC 8 FPGA 59

6.10: 6.11: ASIC 60

6.3.2 FPGA FPGA 6.12 6.12: FPGA LVDS FPGA PC SiTCP PC SiTCP DAC V TH ASIC SiTCP [7] SiTCP SiTCP (TCP/IP) TCP TCP SiTCP TCP/IP SiTCP 6.13 SiTCP TCP UDP DAC SiTCP FPGA 6.14 FPGA Virtex4 6.14 FPGA ASIC 4 61

6.13: SiTCP 6.14: FPGA 62

6.4 V TH V TH DAC V TH V TH VTH ch Vchip TH V TH 6.4.1 V chip TH V chip TH DAC FPGA 500mV < V chip TH < +500mV 1bit 4mV 8bit V chip TH PC 6.4.2 V ch TH VTH ch ASIC DAC FPGA 31mV < VTH ch < 0mV 1bit 1mV V chip TH PC DAC +31mV V TH V TH V TH 6.15: V TH ASIC FPGA (NIM+CAMAC) (ASIC+FPGA) 63

7 GEM ( ) 3 He ( 3 He ) 3 He 5mm J-PARC 3 He GEM 7.1 4 ( ) ( ) GEM γ GEM 64

3 He GEM 7.2 GEM 3 He 10 B α 10 B + n 7 Li + α + 2.792MeV 7 Li + α + 2.310MeV 7.1: B-GEM 7.1 GEM 10 B α ( ) α Cu α 10 B 1µm 7.3 B-GEM GEM 10 B B-GEM B-GEM 10 B 0.6µm 0.9µm 1.2µm 1 B-GEM 1.2µm(0.6µm + 0.6µm) 2.1µm(1.2µm + 0.9µm) 2.4µm(1.2µm + 1.2µm) 10 B 10 B 1 GEM GEM 7.2 B-GEM 50µm GEM 100µm GEM α 100 B-GEM 65

7.2: B-GEM B-GEM 1 B-GEM 7.4 B-GEM B-GEM GEM GEM B-GEM 7.4.1 1 V GEM 7.3 GEM 3 7.1 7.3: 66

7.1: 1 V GEM V GEM1 V GEM2 3 E D E T1 E T2 E I (V) (V) (kv/cm) (kv/cm) (kv/cm) (kv/cm) V GEM1 P10 120 300 350 0.3 2.1 2.1 3.5 E D P10 210 350 0.1 1.0 2.14 2.14 3.5 E T1 P10 210 350 0.3 0.2 2.1 2.1 3.5 V GEM1 P10 225 265 350 0.3 0.35 2.1 3.5 V GEM1 2 1 7.4.2 1 V GEM GEM1 V GEM1 7.4 7.4: V GEM1 GEM1 GEM1 E D E T1 ADC 7.5 7.6 67

7.5: E D ADC 7.6: E T1 ADC GEM R T GEM V GEM1 ADC E D ADC 7.7 68

7.7: V GEM1 V GEM1 V GEM 240V 7.4.3 GEM 1 V GEM GEM 7.8 7.9 7.2 7.8: 7.9: V GEM1 2 240V 3 7.10 69

7.2: 1 V GEM1 2 V GEM3 4 E D E T1 T2 E T3 E I (V) (V) (kv/cm) (kv/cm) (kv/cm) (kv/cm) 7.8 p10 350 0.3 1.75 3.5 P10 240 350 0.3 0.3 1.75 3.5 7.9 P10 242 350 0.3 0.3 1.75 3.5 P10 243 350 0.3 0.3 1.75 3.5 7.10: V GEM1 2 Mean 7.10 Mean GEM V GEM 240V GEM 7.5 10 B 10 B 11 B 10 B 20 GEM 10 B 10 B 99 GEM 10 B 1.2µm 2.1µm 2.4µm 3 7.5.1 7.11 7.12 ( 252 Cf) 7.3 70

7.11: 7.12: 7.3: B-GEM V GEM1 V GEM2 E D E T E I (V) (V) (kv/cm) (kv/cm) (kv/cm) Ar-CO 2 233 520 1.5 1.5 6.5 7.5.2 7.13 10 B 10 B 10 B B-GEM 7.13: 10 B 71

7.6 B-GEM B-GEM 10 B 1.2µm 2.4µm B-GEM 10 B 7.14 7.4 7.14 7.4 R T(B B) B-GEM B-GEM R T(B 100µm) B-GEM 100µm GEM E T(B B) E T(B 100µm) 7.14: 7.4: B-GEM V GEM (V) V GEM (V) E D E T(B B) E T(B 100µm) E I (B-GEM) (100µm GEM) (kv/cm) (kv/cm) (kv/cm) (kv/cm) Ar-CO 2 233 520 1.5 1.5 1.5 6.5 7.6.1 7.15 1.2µm 2.4µm 1.2µm B-GEM 8 0.6µm 2.4µm B-GEM 4 1.2µm 2.4µm 1.2µm 7.16 B-GEM 72

7.16: B-GEM 7.15: B-GEM [8] 7.7 7.17 7.17: 7.8 γ 7.18 γ γ γ 10 B 73

7.18: γ 7.9 GEM 10 B 1.6mm 0.8mm 1.6mm 1.6mm 7.9.1 1.6mm 36ch 1.6mm 64ch 64ch 128ch 7.19 NIM CAMAC 16 GEM 74

7.19: NIM+CAMAC 7.9.2 1.6mm 1.6mm 0.8mm 7.20 7.20: 1.6mm 1.6mm 52 52 83mm 83mm 7.21 X Y XY 1.6mm 75

7.21: 1.6mm 7.9.3 4.3 7.22 7.22 7.11 B-GEM 10 B 7.23 KEK 7.9.4 0.8mm 0.8mm 0.8mm 76

7.22: KEK 7.23: 0.8mm 7.24 50µm X Y 7.25 X 80µm 0.4mm 2 0.8mm 0.4mm 2 0.8mm 340µm 7.24: 0.8mm 7.25: 0.8mm 77

8 B-GEM 4 JRR3 4 (MUSASI NOP MINE1 MINE2) 8.1 MUSASI MUSASI 2.24 10 5 Hz/cm 2 5cm 2cm MUSASI 2 8.1 8.2 8.1 8.1: MUSASI NOP 8.2: MUSASI 8.1: MUSASI V GEM (V) V GEM (V) E D E T(B B) E T(B 100µm) E I (B-GEM) (100µm GEM) (kv/cm) (kv/cm) (kv/cm) (kv/cm) Ar-CO 2 233 520 1.5 1.5 1.5 6.5 Ar-CO 2 220 560 1.5 1.5 1.5 6.3 78

B-GEM 10 B 1.2µm B-GEM 10 B 2.4µm (B-GEM ) 10 B 1.2µm (B-Al) 8.1.1 1.6mm 8.3 8.3: ( ) ( ) 10 3 He B-GEM (2.2 ) 3 He 100 0.6µm 10 B GEM 8 24 0.5mm 8.4 1.6mm 0.8mm 16mm 8.5 16mm 1.6 mm GEM 140µm 0.14mm GEM 8.2 ±5 79

8.4: 0.5mm 8.5: 16mm 8.2: 1.00 0.98 1.03 1.02 0.99 0.97 0.99 0.98 1.02 0.98 0.98 0.99 1.00 1.00 0.98 0.97 1.01 1.00 1.01 0.98 1.00 1.05 1.03 1.02 0.98 80

B-GEM 8.6 8.6: MUSASI 2.24 K 2 SeO 4 NaCl 2 NaCl 8.7 hkl K 2 SeO 4 8.8 8.7: NaCl 8.8: K 2 SeO 4 81

8.1.2 0.8mm B-GEM B-Al 2mm 2mm ( 8.9) 8.10 8.11 8.9: 8.10: 8.11: 10 3 He 3 He 100 1.2µm 10 B 1.2µm 10 B GEM 4 82

30 0.5 mm 8.12 8.12: 0.5mm X-ch 2 1. 0.8mm 2. 3. 0.5mm X 0.465mm 1.09mm Y 0.507mm 1.19mm SiO 2 NaCl 2 8.13 NaCl 8.13 GEM 8.14 GEM 2mm 2mm 8.15 8.15 hkl 8.1.2 8.1.2 8.1.2 8.1.2 GEM SiO 2 SiO 2 NaCl NaCl 83

8.13: 8.14: 8.15: NaCl hkl 002-23.4-24 022 10.8 9.00 004 36 36 024 0.90 0.25 hkl 002 46.8 47.7 022 68.3 70.0 004 106.0 107.3 024 126.8 130.0 8.3: hkl 8.4: hkl 84

8.16 8.17 8.16: 8.17: 8.16 8.18 3 He ( 8.19) 8.18: SiO 2 (GEM ) 8.19: SiO 2 ( 3 He ) (30 50 ) 3 He 3 He 11 GEM 30 6 3 SiO 2 85

8.2 NOP NOP 8 10 3 Hz/cm 2 2mm 2mm NOP MUSASI 2 MUSASI 8.20 8.5 8.20: NOP 8.5: NOP V GEM (V) V GEM (V) E D E T(B B) E T(B 100µm) E I (B-GEM) (100µm GEM) (kv/cm) (kv/cm) (kv/cm) (kv/cm) Ar-CO 2 233 520 1.5 1.5 1.5 6.5 Ar-CO 2 200 560 1.5 1.5 1.5 6.3 Ar-CO 2 220 560 1.5 1.5 1.5 6.3 GEM ( ) MINE2 8.2.1 NOP (SiO 2 ) 8.21 8.21 1 2 NOP (RPMT) GEM 8.22 86

8.21: 50µm 8 RPMT RPMT GEM 8.23 GEM MINE2 8.3 MINE2 MINE2 8.8 15000cps 2.5mm 2.5mm 8.3.1 MINE2 87

8.22: 50µm 8 8.23: RPMT 88

8.24: 8.24 θ in θ out θ in = θ out Z 8.25 8.25: (fringe) θ in θ out Z XY 8.26 89

8.26: 8.26 (offspecular) ( ) XY 8.3.2 3 He ( 3 He ) ( 8.27) MINE2 8.28 8.28: 8.27: J-PARC J-PARC 90

GEM GEM 8.3.3 MINE2 NOP 8.6 8.6: MINE2 V GEM (V) V GEM (V) E D E T(B B) E T(B 100µm) E I (B-GEM) (100µm GEM) (kv/cm) (kv/cm) (kv/cm) (kv/cm) Ar-CO 2 220 560 1.5 1.5 1.5 6.3 Ar-CO 2 560 1.5 6.3 Ar-CO 2 560 1.5 6.3 8.3.4 MINE2 8.29 8.29: B-GEM 1.5µm 10 B B-GEM( 1.2µm ) 1 2 8.30 91

8.30: 1 1mm 50mm 0.8mm 96 3 He GEM 8.31 8.31: 3 He GEM 8.31 GEM 92

3 He GEM 8.32 8.32: GEM 8.3.5 ( 8.33) 8.34 8.34: 8.33: 93

3 He GEM 2 1 B-GEM ( ) 2 B-GEM 2 B-GEM B-GEM 8.35 8.35: B-GEM 8.36 B-Al 8.37 G10 ( ) 8.36: 8.37: B-GEM 94

8.38 8.39 8.38: 8.39: 8.4 MINE1 MINE1 8.8 15000cps 2.5mm 2.5mm 8.4.1 MINE1 k B h m v E = k B T = 1 2 mv2 = h2 2mλ 2 8.7 95

8.7: (mev ) (K) ( ) 0.1 10 1 120 30 3 5 100 60 1000 4 1 100 500 1000 6000 1 0.4 (5 100meV ) 1 nev ev 3 1. 2. TOF 3. 3 (Neutron Spin Echo: NSE) λ E E λ 8.40: 96

8.40 ( ) 1 1970 Mezei NSE ω L γ n µ N ω L = 4πγ nµ N B h B 8.41 8.41: ( ) ( ) 97

2 8.4.2 MINE1 2 8.8 8.8: MINE1 V GEM (V) V GEM (V) E D E T(B B) E T(B 100µm) E I (B-GEM) (100µm GEM) (kv/cm) (kv/cm) (kv/cm) (kv/cm) Ar-CO 2 233 560 1.5 1.5 1.5 6.3 Ar-CO 2 570 1.5 6.3 8.4.3 MINE1 (500m/sec) 100nsec 50µm B-GEM B-GEM 1 10 B 2.1µm B-GEM 8.42 8.42: 98

3 He 18 ( MUSASI ) 24 (MUSASI ) 1/8(B GEM ) 2.1/1.2( 10 B ) 8/2.2( ) = 19 8.43 Li PMT GEM 8.43: 1.66666µsec GEM 1.67µsec Li PMT 1.71µsec GEM 8.4.4 8.44 99

8.44: B-GEM 2.0µm 10 B B-Al 0.8mm 8.45 6mm 24mm 4 16 8.46 128 64ch 8.46: 8.45: MINE1 8.47 100

8.47: 110kHz A sin(fx + c) + B A B (A/B) 0.50 0.67 MINE2 MINE1 26Hz 40msec MINE 8 9 8.48 8.49 ( 1/100) 109kHz 0.71 10nsec 101

8.48: MINE1 8.49: 8.5 B-GEM B-GEM 1. 3 He 2. 3. 4. γ 5. 3 He 3 He 3 He 5mm 1µsec B-GEM 0.46mm(FWHM 1mm) 10nsec γ γ GEM 10 5 Hz/mm 2 B-GEM J-PARC 102

9 GEM X X X ( 200keV ) X X 9.1 GEM X GEM 2 GEM X Z 10 B GEM(Au-GEM) 10 B Au X Au 9.2 9.1 103

9.1: GEM X V GEM (V) V GEM (V) E D (Au-GEM) (50µm GEM) (kv/cm) P10 253 330 0.31 Ar-CO 2 220 360 1.5 E T(Au Au) E T(Au 50µm) E T(50µm 50µm) E I (kv/cm) (kv/cm) (kv/cm) (kv/cm) 0.31 0.30 1.65 3.3 1.5 1.5 3.0 6.5 GEM 3µm Au 9.1 50µm GEM 3 X 9.1 22 Na γ ( 511keV ) 9.2 511keV γ 9.1: 9.2: 22 Na γ 9.3 MINE1 9.4 10 Au-GEM 0 10 1.6 (1.7 ) X 200keV 7 104

9.3: 9.4: 9.3 2 X 2 X 1.6 mm 0.8 mm 2 50µm 55 Fe X 9.5 KEK 9.6 9.5: 9.6: 0.4mm 2 0.8mm ASIC FPGA 0.4mm 105

10 GEM 10.1 GEM GEM GEM V GEM GEM 10 5 GEM 50µm GEM 3 10 5 (P10 ) GEM GEM GEM 100µm GEM 50µm GEM 100µm GEM 50µm GEM 1 10 6 X GEM GEM 25µm GEM 1 25µm GEM 10 B Au 10.2 B-GEM 1 10 B 2.4µm B-GEM 4 1.2µm 10 B 30 FWHM 1.1mm ASIC FPGA 10 B 2.4µm B-GEM 8 10 B 10.3 X Au-GEM X 55 Fe 106

10.4 GEM 100µm GEM B-GEM Au-GEM X 0.8mm 10.1 ASIC 10.1: 107

( ) ( ) MPGD ( ) ( ) 108

[1] F.Sauli, Principle of operation of multiwire proportional and drift chambers CERN 77-09 (1977). [2] F.Sauli, GEM: A new concept for electron amplification in gas detectors, Nucl. Instrum. Meth.Phys.Res. A 386 (1997) 531-534. [3] SCIENERGY Co., Ltd. (http://www.scienergy.jp/) [4] The Gas Detectors Development Group in CERN (http://gdd.web.cern.ch/gdd/) [5] S.Uno et. al, Performance study of new thicker GEM, Nucl. Instrum. Meth. Phys. Res. A 581 (2007) 271-273. [6] Y.Fujita, et. al, Performance of Multi-Channel and Low Power Front-End ASIC for MPGD µ-pic Readout, 2007 IEEE Nuclear Science Symposium, N15-19. [7] T.Uchida Hardware-Based TCP Processor for Gigabit Ethernet, 2007 IEEE Nuclear Science Symposium Conferences Record, N15-17. [8] Se-Hwan Park, Yong Kyun Kim, and J.K. Kim Neutron Detection With a GEM, IEEE Transaction on Nuclear Science, Vol. 52, Bo. 5, Oct. 2005, 1689. 109