アトラスバレルSCT用量産モジュールの品質保証のシステム

Size: px

Start display at page:

Download "アトラスバレルSCT用量産モジュールの品質保証のシステム"

えいしろうだいほうじ
7 years ago
Views:

1 1

2 2

3 (LHC) ( ) CERN TeV LHC (LEP) LHC 40 MHz cm 2 1 ( cm 2 s 1 ) LHC 10 (ATLAS) LHC LHC 22 m 46 m 15,000 t (SCT) (TRT) SCT (Semi-Conductor Tracker) ( ) SCT SCT 4 ASIC12 2 (40 mrad) 2112 SCT SCT DAQ VME VME (PC) Site Qualification SCT 5 (2002 )2 3

4 1 5 1 LHC SCT 8 1 SCT 8 2 SCT ABCD3T SCT DAQ 22 1 SCTDAQ

5 1 1 LHC (LHC) ( ) (CERN) TeV LHC (LEP) LHC 27 km 14 TeV 40 MHz cm 2 s 1 ( cm 2 s 1 ) 10 LHC 1.1 [1] LHC 10 t W b t Z 0 c Bd Bs µ µ 5

6 主リング周長陽子エネルギールミノシティー入射エネルギーバンチ衝突間隔バンチ陽子数バンチ数ルミノシティー寿命双極電磁石数 1232 台 (14.2 m 長 ) 双極電磁石磁場四極電磁石数 km 7.0 TeV cm - 2 s - 1 ( 低ルミノシティーで 3 年 ) cm - 2 s - 1 ( 高ルミノシティーで 7 年 ) 450 GeV 25 nsec 個 2835 バンチ 10 時間 1232 台 8.4 T アーク部四極磁場勾配 223 T/m 衝突点でのビーム径 16 µm ビーム衝突角度アーク部に 386 台 (3.1 m 長 ) 他に 402 台 200 µrad 1.1 LHC 2 (ATLAS) LHC 4 ( CMS LHCb ALICE) LHC 22 m 46 m 15,000 t (SCT) (TRT) 検出器テクノロジー性能ピクセル 3 層 50 µm 300 µm 内部飛跡検出器シリコンストリップ 4 層 80 µm ピッチストローチューブ 36 層 ~200 µm/ 層電磁カロリメータ液体アルゴン ( アコーディオン型 ) 10%/ E 0.7% ハドロンカロリメータタイルファイバーバレル部 50%/ E 3% 前後方部 100%/ E 10% ミュー粒子検出器ドリフトチューブ 10% pt = 1 TeV 1.2 6

7 1.1 7

8 2 SCT 1 SCT SCT (Semi-Conductor Tracker) ( ) SCT ( 2.1) LHC SCT /cm 2 1 MeV [2][3] SCT 2.1 SCT 8

9 2 SCT 4 6cm 6cm mm mm 285 µm SCT 8448 SCT 2 ASIC ASIC ASIC SCT ASIC 4 ASIC12 2 (40 mrad) 0 (link0) 1 (link1) ( 2.2) 2.2 SCT 9

10 3 ( ) 1 SCT 285 µm ( 2.3) ( ) ( ) AC ( 2.4) SCT

11 2.4 2 CMOS 1 µm 5 µm [1] SCT 80 µm 1 SCT x0 h x0 h/2 x0 /2 x RMS 2 σ x0 h 2 x0 h 2 = + ( x x 1/ µm 0 ) 11 2 dx h = ( h ) 12 2

12 [4] 300 µm 8 nsec 25 nsec [1] SCT 50 nsec 100% LHC V 300 µm 3 [4] V d εv N A + N D d = 2 (2.1) e N N A D e ε NA ND C C = S eε 2V N N A A N D + N D S p-n CV (IV ) 2.1 V I 12

13 [4] a T Eg (1.21 ev) kb ( ev/k) 7 2 IV 2 3 I ( T ) = at Eg exp( ) 2k T 2.5 B 2.5 K ( ) 13

14 4 ASIC ASIC 1 3 L1 L4 L2 L3 CO2 (through-hole) (via-hole) L1 L2 L1 L2 L3 L4 ( 2.6)[5] [6] [7] L1 L2 L3 L4 L1 ABCD3T ( 14

15 ) L2 ABCD3T ABCD3T L4 (Vcc, Vdd) L2 (HV) ABCD3T L3 L2 L1 ABCD3T ( ABCD3T ) ABCD3T (Vdd) (Vcc) L4 (HV) L1 L3 ABCD3T ( ) L4 ABCD3T 15

16 2.7 16

17 5 ABCD3T ABCD3T ATLAS Binary Chip DMILL ATLAS SCT ASIC CEA CERN DMILL BiCMOS 1 rad-hard 取り入れた 40 MHz 50 MHz ABCD3T 132 FIFO ( 2.8)[8] 2.8 ABCD3T 1 1 ( ) CMOS ( ) 17

18 50 mv/fc 0 4 fc 5 20 nsec ENC 1500 e 1 0 DAC DAC 2.5 mv mv fc 3.0 fc ( DAC ) 2 1 ( ) ( ) 0 1 ( 4 2 ) (FIFO ) MHz 18

19 L1 L1 3.3 µs ) 4 L1 L1 L1 3 3 L ( ) 24 (3 8 L1) 8 L1 L1 100 khz 1 1 FIFO Barrel Store 2 Over Flow Empty L1 5 data-avail 3 data-valid end ( 2.1 ( X 1 0 ) 19

20 6 ID end No hit data send-id 7 ABCD Master Mode Master L1 ABCD Master L1 Master 4 8 L1 3 ( ) ( ) (32 ) 100fF 20 (3σ) mv ( fc) mv (0 16 fc) 0.1 fc 20

21 (CAL0 CAL1 CAL2 CAL3) nsec ± 0.2 nsec 64 ( 50 nsec) 40 MHz (25 nsec) DAC ( DAC) 4 DAC DAC ( DAC ) 2 ( 2.2) DAC DAC DAC 0 0 mv 60 mv 4 mv 1 0 mv 120 mv 8 mv 2 0 mv 180 mv 12 mv 3 0 mv 240 mv 16 mv 2.2 DAC 6 TPG1700 ( HVCPG) ( ) ( ) Ω ( Pt100 ) 21

22 3 SCT DAQ SCT DAQ SCT DAQ VME VME PC PC ROOT SCTDAQ ( 3.1)[9] 3.1 SCTDAQ 1 SCTDAQ SCTDAQ SCT SCTDAQ Windows OS (DLL) ROOT ROOT C++ PAW CERN Windows PC National Instruments VME-MXI VME VME 22

23 1 SCT DAQ VME HV MuSTARD (Multi-channel SCT ABC (D) Readout Device) SCT 12 FIFO MuSTARD LVDS (Low Voltage Differential Signaling) [10] SLOG (SLOw command Generator) SLOG ABCD SCT SLOG LVDS CLOAC 12 SCT 40MHz SLOG RAM 3 14 (14-bit Output Enable Register) [11] CLOAC (CLOck And Control) SCTLV ASIC ASIC (Vcc) (Vdd) (Icc Idd) SCTDAQ 2 HV SCTHV KEITHLEY 6517A TAKASAGO CCP R KEITHLEY 196 SYSTEM DMM ABCD MuSTARD SLOG 40 MHz LVDS LVDS MuSTARD 23

24 3.2 ( 2 ) 2 VME C C++ ROOT stdll CINT C++ ROOT ST.cpp stdll ROOT DCS (Detector Control System) ROOT [9] 24

25 4 SCT 2, ( 4.1) [12]

26 2 IV (INITIAL) (TC) (LT) 3 TC Temperature Cycle LT Long-Term V Pt100 ASIC ( 4.2) ASIC V ASIC 24 ASIC 15 ASIC (Icc Idd) 1 26

27 2 1 [12] ( 4.3) x ( 20 mrad ) y z (x-y) (z) MITSUTOYO Quick Vision Pro Quick Vision Pro (z ) x-y x-y 1 µm z 10 µm 4 ( 23 µm 23 µm/sin0.040) x 25 µm y 5 µm x y z ( ) r-φ 3 ( ) 4 8 (x,y) 6 26 x-y 4.4 (Xm,Ym) 4 C1 C4 C1 C2 C3 C

28 4.3 ( )

29 x mhx [µm] y mhy [µm] x msx [µm] msy [µm] x ( ) midx [µm] y ( ) midy [µm] ( ) sepf [µm] ( ) sepb[µm] a1 [mrad] a2 [mrad] a3 [mrad] a4 [mrad] half-stereo [mrad] mm 200 µm z, (z = ax+ by+ c) ( 4.5) r-φ 8 µm 50 µm ( 4.2) 29

30 4.5 z ( ) maxzlower [µm] z ( ) maxzupper [µm] diffmodulethickness[µm] ( ) optimalmaxzerrorlower [µm] ( ) optimalmaxzerrorupper [µm] OptimalMaxZerrorLower RMS OptimalRMSZerrorLower [µm] OptimalMaxZerrorUpper RMS OptimalRMSZerrorUpper [µm] locoolingfacing a [mrad] locoolingfacing b [mrad]

2 IV 0 500 V 10 V 5 (Pt100) 15 ASIC IV IV 0 500 V 4 A

31 2 IV V 10 V 5 (Pt100) 15 ASIC IV IV V 4 A V DAC [9] Vdd Vdd V Vdd 3.5V N B 31

32 ( ) 2. ( ) ON 01X 4.0 fc 2.0 fc 50% 50% 50 1/4 0.8 nsec ( 4.7)

33 (4 mv) DAC DAC ( ) 4 DAC DAC 1.0 fc VT50 ( 50 ) DAC VT mv 2.5 mv 300 mv DAC DAC 1 ( 125% ) 0 1 S S 50 VT50 S ( 4.8) 4.8 S VT50 S S 1 ( ) 33

34 [14] 10 ( fc) S VT50 10 VT50 VT50( Q) Q a b c Gain a 1+ e = + Q / b ae b(1 + e Q / b ( Q) = Q / b ( 4.9) 2.0 fc dead unbonded lost ) c ( 10 ) dodgy 50 mv/fc 1 fc ( 6250 e) e ( 1500 e) 1 34

35 100 khz fc 1.0 fc 2 (fc 2 ) (ln) ( 5.10) 1 fc fc 10.0 fc 1.25 fc ( 4.11)[9] 35

36 ( 0.8 nsec) 10.0 fc ON 01X 10 fc 25 nsec nsec 16 nsec (TM0, TM1) (Pt100) ASIC 15 [13]

37 5 1 Mod1 ( ) Mod2 ( ) Mod3 ( ) Mod4 ( ) Mod5 ( ) ID 1 Mod1 Mod2 CERN (PS) CERN Mod1 CERN 22 Mod3 Mod4 Mod V 15 Mod1 Mod Mod2 Mod3 Mod4 Mod5 Mod1 Mod2 37

38 V 24 Mod2 ASIC ( 5.2 ) Mod2 LT Mod1 350 V Mod3 Mod4 Mod5 ASIC ASIC 1 Confirmation Test ASIC ( 5.2 ) 38

39 5.2 (Vbias)150 V 350 V ASIC 24 ( ) ASIC ( ) Idet TM0 TM1 Icc Idd ASIC Mod2 39

40 x midf ( 5 m) 0.13 mrad x 5.4 optimalrmszerrorlower (Upper) RMS 0 25 µm 40

41 5.3 41

42 5.4 (1) 42

43 5.5 (2) 43

44 2 IV 20 IV 3 IV 500 V 4 µa IV ( 5.6) 5.8 IV 5.6 IV 20 44

45 3 Vdd V Vdd 3.3 V Vdd 3.5 V Mod1 0 ( 5.7 ) 6 ( 5.7 ) 0 16 unit 6 17 unit

46 モジュール Mod1 Mod2 Mod3 Mod4 Mod5 状態 1 fc 相当の閾値電圧マスクチャンネル [mv] ( トリム不能チャンネル ) INITIAL (2) TC (2) LT (3) INITIAL (12) TC (12) LT (12) INITIAL (3) TC (3) LT (3) INITIAL (0) TC (0) LT (0) INITIAL (2) TC (3) LT (3) Mod5 S LT S ( 5.8) Mod1 1 Mod2 1 fc 46

47 5.8 S 47

48 2.0 fc ( 5.2) 55 mv/fc 1550 e ( 5.3) ( LT ) (5 ) 0.47 Mod % 48

49 5.10 INITIAL TC LT LT INITIAL 49

50 5.11 INITIAL TC LT LT INITIAL 50

51 モジュール状態増幅率 [mv/fc] 入力ノイズ [e] Mod1 Mod2 Mod3 Mod4 Mod5 INITIAL ± ± 65 TC ± ± 63 LT ± ± 62 INITIAL ± ± 40 TC ± ± 38 LT ± ± 36 INITIAL ± ± 38 TC ± ± 37 LT ± ± 36 INITIAL ± ± 45 TC ± ± 44 LT ± ± 48 INITIAL ± ± 46 TC ± ± 43 LT ± ± mv/fc 1550 e RMS モジュール Mod1 Mod2 Mod3 Mod4 Mod5 センサーとマスク高ノイズ割合状態未接続の合計チャンネルチャンネル [%] チャンネル INITIAL TC LT INITIAL TC LT INITIAL TC LT INITIAL TC LT INITIAL TC LT

52 ( 5.4) 1 fc Mod1 Mod モジュール平均占有率 (1 fc) ノイズ [e] Mod1 5.0 ± Mod2 1.7 ± Mod3 2.9 ± Mod4 6.0 ± Mod5 2.1 ± fc RMS 52

53 ( 4.12) 16 nsec nsec nsec 53

54 Mod1 Mod2 Mod3 Mod4 Mod5 2 3 Mod1 Mod2 4.5 Mod3 Mod4 Mod ASIC W ( 5.5) モジュール Mod1 Mod2 Mod3 Mod4 Mod5 サーミスタ1 フェイシング ASICの状態温度差 [degc] [degc] [degc] 発熱量 [W] INITIAL TC LT INITIAL TC LT INITIAL TC LT INITIAL TC LT INITIAL TC LT

55 LHC LHC SCT SCT Site Qualification (5 ) 24 5 µm IV 2 fc ENC 55 mv/fc 1450 e nsec 1 (2002 )

56 56

57 [1] Particle Data Group, Review of Particle Physics", The European Physical Journal C3 (1998) 1. [2] ATLAS Inner Detector Technical Design Report",CERN/LHCC/ [3] G. Lindstrom et al., Radiation hardness of silicon detectors - a challenge from high-nergy physics " Nucl. Instrum. and Methods in Phys. Res. A426 (1999) [4] William R.Leo, Techniques for Nuclear and Particle Physics Experiment", Springer-Verlag (1987). [5] [6] [7] T. Kondo et al., Construction and Performance of the ATLAS Silicon Microstrip Barrel Modules, submitted to the 5th International Conference on Large Scale Applications and Radiation Hardness of Semiconductor Detectors (RD01), July 4-6, 2001, Firenze, Italy. [8] ABCD3T Chip Specification Version V1.2, July 24, 2000 [9] P. W. Phillips and L. Eklund, Electrical Tests of SCT Hybrids and Modules Version 3.01, [10] M. Morrissey, SLOG, 28/08/99 [11] M. Goodrick and M. Morrissey, MuSTARD, 17/09/98 [12] ModuleQA SCT-BM-FDR-7 [13] Mechanical and Thermal Performance of Modules SCT-BM-FDR-8 [14] Electrical Performance of Modules SCT-BM-FDR-9 57

ATLAS 2011/3/25-26

ATLAS 2011/3/25-26 2 LHC (Large Hadron Collider)/ATLAS LHC - CERN - s=7 TeV ATLAS - LHC 1 Higgs 44 m 44m 22m 7000t 22 m 3 SCT( ) SCT(SemiConductor Tracker) - - 100 fb -1 SCT 3 SCT( ) R eta=1.0 eta=1.5