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1 Session 11, S12 Highlights from a Recent BEUV Source Workshop & Activities Takeshi Higashiguchi 1 Akira Endo 2 and Gerry O'Sullivan 3 1 Utsunomiya University 2 HiLASE Project, Institute of Physics AS, Czech Republic 3 University College Dublin (UCD) 2012 International Workshop on EUV and Soft X-Ray Sources October 11th, 2012, UCD, Dublin, Ireland
2 JSAP, JPS, LSJ Ad-hoc workshop Sep. 11 th : Matsuyama Sep. 18 th : JPS@Yokohama Sep. 26 th : LSJ@Ashikaga
3 Academic Activities in Japan
4 Ad-hoc EUV & BEUV workshop On Sep. 26, half-day Since 839 or 842???
5 Workshop s participants: 32 members
6 Ad-hoc EUV & BEUV workshop
7 Ad-hoc EUV & BEUV workshop Prof. Gerry
8 Conversion efficiency (%) at 6.7 nm in 0.6% BW and 2p sr Intensity (arb. units) Conversion efficiency (%) at 6.7 nm in 0.6% BW and 2p sr Intensity (arb. units) Conversion efficiency (%) at 6.7 nm in 0.6% BW and 2 sr Fundamental property of BEUV sources low density target DPP CO 2 LPP Pulse separation time (ns) APL 99, (2011). Laser intensity Prepulse: 1.0 x W/cm 2 Main pulse: 5.6 x W/cm 2 Gd Tb Wavelength (nm) APL 99, (2010) I. / D I 0. /e n`` c S L Laser intensity (W/cm 2 ) Spectral structure Wavelength (nm) APL 97, (2010). Wavelength (nm) Self-absorption 1064 nm 532 nm 355 nm ps LPP ns ps fs Peak wavelength Wavelength (nm) 0.1 APL 101, (2012) / Shorter-wavelength extreme-uv sourcesbelow10nm Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Padraig Dunne, Bowen Li, and Gerry O Sullivan APL 97, (2010). APL 100, (2012) Laser intensity (W/cm 2 ) APL 100, (2012).
9 Japan activities for 6.X nm Theoretical from Dr. Sasaki Experimental from Prof. Fujioka
10 Optimization in limited parameter space shows Mo plasma with T e =43eV, n i =10 19 /cm 3, and plasma size=0.3mm, 10 6 W/pstr of EUV power at 6.5nm (0.5%BW) is obtained with spectral efficiency of 1%. - LTE is assumed. - Total output power for 10ns, 10kHz pumping is 100W.
11 Rotating drum cryogenic Xe target Liq. N2 Drum system Cross-section view (10 cm ) 0~1000rpm EUV Laser 2mm side view Laser Ref. S.Amano et al, Rev.Sci.Inst.,vol.77,063114(2006).
12 Measured CE at 6.7nm with 0.6%BW laser pulse 0.8J/10ns lens position 0mm Rotating target L =4x10 12 W/cm 2 (E L =0.8J) Rest target 0.08%@I L =1.5x10 10 W/cm 2 (E L =0.3J) Ref. S.Amano et al., Laser-plasma extreme ultraviolet source at 6.7nm using a rotating cryogenic Xe target, published online in Appl. Phys. B.
13 LHD & VUV 13.5 m Plasma 3.6 m TESPEL (pellet) injector Large Helical Device Type Grooves Wavelength Detector Resolution Spectrometer "SOXMOS" Schwob-Fraenkel 2 m grazing incidence spectrometer or 600 grooves/mm 1 35 nm 2 MCPs + Phosphor + Photodiode Array ~ 0.01 nm
14 LHD discharge with Gd pellet injection 4.5 s 5.1 s 5.9 s Gd pellet injection C. Suzuki et al., J. Phys. B: At. Mol. Opt. Phys. 45,
15 Ag-like Ag-like Pd-like Ni-like Ni-like Cu-like Cu-like Different EUV spectra from Gd ions in??? Discrete LHD T max 2.2 kev T e n e? Narrowed UTA T max 0.24 kev hollo w plasm a T e n e UTA T max 1.0 kev n e T e
16 Resist for 6.x nm
17 Typical EUV Spectrum onsists of: Lines (bound-bound transitions), because of high density, lines from high n states are usually not seen Recombination Radiation (bound-free transitions) which scales as 4 where is the average ionic charge Bremsstrahlung (free-free) For an optically thin plasma: P lines :P recomb :P brem = 100:10:1 In some cases lines cluster together to form a UTA (unresolved transition array) G O Sullivan, EUV Workshop, Ashikaga, Sept 26 th, 2012
18 FAC code calculations for Gd Calculations more complex than for Sn because of open 4f subshell in ions lower than 18+ In low Energy stages, levels of Gd Gd 27+ computed 4f, 5p with and the 4f, FAC code including CI. 5s level crossings give rise to Problem, very low ion stages contain complex open 4f (and 5p) subshells, difficult interacting to calculate. configurations G O Sullivan, EUV Workshop, Ashikaga, Sept 26 th, 2012
19 Δn = 1 3d-4f and 3d-4p UTA emission from Zr Spectral behavior of Zr plasmas as a function of laser laser intensity Resonant 3d 4f (1) and 3d 4p transitions as well as satellite lines from 3d n- 1 4s4f 3d n-2 4s4f (2) G O Sullivan, EUV Workshop, Ashikaga, Sept 26 th, 2012
20 continuity equation momentum equation pdv work イオン熱伝導 ion energy equation 流体 pdv work イオンー電子 温度緩和 電子熱伝導 electron energy equation Laser heating term レーザー multi-group diffusion approximation Radiation heating term 輻射 状態方程式で与えられる 原子過程計算で与えられる
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26 Punch-out is a new method to supply plasma sources for 6.Xnm BEUV light generation. It is difficult to generate Gadolinium droplets because melting temperature of Gd is 1585K that is much higher than 595K of tin s melting temperature. Punch-out target supply method Condition for practical Punch-out Laser (Nd:YAG Laser) glass substrate Gadolinium target Drive Laser (CO 2 Laser) EUV emission Frequency: 10kHz Punch-out laser energy: under 100mJ Flying speed: over 100m/s Flying distance: over 10mm 26
27 Gd mist can be supplied by using the punch-out scheme. 1mm Delay 1µs Delay 3µs Delay 5µs Energy :70mJ Pulse width :300ps Laser Intensity : W/cm 2 Target thickness :3µm 27
28 パルス幅が短いほうが飛翔速度が速くなると考えられる ILE OSAKA パルス幅による飛翔速度の違い 飛翔速度目標値約 100m/s 以上 パンチアウトレーザーエネルギー目標値約 100mJ/shot 以下 パルス幅 4~5ns の時のほうが飛翔速度が速いのはレーザー強度が高くなったためだと考えられる 28
29 Maximum Photon Energy [ev] Laser Compton Scattering MeV For Er (1550nm) 7.2MeV For CO 2 6.7nm 13.5nm nm 1550nm Electron Beam Energy [MeV] レーザー学会第 432 回研究会 2012 年 9 月 26 日足利
30 レーザー学会第 432 回研究会 2012 年 9 月 26 日足利 CO2 Laser Super-Cavity R&D 早稲田大学における CO2 レーザー蓄積共振器開発の様子 CW のレーザー光の蓄積実証試験を行っている Exp. Setup CO2 レーザー Cavity Setup 4M 平面 Cavity
31 CO2 Laser Super-Cavity R&D 10um 用 Cavity からの透過光プロファイル > ほぼ TEM00 の綺麗なプロファイル 波打っているのはプロファイラの特性 実際に 10um の光の蓄積が可能であること 市販のコンポーネントを組み合わせても 50 倍程度の増大率は得られること を確認した レーザー学会第 432 回研究会 2012 年 9 月 26 日足利
32 Experimental set-up SXRL Source Wavelength: λ= 13.9 nm (E = 89.2 ev) Pulse Duration: t = 7 ps Output Energy: nj/shot Total Energy of SXRL beam At Sample Surface: nj/shot Average Fluence: mj/cm 2 レーザー学会専門委員会 レーザー励起 XUV~X 線の産業応用 足利 平成 24 年 9 月 26 日
33 EUV laser spot patterns are recorded by LiF detector. Images of X-ray laser spots, obtained on the LiF detector: 20 x Z(mm) = x A.Ya. Faenov, et al., Optic Letters 34, 941 (2009) レーザー学会専門委員会 レーザー励起 XUV~X 線の産業応用 足利 平成 24 年 9 月 26 日
34 Ablation threshold (J/cm 2 ) XRL (EUV) laser ablation for LiF and Si nm 2ns pulse ps 0.4ps pulse 46.9nm XRL 1.7ns (Italy) EUV XFEL (0.3ps, 61.8nm) LiF photon energy (ev) JAEA (13.9 nm, 7 ps) Si The result shows that the ablation threshold (fluence) for the SXRL is smaller by 2-3 orders of magnitude compared with that of IR laser. レーザー学会専門委員会 レーザー励起 XUV~X 線の産業応用 足利 平成 24 年 9 月 26 日
35 JSAP, JPS, LSJ Ad-hoc workshop Sep. 11 th : Matsuyama Sep. 18 th : JPS@Yokohama Sep. 26 th : LSJ@Ashikaga
36 Ad-hoc EUV & BEUV workshop
37 Thanks a million!!!
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(University College Dublin) 22 2 15 22 4 10 宇都宮大学オプティクス教育研究センター はじめに アイルランドのダブリンにあるアイランド国立大学ダブリン校 (University College Dublin) において 約 2 ヶ月間の短期研究留学を行った O Sullivan 教授と Dunne 准教授の研究室に滞 在し 極端紫外光 (XUV) に関する研究に従事させて頂き
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