目次 1. 会場 1 2. フロアマップ 1 3. 特別招待講演 1 4. 招待講演 2 5. パネルディスカッション 2 6. ポスターセッション 2 7. オーサーズコーナー 2 8. イブニングセッション 3 9. 商業展示 コマーシャルセッション Luncheon Seminar

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1 目次 1. 会場 1 2. フロアマップ 1 3. 特別招待講演 1 4. 招待講演 2 5. パネルディスカッション 2 6. ポスターセッション 2 7. オーサーズコーナー 2 8. イブニングセッション 3 9. 商業展示 コマーシャルセッション Luncheon Seminar 参加費 参加申込要領 キャンセル規定 宿泊施設のご案内 最新情報 シンポジウム企画運営委員会 5 1 会場 講演会 国際ファッションセンター 3F KFC ホール, 2F KFC ホール 2nd (KFC ホール 2nd は 2 日目午後のみ) 東京都墨田区横網 Tel: 都営地下鉄大江戸線 両国駅 A1 出入口すぐ JR 中央総武線 両国駅 東口より徒歩約 6 分 西 口より徒歩約 7 分 商業展示 ポスターセッション 国際ファッションセンター 3F KFC ホール Annex 同上 イブニングセッション 国際ファッションセンター 3F KFC ホール 同上 2 フロアマップ 3F 17. ナノテスティング学会事務局 講演プログラム 6 11 月 19 日 (月) 午前 / KFC ホール 6 11 月 19 日 (月) 午後 / KFC ホール 8 11 月 20 日 (火) 午前 / KFC ホール 月 20 日 (火) 午後 / KFC ホール 月 20 日 (火) 午後 / KFC ホール 2nd 13.)& +DOO スタッフ用.)& +DOO $QQH[ 19. 著者索引 商業展示 賛助会員一覧 18 2F &KLQHVH 5HVWDXUDQWV 3RVW 2IILFH.)& +DOO QG 3 特別招待講演 下記の通り 特別招待講演を実施します 1

2 11 19 ( ) 13:40 14:40 (( ) ) society ( ) 16:35 17:35 (( ) ) ( ) 9:00 10:00 (SDRJ ( ) ) /IoT ( ) 13:00 14:00 ( ) ( ) 10:45 12: ( ) 17:35 18:00 3F KFC Annex () (1 ) ( ) 12:22 12:30 3F KFC () 7 (KFC Annex KFC ) ( ) ( ) 3F KFC 9 (3F KFC Annex) (1 ) 10 Luncheon Seminar ( ) Luncheon Seminar Luncheon Seminar ( ) FIB-SEM Ethos NX5000 TEM FIB-SEM AFM SSRM ( ) ( ) Web Web Web PDF ( ) Web 4

3 ( ) 17:00 10% 100% 14 ( Web 15 Web 16 () ( ) () () ( ) () () () () ( ) ( ) (NGR) Tel/Fax: / NANOTS@ist.osaka-u.ac.jp Web: 18 (1) 9:30 (2) 9: ( ) / KFC Power Device Analysis I (3) 10:20 19 ( ) a.m.,, / SOBIRCH (a, (a, (a, (b, (b / a), b) DLTS SiO 2 /SiC, / :45 11:05 & Commercial Session (C1) 11:05 (C2) 11:12 (C3) 11:19 19 ( ) a.m. Teseda DFT,, / Navigation system AZSA / LAVIS-plus,,, / TOOL EDA 6 (C4) 11:26 (C5) 11:33 (C6) 11:40 (C7) 11:47 (C8) 11:54 (C9) 12:01 (C10) 12:08 (C11) 12:15 Thermal F1,, / / (a, (b / a) 2 1, b) SEM/FIB DualBeam / Materials & Structural Analysis 7nm FIB Taipan G2 / Materials & Structural Analysis FIB-SEM, / & FIB-SEM ETHOS NX5000 (a, (a, (a, (a, (b, (b / a), b) BT STEM-NBD Epsilon,, / Poster Short Presentation 12:22 12:30 Poster Short Presentation Poster Session 1 Poster Session :30 12:

4 Hitachi High-Technologies Luncheon Seminar (L1) 12: ( ) / KFC Special Invited Talk (S1) 13:40 : society 5.0 / & :40 15: Power Device Analysis II (4) 15:00 (5) 15:25 (6) 15:50 (a, (b / a), b) EBIC,,,,,,, / GaN (a, (a, (b, (b, (c, (c / a), b), c) :15 16:35 & Invited Talk (I1) 16:35 :? / :35 18: Poster Session :35 18:30 KFC Annex (7),, / (8),, / (9) Image quality enhancement of an SEM image using conditional generative adversarial networks, / Osaka Univ. Grad. Sch. Information Science and Technology (10) Arbiter PUF NBTI/PBTI,, / (11) Effect of variance stabilization on denoising of low SNR fringe patterns using wavelet hidden markov models, / Osaka Univ. Grad. Sch. Information Science and Technology (12) dc/dz (a, (b / a) LSI, b) (13) C/ z-sndm, / (14) () DCFI,, / Evening Session 18:30 20:30 (I2) 9:00 KFC IMC 2018 ( ) MNE 2018 () ESREF 2018 ( ) ( ) / KFC Invited Talk 20 ( ) a.m. : /IoT / SDRJ () :00 10: Electron Optics & Application (15) 10:20 20 ( ) a.m. (2),, /

5 Panel Discussion 10:45 12:10 (P1) (P2) (P3) (P4) (P5) 20 ( ) a.m. / / / / / / /,,,,, / / / / :10 13: ( ) / KFC Invited Talk (I3) 13:00 : / :00 14: Fault Localization (16) 14:20 (17) 14:45 (18) 15:10 Open defect localization in 1x5 µm 3-D TSV structures by light-induced capacitance alteration (LICA) K.J.P. Jacobs (a, J.D. Vos (a, M. Stucchi (a, I.D. Wolf (a, E. Beyne (a / a) IMEC Dept. 3D and Silicon Photonics Technologies, b) KU Leuven Dept. Materials Engineering (a, (b, (b, (c, (a / a), b), c) m (a, (a, (b, (b, (b, (b, (c / a) &, b), c) :35 15:55 & Fault Localization/Physical Analysis (19) 15:55 (20) 16:20 Characterization of thermal defects using pulsed emission with DBX camera M. Morag, N. Leslie / Thermo Fisher Scientific Analytical Instrument Group, Material & Structural Div., Electrical Fault Analysis Electro Optical Frequency Mapping,,, / (21) 16:45 (22) 17:10 EBAC (a, (a, (a, (b, (c, (d / a), b), c), d) Al/Cu (a, (a, (a, (a, (b, (c, (c / a), b) &, c) :35 17:55 & ( ) / KFC 2nd Metrology and Inspection (23) 14:20 (24) 14:45 (25) 15:10 SEM (a, (a, (b, (b, (b / a), b) CD-SEM (a, (a, (a, (b, (b, (b, (c / a), b), c), / (EIDEC) :35 15:55 &

6 Physical Analysis II (26) 15:55 (27) 16:20 (28) 16:45 (29) 17:10 Non-destructive, high throughput ultrahigh sensitivity micro x-ray fluorescence techniques as an alternative to SIMS for dopant and composition analysis D.W. Yun, D.B. Stripe, S. Lewis, S. Lau, X. Yang / Sigray, Inc. MoS2, / SNDM dc/dv () dc/dz () 2 (a, (b, (b, (b, (b, (c / a), b), c) Al2O3 (a, (a, (b, (b, (a / a), b) :35 17: Beyne, E Jacobs, K.J.P Lau, S Leslie, N Lewis, S Morag, M Stripe, D.B Stucchi, M Vos, J.D Wolf, I.D Yang, X Yun, D.W C C P P C P P C P C P P , C P , I S C C C C C C C C C , 18..3, 13, 27, , P C11 7, 8, 9, 10, 11, 15, C C C I C C P C5... 1, 2, , 8, 9, 11, C C C C I , C ( ) 13:00 17: ( ) 10:00 16:00 KFC Annex (3F) () 1. : 2. : C4 3. TOOL : C3 LAVIS-plus 4. : C2 Navigation system AZSA 5. : 6. : C10 FIB-SEM Ethos NX

7 7. : 8. : 9. : Sigray X XRF, XAS, XRM (X CT) 10. : 11. : MP : C6 13. : 14. : C7,C8,C11 FIB/SEM/TEM 15. : C1 Teseda DFT & Nanotronics : T-Imager 17. : C5 Bni 18. : &3 X (X CT) RKD Asia Pacific Corporation: The Industry Leader in Semiconductor Sample Preparation Equipment 20. : : C9 & 22. : 23. : TEM (DENS Solutions) 24. : AP ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ATE ( ) ( ) ( )NGR ( ) ( ) ( ) ( ) TOOL( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) ( ) Shining Technology Corporation Zurich Instruments 18 ( )

目次 1 タイムテーブル 1. タイムテーブル 1 2. 会場 4 3. フロアマップ 5 4. 特別招待講演 5 5. 招待講演 5 6. パネルディスカッション 6 7. ポスターセッション 6 8. オーサーズコーナー 6 9. イブニングセッション 商業展示 コマーシャルセッショ

目次 1 タイムテーブル 1. タイムテーブル 1 2. 会場 4 3. フロアマップ 5 4. 特別招待講演 5 5. 招待講演 5 6. パネルディスカッション 6 7. ポスターセッション 6 8. オーサーズコーナー 6 9. イブニングセッション 商業展示 コマーシャルセッショ 目次 1 タイムテーブル 1. タイムテーブル 1 2. 会場 4 3. フロアマップ 5 4. 特別招待講演 5 5. 招待講演 5 6. パネルディスカッション 6 7. ポスターセッション 6 8. オーサーズコーナー 6 9. イブニングセッション 6 10. 商業展示 コマーシャルセッション 6 11. 参加費 7 12. 参加申込要領 8 13. キャンセル規定 8 14. 宿泊施設のご案内

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目次 1 タイムテーブル 1. タイムテーブル 1 2. 会場 4 3. フロアマップ 5 4. 特別招待講演 5 5. ポスターセッション 5 6. オーサーズコーナー 6 7. イブニングセッション 6 8. 商業展示 コマーシャルセッション 6 9. Luncheon Seminar 6 10

目次 1 タイムテーブル 1. タイムテーブル 1 2. 会場 4 3. フロアマップ 5 4. 特別招待講演 5 5. ポスターセッション 5 6. オーサーズコーナー 6 7. イブニングセッション 6 8. 商業展示 コマーシャルセッション 6 9. Luncheon Seminar 6 10 目次 1 タイムテーブル 1. タイムテーブル 1 2. 会場 4 3. フロアマップ 5 4. 特別招待講演 5 5. ポスターセッション 5 6. オーサーズコーナー 6 7. イブニングセッション 6 8. 商業展示 コマーシャルセッション 6 9. Luncheon Seminar 6 10. 参加費 6 11. 参加申込要領 7 12. キャンセル規定 8 13. 宿泊施設のご案内 8 14.

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