ITRS2005 DFM STRJ : () 1
ITRS STRJ ITRS2005DFM STRJ DFM ITRS: International Technology Roadmap for Semiconductors STRJ: Semiconductor Technology Roadmap committee of Japan 2
ITRS STRJ 1990 1998 2000 2005 1991 MicroTech 2000 Workshop Report 1992NTRS 1994NTRS 1997NTRS SIA Roadmap Europe Japan Korea Taiwan USA ITRS 1998 Update 1999 ITRS 2000 Update 2001 ITRS 2002 Update 2003 ITRS 2004 Update 2005 ITRS 2005 12 29 [1] STRJ 1998 1999 2000 2001 2002 2003 200 STRJ STRJ STRJ STRJ STRJ STRJ [1] http://public.itrs.net 3
WG, ITRS, STRJ WG WG Design Test Process Integration, Devices, and Structures ITRS Design Session DFM System Drivers Test PIDS STRJ WG WG1 Session 2004SoC WG2 WG6 2004RAM 4
ITRS STRJ ITRS2005DFM STRJ DFM ITRS: International Technology Roadmap for Semiconductors STRJ: Semiconductor Technology Roadmap committee of Japan 5
ITRS2005DFM DFM Critical Dimension NRE MOSFET Critical Dimension Cost NRE: Non-recurring engineering Design for Manufacturability (DFM) Challenge Source Gate Lg Lg Drain Design Methodology 6
Critical Dimension Critical Dimension MOSFET ITRS200310% Year of Production MPU Physical Gate Length (nm) Lgate 3s variation (nm) 2003 45 2004 37 2005 32 2006 28 2007 25 2008 22 2009 20 2010 18 2012 14 Critical Dimension10% DFM ITRS200512% Year of Production MPU Physical Gate Length (nm) Lgate 3s variation (nm) 2003 2004 2005 32 2006 28 2007 25 2008 23 2009 20 2010 18 2012 14 Manufacturable solution exist, and are being optimized Manufacturable solution are known Manufacturable solution are NOT known Source: ITRS 2005 7
CD10 12% DFM 8
NRE Year of Production MPU/ASIC Metal1 ½ Pitch (nm) (Contacted) Mask cost ($m) from publicity available data 2005 90 2006 78 2007 22 SoC (System on a Chip) SoC Workaround FPGAConfigurable Logic Structured ASIC NRE: Non-recurring engineering 68 2008 59 2009 52 2010 45 2011 40 2012 Source: ITRS 2005 9 36 2013 32
Design for Manufacturability (DFM) TAT Challenge 10
DFM:, Challenge Tool Characterize Model 11
DFM: Challenge (MDR) 2MDR Rule 3MDRMDR (Pass/Fail MDR vsmdr MDR Critical RTL to GDS2RET OPC OPC 12
DFM: Challenge InteractionMDR Yeild Post P&R RET Yield 13
250~190nm 130~90nm 65nm~ Source: ITRS 2005 14
65nm Source: ITRS 2005 15
ITRS STRJ ITRS2005DFM STRJ DFM ITRS: International Technology Roadmap for Semiconductors STRJ: Semiconductor Technology Roadmap committee of Japan 16
STRJDFM LSI SoC RAM WG6: Process Integration, and Devices Structures 17
TFSoC 0.18 m, 140min. 200Hr MM MP3 JPEG MPEG4 Java RF Baseband SoC RAM ROM Flash 133MHz 0.18um 133MHz 170mW (typ.) CPU Cache 32KB MFI DSP URAM 128KB XYRAM 16KB MEM Cnt. CPG WDT CMT DMAC RAM VIF SCIF SIOF FLC MMC KEYIF RAM ROM Flash LCD 33MHz CMOS camera Bluetooth Sound NAND/AND Flash MMC KEY 66MHz 18
ITRS 19
STRJ TF, [2] I ON MOSFET CgVdd/Ion Ion Cg Ig Ioff L g t OX V th N A ITRS DC Ioff, Temp. V dd W t R sheet t ILD 20
[2] MOSFET Vth, ( L ) + V ( N ) + V ( Temp. ) V = V ( LER) th th g th A th V th Lg Lg Source -0.7-1.0mV/K -0.8mV/K Drain LER (Line Edge Roughness) - - Gate Source Drain Source Drain 21
(LOP) Typ. 27 Tr.+3 2010 Typ. 27 9.1 Typ. 27 6190 0.37W = 0.36W(AC) +0.006W(Leak) 0.65W = 0.36W(AC) +0.29W(Leak) Typ. 27 +3s 100 Typ. 27 +3s 100 Typ. 27 +3s 100 Typ. 27 +3s 100 11.6W = 1.1W(AC) +10.5W(Leak) 1.27W =1.1W(AC) +0.17W(Leak) Typ. 27 22 +3s 100
STRJ PIDS SNM Line Edge Roughness (LER) SNMSRAM Static Noise Margin V L V R F. Tachibana and T. Hiramoto, Re-examination of Impact of Intrinsic Dopant Fluctuations on SRAM Static Noise Margin, SSDM, pp.192-193, 2004 23
SNM 2003 ITRS LOP45nmSNM 2 SNM Lg, Vdd, Vth, DIBL 4 SNM Lg nm) NA ( 10 18 cm -3 ) DIBL (mv/v) Vdd (V) Vtsat@Vdd =0.7V (V) ITRS 22 6.69 160 0.7 0.22 30 4.45 80 0.8 0.25 2003 ITRS F. Tachibana and T. Hiramoto, Re-examination of Impact of Intrinsic Dopant Fluctuations on SRAM Static Noise Margin, SSDM, pp.192-193, 2004 24
LERSNM Line Edge Roughness (LER)SRAM SNM LER LER =2nm, LER SRAM 2005 31a-P5-8 2005 3 25
ITRS2005DFM Critical Dimension NRE DFM STRJDFM TF LOP-Tr. 201090% WG6 PIDS 45nmRAM LER 26
1. International Technology Roadmap for Semiconductors 2005 (ITRS2005) http://public.itrs.net/ ITRS2005 Design 2. JEITA STRJ http://strj-jeita.elisasp.net/strj/index.htm ITRS 2004 20046 27